Abstract: A wafer placement table includes a ceramic plate that has at least a wafer placement part at an upper surface thereof, a cooling plate that is joined to a lower surface of the ceramic plate and that has a refrigerant flow path, gas common paths that are provided above the refrigerant flow path, gas introduction paths that extend from a lower surface of the cooling plate to a corresponding one of the gas common paths, and a plurality of gas distribution paths, that are provided for the gas common paths. The gas distribution path that is disposed at an outermost periphery of the ceramic plate is provided at a position that does not overlap the refrigerant flow path in plan view.

Abstract: A wafer placement table includes an upper substrate; a lower substrate; a through hole extending through the lower substrate in an up-down direction; a plurality of projections provided in a dot pattern, for example, at an entirety of an upper surface of the lower substrate and being in contact with the lower surface of the upper substrate; a heat dissipation sheet having a projection insertion hole and being disposed between the upper substrate and the lower substrate; a screw hole provided, in the lower surface of the upper substrate, at a position facing the through hole; a screw member inserted from a lower surface of the lower substrate into the through hole and screwed into the screw hole; and a thermally conductive paste interposed, for example, between side surfaces of the projections and an inner peripheral surface of the projection insertion hole of the heat dissipation sheet.

Abstract: A wafer placement table includes an upper substrate; a lower substrate; a through hole extending through the lower substrate in an up-down direction; a plurality of projections provided in a dot pattern, for example, at an entirety of an upper surface of the lower substrate and being in contact with the lower surface of the upper substrate; a heat dissipation sheet having a projection insertion hole and being disposed between the upper substrate and the lower substrate; a screw hole provided, in the lower surface of the upper substrate, at a position facing the through hole; a screw member inserted from a lower surface of the lower substrate into the through hole and screwed into the screw hole.

Abstract: A failure diagnosis device applicable to a mechanical device provided with motors independent of One another as sources to drive motion axes, respectively, and configured to acquire a moving position of each motion axis and a disturbance torque value applied to the motion axis every predetermined period, and to diagnose a failure of the mechanical device, includes a failure diagnosis unit configured to diagnose the motion axis as a failure when the disturbance torque value is larger than a predetermined failure determination threshold, and a re-determination unit configured to conduct re-determination of the failure on the motion axis, which is diagnosed as the failure by the failure diagnosis unit, based on a previous maintenance record and a previous inspection result.

Abstract: A failure diagnosis device applicable to a mechanical device provided with a motor as a source to drive a motion axis, and configured to acquire a moving position of the motion axis and a disturbance torque value applied to the motion axis every predetermined period, and to diagnose that a failure is occurring when the disturbance torque value is larger than a failure determination threshold, includes a disturbance torque selector configured to calculate a change from a reference value of each of the acquired disturbance torque values, and to accumulate the disturbance torque values except each disturbance torque value having the change from the reference value equal to or larger than a predetermined threshold, and a failure diagnosis unit configured to diagnose a failure of the mechanical device by using the disturbance torque values accumulated by the disturbance torque selector.

Abstract: A failure diagnostic device for performing a failure diagnosis on a multi-axis robot includes a position detector that detects a movement position of each of joint shafts included in the multi-axis robot, a torque detector that detects a disturbance torque applied to the joint shaft, a routine-operation determination circuit that determines whether or not the multi-axis robot is executing a predefined routine operation, from the movement position detected by the position detector, a reference-value calculation circuit that calculates a disturbance-torque reference value from the disturbance torque detected during execution of the routine operation, a torque correction circuit that corrects the disturbance torque detected while the multi-axis robot executes an operation different from the routine operation by using the disturbance-torque reference value, calculated by the reference-value calculation circuit, to thereby acquire a corrected disturbance torque, and a failure diagnostic circuit that performs a fai

Abstract: An electronic car sharing determination method is disclosed. The method uses a shared vehicle management device in communication with an onboard device and an operator terminal device. The method includes obtaining a state information of a shared vehicle comprising an energy amount of the shared vehicle. The method further includes determining a transportation object vehicle to be transported to an energy supply facility for restoring is the shared vehicle, the determination being made based on the energy amount of the shared vehicle being less than a predetermined remaining amount threshold. The method additionally includes transmitting an electronic task instruction to the operator terminal device to transport the transportation object vehicle to the energy supply facility.

Abstract: A shared vehicle management device for managing shared vehicles used by users, including a rental request acquisition unit configured to acquire a rental request by the user, a vehicle state acquisition unit configured to acquire state information of the shared vehicle, a rental determination unit configured to determine a necessity level of maintenance of the shared vehicle on a basis of the state information of the shared vehicle, and determine whether to prohibit or permit a rental of the shared vehicle with the state information of the shared vehicle and the rental request by the user, and a recommended destination selection unit configured to determine that the shared vehicle needs maintenance upon a determination that the necessity level of maintenance of the shared vehicle is higher than a predetermined reference value when the rental determination unit determines whether to prohibit or permit the rental of the shared vehicle.

Abstract: An operator management device for managing work of an operator in a car sharing system that allows users to use shared vehicles allocated to stations includes a vehicle state acquisition unit configured to acquire state information of the shared vehicle, a transportation object vehicle specifying unit configured to specify a transportation object vehicle to be transported to a facility for restoring the shared vehicle so that the state information changes to a predetermined target value, on a basis of the state information of the shared vehicle and a utilization rate of the shared vehicle for rent at each station, and an operator management unit configured to generate an instruction of a task for the operator who transports the specified transportation object vehicle to the facility and manage execution of the task.

