Abstract: A pattern prediction method according to an embodiment includes: predicting a second pattern shape from a first pattern shape by using a conversion function and a conversion difference residual error amount function, wherein; the conversion function makes the connection between the first pattern formed by a first step and the second pattern formed by a second step following the first step based on contour shapes of the first pattern and the second pattern, and the conversion difference residual error amount function makes the connection between a residual error amount between a predicted shape of the second pattern obtained from the conversion function and the second pattern shape obtained by actually using the second step, and factors other than the contour shapes of the first pattern and the second pattern.

Abstract: In a model-based OPC which makes a suitable mask correction for each mask pattern using an optical image intensity simulator, a mask pattern is divided into subregions and the model of optical image intensity simulation is changed according to the contents of the pattern in each subregion. When the minimum dimensions of the mask pattern are smaller than a specific threshold value set near the exposure wavelength, the region is calculated using a high-accuracy model and the other regions are calculated using a high-speed model.

Abstract: A lithography simulation method of obtaining a resist image by simulation using first and second functions, obtaining the resist image by the simulation includes determining a mask transmission function from a mask layout, modulating the mask transmission function using the first function to determine a modulated mask transmission function, obtaining an optical image of the mask layout using the modulated mask transmission function, and applying the second function to the optical image to obtain the resist image of the mask layout.

Abstract: A method of making a simulation model, includes specifying a feature factor which characterizes a pattern layout of a mask pattern, specifying a control factor which affects a dimension of a resist pattern to be formed on a substrate by means of a lithography process using the mask pattern, determining a predicted dimension of the resist pattern to be formed on the substrate by means of the lithography process using the mask pattern through the use of a model based on the feature and control factors, obtaining an actual dimension of the resist pattern actually formed on the substrate by means of the lithography process using the mask pattern, and setting the feature and control factors and the predicted dimension as input layers and setting the actual dimension as an output layer to construct a neural network.

Abstract: A method of creating a simulation model, includes acquiring a CD value of a photoresist pattern actually formed based upon a test pattern, acquiring information about a shape of the photoresist pattern, acquiring an intensity distribution of an optical image based upon the test pattern by performing simulation, acquiring an empirical threshold defined according to a CD value on the intensity distribution, which corresponds to the CD value of the photoresist pattern, acquiring a parameter of the optical image based upon the intensity distribution of the optical image, acquiring a first correlation between the information about the shape of the photoresist pattern and the parameter of the optical image, acquiring a second correlation between the information about the shape of the photoresist pattern and the empirical threshold, and acquiring a third correlation between the parameter of the optical image and the empirical threshold by using first and second correlations.

Abstract: A lithography simulation method which predicts the result that a pattern formed on a mask is transferred onto a sample by use of a simulation based on pattern data of the mask includes subjecting a mask layout containing a pattern whose periodicity is disturbed to the simulation. At this time, a calculation area of pattern data used for the simulation is set to an integral multiple of minimum periodic length of the mask layout.

Abstract: A lithography simulation method includes obtaining a mask transmission function from a mask layout, obtaining an optical image of the mask layout by using the mask transmission function, obtaining a function which is filtered by applying a predetermined function filter to the mask transmission function, and correcting the optical image by using the filtered function.

Abstract: A silicon oxide layer is formed at a surface region of a silicon substrate. Then, an amorphous silicon layer 13 is formed preferably in a thickness of 1 nm or below on the silicon substrate via the silicon oxide layer. Then, the amorphous silicon layer 13 is exposed to a silane gas preferably with heating the silicon substrate within a temperature range of 400-800° C. to form a high density and minute silicon nanocrystal.

Abstract: The present invention provides a magnetic recording medium having high dispersion property, good running durability and good preservation property, and it comprises at least one magnetic layer having ferromagnetic powder dispersed by a binder placed on a non-magnetic support member, whereby a polyurethane resin or a polyurethane urea resin consisting of 5 mol % or less of a long chain diol having weight average molecular weight of 800 to 5,000, a short chain diol having weight average molecular weight of 50 to 500 and/or a short chain diamine and an organic diisocyanate is contained as the binder, said long chain diol has one polar group selected from —COOM, —SO3M, —OSO3M, —OPO(OM)2, or —PO(OM)2 (where M represents a hydrogen atom, an alkali metal ion, or an ammonium ion) in the molecule, and the polar group is contained in the polyurethane by 1 to 5 mol %.

