Abstract: According to one embodiment, a pattern formation method includes holding a substrate on a suction chuck that an outer suction region for an outer edge portion of the substrate and an inner suction region for an inner region of the substrate. A partial shot region at an outer edge of the substrate has a first alignment mark in the inner region and a second alignment mark at the outer edge portion. While a template is being pressed against a resin film in the shot region, position alignment using the second and fourth alignment marks is performed by adjusting a suction force for the outer suction region for changing a warpage amount of the substrate while observing the second and fourth alignment marks through the template.

Abstract: An imprinting method includes placing a template onto non-solidified resin that is applied onto a surface of a substrate, such that the non-solidified resin extends into a pattern of the template in a surface direction of the substrate, starting first alignment operation to align the template with the substrate using a first alignment mark at a first timing, and starting a second alignment operation to align the template with the substrate using a second alignment mark at a second timing after the first timing. The first timing is when the non-solidified resin has extended into the first alignment mark and not yet into the second alignment mark. The second timing is when the non-solidified resin has extended into the first and second alignment marks.

Abstract: According to one embodiment, an imprint lithography template comprises a substrate transparent to ultraviolet light. A first mesa region is on the substrate. A surface of the first mesa region includes a pattern region to be pressed into a photocurable resist film. The pattern region having four sides. A second mesa region is also on the substrate. The first mesa region protrudes from a surface of the second mesa region. A blocking film is adjacent to two sides of the four sides pattern region. The two sides to which the blocking film is adjacent are connected to each other at a corner of the pattern region. The blocking film blocks ultraviolet light.

Abstract: An imprint apparatus includes a moveable substrate support configured to hold a substrate having a transfer target material thereon, a template holder configured to hold a template in which a pattern, which is to be transferred to the transfer target material, is formed, a light source configured to emit light at different selectable intensities toward the transfer target material, and a controller. The controller includes a processing unit and a storage unit, and is configured to retrieve exposure conditions for the transfer target material and control the intensity, and timing of initiation, of the light output by the light source, based on the retrieved exposure conditions, such that the transfer target material is subjected to main curing after undergoing temporary curing.

Abstract: According to one embodiment, an imprint lithography template comprises a substrate transparent to ultraviolet light. A first mesa region is on the substrate. A surface of the first mesa region includes a pattern region to be pressed into a photocurable resist film. The pattern region having four sides. A second mesa region is also on the substrate. The first mesa region protrudes from a surface of the second mesa region. A blocking film is adjacent to two sides of the four sides pattern region. The two sides to which the blocking film is adjacent are connected to each other at a corner of the pattern region. The blocking film blocks ultraviolet light.

Abstract: An imprinting method includes placing a template onto non-solidified resin that is applied onto a surface of a substrate, such that the non-solidified resin extends into a pattern of the template in a surface direction of the substrate, starting first alignment operation to align the template with the substrate using a first alignment mark at a first timing, and starting a second alignment operation to align the template with the substrate using a second alignment mark at a second timing after the first timing. The first timing is when the non-solidified resin has extended into the first alignment mark and not yet into the second alignment mark. The second timing is when the non-solidified resin has extended into the first and second alignment marks.

Abstract: An imprint apparatus includes a moveable substrate support configured to hold a substrate having a transfer target material thereon, a template holder configured to hold a template in which a pattern, which is to be transferred to the transfer target material, is formed, a light source configured to emit light at different selectable intensities toward the transfer target material, and a controller. The controller includes a processing unit and a storage unit, and is configured to retrieve exposure conditions for the transfer target material and control the intensity, and timing of initiation, of the light output by the light source, based on the retrieved exposure conditions, such that the transfer target material is subjected to main curing after undergoing temporary curing.

Abstract: An imprint apparatus includes a substrate support, a template support, and a plurality of independent pressing members. The substrate support is configured to secure a substrate having a transfer target member thereon. The template support has a pressing member side and a template holding side for holding a template, in which a pattern to be transferred to the transfer target material is provided. The plurality of independent pressing members is contactable with the template support, and each pressing member is disposed at a different position on the pressing member side of the template support.

Abstract: A running control device of a vehicle includes an engine with cylinders, a clutch connecting/disconnecting a power transmission path between the engine and wheels, and a variable mechanism to vary an intake air amount sucked into the cylinders. The running control device performs a normal running mode by transmitting engine drive force to the wheels, a neutral inertia running mode by disconnecting the power transmission path between the engine and the wheels, and a cylinder resting inertia running mode by resting at least a part of the cylinders while the power transmission path between the engine and the wheels is connected. The running control device makes the intake air amount sucked into the cylinders larger at the time of return from the neutral inertia running mode to the normal running mode as compared to the case of return from the cylinder resting inertia running mode to the normal running mode.

Abstract: A vehicle controller includes a lock-up clutch disposed to a power transmission path between an engine and a driving wheel, and a clutch configured to connect and disconnect the power transmission path, wherein at the time of switching driven traveling for causing a vehicle to travel by connecting the power transmission path and inertia traveling for causing the vehicle to travel by disconnecting the power transmission path, the lock-up clutch and the clutch are switched at switching start timings different from each other.

Abstract: A running control device has an engine coupling running mode enabling an engine brake running mode performed by coupling an engine and wheels with an engine brake applied by driven rotation of the engine, and an inertia running mode performed with an engine brake force lower than that of the engine brake running mode. The running control device includes a steering wheel steering angle as a condition of terminating the inertia running mode. The running control device performs a first inertia running mode with the rotation of the engine stopped and a second inertia running mode with the engine rotating. The first inertia running mode is terminated when the steering angle becomes equal to or greater than a predefined first determination value. The second inertia running mode is terminated when the steering angle becomes equal to or greater than a predefined second determination value larger than the first determination value.