Abstract: A failure diagnosis device for a mechanical device provided with a motor as a source to drive a motion axis, and configured to acquire a moving position of the motion axis and a disturbance torque value applied to the motion axis every predetermined period, and to diagnose that a failure is occurring when the disturbance torque value is larger than a failure determination threshold, includes a maintenance effect determination unit configured to calculate a change in the disturbance torque value before and after conducting of a maintenance task when the maintenance task is conducted on the motion axis, and a failure diagnosis unit configured to re-set the failure determination threshold only when the change in the disturbance torque value is larger than a predetermined threshold.

Abstract: A failure diagnosis device applicable to a mechanical device provided with a motor as a source to drive a motion axis, and configured to acquire a moving position of the motion axis and a disturbance torque value applied to the motion axis every predetermined period, and to diagnose that a failure is occurring when the disturbance torque value is larger than a failure determination threshold, includes a disturbance torque selector configured to calculate a change from a reference value of each of the acquired disturbance torque values, and to accumulate the disturbance torque values except each disturbance torque value having the change from the reference value equal to or larger than a predetermined threshold, and a failure diagnosis unit configured to diagnose a failure of the mechanical device by using the disturbance torque values accumulated by the disturbance torque selector.

Abstract: A failure diagnostic device for performing a failure diagnosis on a multi-axis robot includes a position detector that detects a movement position of each of joint shafts included in the multi-axis robot, a torque detector that detects a disturbance torque applied to the joint shaft, a routine-operation determination circuit that determines whether or not the multi-axis robot is executing a predefined routine operation, from the movement position detected by the position detector, a reference-value calculation circuit that calculates a disturbance-torque reference value from the disturbance torque detected during execution of the routine operation, a torque correction circuit that corrects the disturbance torque detected while the multi-axis robot executes an operation different from the routine operation by using the disturbance-torque reference value, calculated by the reference-value calculation circuit, to thereby acquire a corrected disturbance torque, and a failure diagnostic circuit that performs a fai

Abstract: A failure diagnosis device applicable to a mechanical device provided with. motors independent of One another as sources to drive motion axes, respectively, and configured to acquire a moving position of each motion axis and a disturbance torque value applied to the motion axis every predetermined period, and to diagnose a failure of the mechanical device, includes a failure diagnosis unit configured to diagnose the motion axis as a failure when the disturbance torque value is larger than a predetermined failure determination threshold, and a re-determination unit configured to conduct re-determination of the failure on the motion axis, which is diagnosed as the failure by the failure diagnosis unit, based on a previous maintenance record and a previous inspection result.

Abstract: A failure diagnosis device for a mechanical device provided with a motor as a source to drive a motion axis, and configured to acquire a moving position of the motion axis and a disturbance torque value applied to the motion axis every predetermined period, and to diagnose that a failure is occurring when the disturbance torque value is larger than a failure determination threshold, includes a maintenance effect determination unit configured to calculate a change in the disturbance torque value before and after conducting of a maintenance task when the maintenance task is conducted on the motion axis, and a failure diagnosis unit configured to re-set the failure determination threshold only when the change in the disturbance torque value is larger than a predetermined threshold.

Abstract: A shared vehicle management device for managing shared vehicles used by users, including a rental request acquisition unit configured to acquire a rental request by the user, a vehicle state acquisition unit configured to acquire state information of the shared vehicle, a rental determination unit configured to determine a necessity level of maintenance of the shared vehicle on a basis of the state information of the shared vehicle, and determine whether to prohibit or permit a rental of the shared vehicle with the state information of the shared vehicle and the rental request by the user, and a recommended destination selection unit configured to determine that the shared vehicle needs maintenance upon a determination that the necessity level of maintenance of the shared vehicle is higher than a predetermined reference value when the rental determination unit determines whether to prohibit or permit the rental of the shared vehicle.

Abstract: An operator management device for managing work of an operator in a car sharing system that allows users to use shared vehicles allocated to stations includes a vehicle state acquisition unit configured to acquire state information of the shared vehicle, a transportation object vehicle specifying unit configured to specify a transportation object vehicle to be transported to a facility for restoring the shared vehicle so that the state information changes to a predetermined target value, on a basis of the state information of the shared vehicle and a utilization rate of the shared vehicle for rent at each station, and an operator management unit configured to generate an instruction of a task for the operator who transports the specified transportation object vehicle to the facility and manage execution of the task.

Abstract: A reinforced member which is made from a steel product having a strain aging characteristic and has a closed section at a cross section perpendicular to an axis of the reinforced member. The reinforced member includes a reinforced area which is produced by press-forming the steel product so as to generate a compression strain in the press-formed steel product due to the application of a compression stress to the steel product along the direction from a surface of the steel product to an inside of the steel product, and by giving a strain aging treatment to the press-formed member.

Abstract: An engine hood structure including a hood panel, and a porous metal layer disposed on an inside of the hood panel. The porous metal layer has a density increased in a direction extending from an outer periphery of the engine hood structure toward a central portion of the engine hood structure. The porous metal layer is constructed such that a plateau stress generated in the porous metal layer upon a compression test is increased in a direction extending from an outer periphery of the engine hood structure toward a central portion of the engine hood structure.

Abstract: An engine hood structure including a hood panel, and a porous metal layer disposed on an inside of the hood panel. The porous metal layer has a density increased in a direction extending from an outer periphery of the engine hood structure toward a central portion of the engine hood structure. The porous metal layer is constructed such that a plateau stress generated in the porous metal layer upon a compression test is increased in a direction extending from an outer periphery of the engine hood structure toward a central portion of the engine hood structure.

Abstract: A reinforced member which is made from a steel product having a strain aging characteristic and has a closed section at a cross section perpendicular to an axis of the reinforced member. The reinforced member includes a reinforced area which is produced by press-forming the steel product so as to generate a compression strain in the press-formed steel product due to the application of a compression stress to the steel product along the direction from a surface of the steel product to an inside of the steel product, and by giving a strain aging treatment to the press-formed member.