Abstract: The present invention provides a magnetic recording medium having good electromagnetic transfer characteristics and high running durability, and it comprises a lower layer and a magnetic layer, said lower layer having at least one of magnetic powder or non-magnetic inorganic powder and a binder (A) dispersed therein and being placed on a non-magnetic support member, at least one layer of said magnetic layers having ferromagnetic powder and a binder (B) dispersed therein and being deposited on said lower layer, whereby said magnetic recording medium comprises polyurethane resins (1) and (2), said polyurethane resin (1) is contained as said binder (B) and comprises a short-chain diol having a cyclic structure and weight average molecular weight of 200 to 500 in an amount of 15 to 50 weight %, a polyol having an ether group of 1 to 6 mmol/g and weight average molecular weight of 500 to 5000 in an amount of 10 to 50 weight % in polyurethane, and an organic diisocyanate, and said polyurethane resin (2) is containe

Abstract: The present invention provides a magnetic recording medium, which has high dispersion property, high breaking extension and excellent running durability. The magnetic recording medium comprises a magnetic layer having at least one layer of ferromagnetic powder and a binder, said magnetic layer being placed on a non-magnetic support member, whereby said binder contains at least a polyurethane resin (A) and a polyether polyester urethane resin (B), said polyurethane resin (A) contains a polyol with molecular weight of 500 to 5,000 by 0 to 50 weight %, said polyol being obtained by adding alkylene oxide to a diol having cyclic structure, said polyurethane resin (A) also contains a diol having cyclic structure and/or a short-chain diol with molecular weight of 200 to 500 by 15 to 50 weight %, said short-chain diol being obtained by adding alkylene oxide to diol, said polyurethane resin contains ether groups obtained from said diol and said polyol by 1.0 to 5.

Abstract: The present invention provides a magnetic recording medium having high durability and excellent electromagnetic transfer characteristics and having a lower coating layer, which contains a binder and has high dispersion property and durability. The magnetic recording medium comprises a lower coating layer where non-magnetic powder or ferromagnetic power is dispersed in a binder and an upper magnetic layer where ferromagnetic powder is dispersed in a binder, said two layers being placed on a non-magnetic support member, whereby the binder of the lower coating layer comprises polyurethane resin, which is a reaction product using diol and organic diisocyanate as major materials, the polyurethane resin contains short-chain diol having cyclic structure by 17 to 40 weight %, and the polyurethane resin contains long-chain diol, containing ether groups by 1.0 to 5.0 mmol/g to the entire polyurethane resin, by 10 to 50 weight %.

Abstract: The invention relates to a binder which improves the dispersibility of ferromagnetic powders and makes it possible to achieve a magnetic recording medium excellent in operation durability and storability, and a magnetic recording medium using such a binder. The invention provides a magnetic recording medium including a non-magnetic support substrate and a magnetic layer formed on said support substrate, said magnetic layer comprising a dispersion of ferromagnetic fine powders in a binder, wherein said binder comprises a polyurethane resin that is a reaction product obtained by using a polyol and an organic diisocyanate as main starting materials, said polyurethane resin containing as components of said polyol 15 to 40% by weight of a short-chain diol component having a cyclic structure, and 10 to 50% by weight of a long-chain polyether polyol component, and further including a polar group-containing long-chain polyol component having a molecular weight of 500 to 5,000.

Abstract: In a binder for a magnetic recording medium for forming a magnetic layer with ferromagnetic powder dispersed therein being arranged on a non-magnetic support member, whereby said binder consists of a polyurethane resin, which is a reaction product of diol and organic diisocyanate as principal materials, said polyurethane resin contains a short-chain diol having cyclic structure by 17 to 40 weight %, and said polyurethane resin contains a long-chain diol comprising 1.0 to 5.0 mmol/g of ether group to total urethane resin by 10 to 50 weight %. According to a binder for a magnetic recording medium and a magnetic recording medium using said binder of the present invention, good dispersion property, high running durability and preservation property can be obtained.

Abstract: A magnetic recording medium having a ferromagnetic metal thin film on at least one surface of a non-magnetic support. The magnetic recording medium has a surface layer containing at least either one of fluorine compounds represented by the following formulae (1) and (2):Rf-R.sub.1 Formula (1)Rf-R.sub.2 -Rf Formula (2)whereRf: (CF.sub.3).sub.a CF.sub.3-a (CF.sub.2).sub.ba: 1 to 3a+b: 1 to 11R.sub.1 : an alkyl or alkenyl group having from 8 to 26 carbon atomsR.sub.2 : an alkylene or alkenylene group having from 2 to 14 carbon atoms.The surface layer may be formed on a carbon film provided on the ferromagnetic metal thin film. The surface layer may further contain a fluorine compound having at least one polar group and a perfluoroalkyl group, and a rust inhibitor. These components may be contained in or coated on a back coat layer. The magnetic recording medium is excellent in running properties, durability and shelf stability.

