Patents by Inventor Masaki Narazaki

Masaki Narazaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Xenon retrieval system and retrieval device
    Patent number: 8153091
    Abstract: To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: April 10, 2012
    Assignee: L'Air Liquide Societe Anonyme Pour l'Etude Et l'Exploitation des Procedes Georges Claude
    Inventors: Masahiro Kimoto, Terumasa Koura, Yukio Fukuda, Masaki Narazaki, Taiji Hashimoto, Toru Sakai, Kazuo Yokogi
  • XENON RETRIEVAL SYSTEM AND RETRIEVAL DEVICE
    Publication number: 20100074820
    Abstract: To provide a simple highly-pure Xe retrieval method and device with high retrieval efficiency by functionally removing such elements as water, CO2 and FCs from waste gases from semiconductor production processes, such as the plasma etching, that contain low-concentration Xe. For samples containing xenon and fluorocarbon, this invention is characterized by having at least first adsorption means (A1) filled with synthetic zeolite with pore size of 4A or smaller and aluminum oxide, arranged serially, gas separation means (A2) composed of silicone or polyethylene hollow fiber gas separation membrane modules 4, second adsorption means (A3) filled with either activated carbon, synthetic zeolite with pore size of 5A or larger, molecular sieving carbon with pore size of 5A or larger, or a combination of these, and reaction means (A4) filled with calcium compounds as reactant.
    Type: Application
    Filed: November 30, 2007
    Publication date: March 25, 2010
    Inventors: Masahiro Kimoto, Terumasa Koura, Yukio Fukuda, Masaki Narazaki, Taiji Hashimoto, Toru Sakai, Kazuo Yokogi