Abstract: An upper limit value of an upward gradient of a road surface for starting neutral coasting is set to be larger than an upper limit of the upward gradient of the road surface for starting free-run coasting, so, when the upward gradient is relatively large and a coasting distance is short, the vehicle is caused to travel in the neutral coasting, and stop and restart of the engine are not carried out. Therefore, a decrease in drivability of the vehicle is suppressed. When the upward gradient is relatively small and the coasting distance is long, the vehicle is caused to travel in the free-run coasting, and supply of fuel to the engine is stopped, so fuel economy of the vehicle is obtained. Thus, it is possible to achieve both fuel economy and drivability of the vehicle during coasting on an upward gradient.

Abstract: A running control device of a vehicle includes an engine, a connecting/disconnecting device separating the engine and wheels, and a transmission transmitting power of the engine toward the wheels, the running control device being configured to execute a normal running-mode performed by using the power of the engine with the engine and the wheels coupled, a free-run inertia running-mode that is performed by separating the engine and the wheels and stopping the engine during running, and a neutral inertia running-mode that is a performed by separating the engine and the wheels and operating the engine in a self-sustaining manner during running, the running control device setting a gear ratio of the transmission on a low vehicle speed side in the case of return from the free-run inertia running-mode to the normal running-mode as compared to the case of return from the neutral inertia running-mode to the normal running-mode.

Abstract: A running control device of a vehicle including an engine, a connecting/disconnecting device separating the engine and wheels, and a transmission transmitting power of the engine toward the wheels, the running control device of a vehicle being configured to execute a normal running mode performed by using the power of the engine with the engine and the wheels coupled, a free-run inertia running mode that is an inertia running mode performed by separating the engine and the wheels and stopping the engine during running, and a neutral inertia running mode that is an inertia running mode performed by separating the engine and the wheels and operating the engine in a self-sustaining manner during running, the running control device of a vehicle setting a gear ratio of the transmission on a high vehicle speed side in the case of return from the free-run inertia running mode to the normal running mode.

Abstract: A running control system for vehicles is provided to reduce engagement shocks of a clutch and to raise the torque of drive wheels quickly upon satisfaction of a condition of engagement of the clutch. In a vehicle to which the running control system is applied, power transmission between an engine and the drive wheels is selectively enabled by the clutch. The running control system is configured to raise a speed of the engine from an idling speed if the clutch is expected to be engaged during coasting where the clutch is in disengagement to interrupt a torque transmission between the engine and the drive wheels.

Abstract: A running control device of a vehicle includes an engine, a clutch separating the engine and wheels, and a torque converter with a lockup clutch transmitting power of the engine toward the wheels, the running control device of a vehicle is configured to execute a neutral inertia running mode that is an inertia running mode performed while the engine and the wheels are separated and a cylinder resting inertia running mode performed by stopping operation in at least some of cylinders of the engine while the engine and the wheels are coupled, the lockup clutch has a weak engagement force while the neutral inertia running mode is performed as compared to while the cylinder resting inertia running mode is performed.

Abstract: A running control device of a vehicle includes an engine and a brake booster amplifying a brake force by forming a negative pressure in a negative pressure tank by rotation of the engine. The running control device is configured to execute an engine brake running mode performed with the engine coupled to wheels such that an engine brake is applied by driven rotation of the engine and an inertia running mode performed with an engine brake force made lower than that of the engine brake running mode. The running control device executes a first inertia running mode performed with the rotation of the engine stopped and a second inertia running mode performed with the engine kept rotating as the inertia running mode in accordance with predefined respective execution conditions. The running control device comprises a prediction portion configured to predict a necessity of the negative pressure.

Abstract: In consideration of an amplification effect of a braking force at the time of brake operation, upper-limits (?, ?) of a brake operation force (Brk) with which the execution of free-run coasting and neutral coasting is started may be different, on the basis of whether or not a brake booster can be filled with a negative pressure. Therefore, while the braking force at the time of brake operation is secured, the range of the brake operation force (Brk) with which coasting is executed can be enlarged, and an improvement in fuel economy can be made.

Abstract: A controller is capable of controlling a coupled engine running mode, in which an engine is coupled to wheels and an engine brake is activated by driven rotation of the engine, and a coasting mode, in which an engine brake force is reduced with respect to that in the coupled engine running mode with mode with the engine brake on, and starts the coasting mode on the basis of the steering angle of a steering member. The controller starts the execution of a first coasting mode when the steering angle is equal to or less than a preset upper limit value and starts the execution of a second coasting mode when the steering angle is greater than the upper limit value. In the first coasting mode, the engine rotation is stopped, and in the second coasting mode, the engine remains rotating.

Abstract: A running control device of a vehicle executes a normal running mode with an engine coupled to drive wheels, a first inertia running mode with the engine stopped during running and an engine brake force reduced as compared to the normal running mode, and a second inertia running mode with the engine rotating during running and the engine brake force reduced as compared to the normal running mode. A determining portion determines a necessity of a brake negative pressure during the first or second inertia running mode. The necessity of the brake negative pressure is a condition for returning from the first inertia running mode and the second inertia running mode to the normal running mode. An upper limit value of the necessity of the brake negative pressure for returning from the first inertia running mode is smaller than that for returning from the second inertia running mode.