Abstract: A magnetic recording medium, comprising a magnetic layer having ferromagnetic metallic thin film at least on one side of a non-magnetic support, whereby a layer is formed on the magnetic layer, said layer contains at least one type of fluorine compounds having at least two perfluoroalkyl groups given by the following general formula (1) or (2) and one or more polar groups selected from --OH, --COOM, --SO.sub.3 M, --OSO.sub.3 M, --PO.sub.3 M.sub.2 or --OPO.sub.3 M.sub.2 (M representing hydrogen atom, alkali metal or ammonium):General formula (1)CF.sub.3 CF.sub.2 (CF.sub.2).sub.n (CH.sub.2)--.sub.mGeneral formula (2)(CF.sub.3).sub.2 CF(CF.sub.2).sub.n (CH.sub.2)--.sub.mwhere n is a number of 2 to 10, m is a number of 1 to 18, and n+m are an integer of 6 to 26.

Abstract: A magnetic recording medium having a ferromagnetic metal thin film formed over at least one surface of a non-magnetic support, wherein the improvement has a lubricant layer consisting essentially of at least one of unsaturated bond-containing fluoroalkyl carboxylic acid esters which are represented by the following formulae (1) to (3):Rf--R.sub.1 --COO--R.sup.2 Formula (1)R.sup.3 --COO--R.sub.4 --Rf Formula (2)Rf--R.sup.5 --COO--R.sup.6 Rf Formula (3)where Rf: (CF.sub.3).sub.a CF.sub.3-a (CF.sub.2).sub.ba: 1 to 3 a+b: 1 to 17R.sup.1 is an alkyl group having from 2 to 18 carbon atoms, or a hydrocarbon group having from 2 to 18 carbon atoms and containing at least one double or triple bond, and R.sup.2 is an alkyl group having from 4 to 22 carbon atoms, or a hydrocarbon group having from 4 to 22 carbon atoms and containing at least one double or triple bond. At least either one of R.sup.1 and R.sup.2 contains at least one double or triple bond. R.sup.3 is an alkyl group having from 3 to 21 carbon atoms, and R.

Abstract: A binder for a magnetic recording medium comprising a polyurethane which is a reaction product obtained from a polyol and a polyisocyanate as principal raw materials. The polyol is an aliphatic polyol with a molecular weight of not lower than 500. The binder has high dispersibility and provides excellent running durability and shelf stability. Also disclosed is a magnetic recording medium having at least one magnetic or non-magnetic layer containing the above-described binder on at least one surface of a non-magnetic support.

Abstract: A magnetic recording medium having a magnetic layer on a non-magnetic support, whereby an organic fluorine compound given by the following general formulae (1) or (2) is formed on said magnetic layer: ##STR1## where Rf.sup.1, Rf.sup.2 and Rf.sup.3 each represents a fluoroalkyl group, Y.sup.1, Y.sup.2 and Y.sup.3 each represents --O--, --OCO--, --COO, --NHCO--, or --CONH--and may be the same or different;R.sup.1 represents .dbd.CH.sub.2, .dbd.CH(CH.sub.2).sub.k CH.sub.3, or .dbd.CHCH.dbd.CH.sub.2, and k is a number from 0 to 2;R.sup.2 and R.sup.5 each represents H, and R.sup.2 is not present in case the carbon to which R.sup.2 is bonded has double bond.R.sup.3, R.sup.4 or R.sup.6 each represents H or a hydrocarbon group, which may have double bond.A, B and X each represents (CH.sub.2).sub.k, and k is a number from 0 to 2, and b is a number of 0 or one or higher.Rf.sup.1, Rf.sup.2, Rf.sup.3, Y.sup.1, Y.sup.2, Y.sup.3, A, B, X, R.sup.4, R.sup.5, R.sup.

Abstract: The magnetic recording medium of the present invention comprises a ferromagnetic metallic thin film formed on a non-magnetic support, whereby a protective layer is formed on the ferromagnetic metallic thin film, said protective layer contains at least one type of thiouracil cyclic compounds having hydrocarbon group and at least one type of fluorine compounds having hydrocarbon group, or at least one type of tetrazaindene cyclic compounds and at least one type of fluorine compounds having hydrocarbon group, and no rusting occurs even when it is repeatedly run.