Abstract: A detection apparatus including a plurality of detection systems arranged spaced apart from each other so as to detect, of a plurality of marks provided on an object held by a stage, marks different from each other, and a processing unit configured to perform a first process of obtaining a first detection value by detecting the plurality of marks by one or more detection systems in a first state in which the stage is arranged at a first rotation angle, and a second process of obtaining a second detection value by detecting the plurality of marks by two or more detection systems in a second state in which the stage is arranged at a second rotation angle, and obtain a difference between the first detection value and the second detection value for each of the plurality of marks.

Abstract: A control apparatus sets, in a node located at the start point of an aggregatable segment of two or more packet forwarding paths including the aggregatable segment, a packet handling operation for each flow, the packet handling operation being for writing a flow identifier for identifying the flow and a path identifier used for packet forwarding through the aggregatable segment in a region of each of packets to be matched against the matching rule and then causing the packet to be output. The packets respectively belong to the individual flows, and each of the packets is to be forwarded through a corresponding one of the two or more packet forwarding paths. Further, the control apparatus sets, in a node located intermediate on the aggregatable segment, a common packet handling operation for causing the packet that matches the path identifier to be forwarded according to the packet forwarding path.

Abstract: The present invention provides an imprint apparatus which performs an imprint process of forming a pattern in an imprint material on a substrate using a mold, the apparatus including a measurement unit configured to measure relative positions of the mold and the substrate by detecting a mark provided on each of the mold and the substrate, and a processing unit configured to perform alignment between the mold and the substrate based on a measurement result of the measurement unit, wherein if mark detection by the measurement unit shows an abnormality, the processing unit selects one recovery process from a plurality of recovery processes set in advance and performs the one recovery process in accordance with a time in which it is possible to perform the alignment in the imprint process.

Abstract: A control apparatus, includes: a topology acquisition unit that acquires a topology of a network including a relay apparatus(es) to be controlled; a broadcast path search unit that calculates a broadcast path with an arbitrary external node used as a start point based on the acquired network topology and information on an external node(s) connected to the network; a control command generation unit that generates control information for causing a relay apparatus(es) on the calculated broadcast path to perform packet forwarding along the broadcast path; and a communication unit that sets the generated control information in the relay apparatus(es) on the broadcast path.

Abstract: Apparatus, method and program for restoring path information to its original status when a trouble occurs on a network. An apparatus control part generates, based on a switch information list and an I/F information list stored in a nonvolatile storing part, link information that is prior to the reactivation and used for determining adjacent communication apparatuses. The apparatus control part acquires, via a control network from the adjacent communication apparatuses described in the generated link information, held path information. Thereafter, the apparatus control part (11) decides, based on a stored definition information list, a path sequence such that the path of a lower order layer is placed before the path of an upper order layer. Thereafter, the apparatus control part generates the path information based on the path sequence and further based on the previously acquired held path information.

Abstract: A control apparatus sets, in a node located at the start point of an aggregatable segment of two or more packet forwarding paths including the aggregatable segment, a packet handling operation for each flow, the packet handling operation being for writing a flow identifier for identifying the flow and a path identifier used for packet forwarding through the aggregatable segment in a region of each of packets to be matched against the matching rule and then causing the packet to be output. The packets respectively belong to the individual flows, and each of the packets is to be forwarded through a corresponding one of the two or more packet forwarding paths. Further, the control apparatus sets, in a node located intermediate on the aggregatable segment, a common packet handling operation for causing the packet that matches the path identifier to be forwarded according to the packet forwarding path.

Abstract: An imprint apparatus includes a detection unit configured to detect a mark formed on the mold and a mark formed on the substrate corresponding to a target transfer position, and a control unit configured to obtain information indicating relative position between a mark formed on the mold and a mark formed on the substrate corresponding to the target transfer position. The detection unit detects a mark formed on the mold and a mark formed on the substrate corresponding to the target transfer position, in a state where position of the mold and the substrate is aligned. The control unit performs alignment between the mold and the substrate so that the relative position when the mold and the transfer material are in contact with each other at the target transfer position in the state.

Abstract: [PROBLEMS] To certainly restore path information to its original status when a trouble occurs on a network. [MEANS FOR SOLVING PROBLEMS] After reactivation, an apparatus control part (11) generates, based on a switch information list (123a) and an I/F information list (123b) stored in a nonvolatile storing part (123), link information that is prior to the reactivation and used for determining all adjacent communication apparatuses (10). The apparatus control part (11) acquires, via a control network (20) from all the adjacent communication apparatuses (10) described in the generated link information, held path information held by adjacent communication apparatuses (10) Thereafter, the apparatus control part (11) decides, based on a definition information list (113b) stored in nonvolatile storing part (113), a path sequence such that the path of a lower order layer is placed before the path of an upper order layer.