Abstract: A method and system for distributing a key is provided which make use of effects of noise caused at the time of transmitting or receiving a signal to send a key. A transmission signal is amplified at a plurality of stages while the relationship between the transmission signal and noise is being maintained at a level enough to satisfy predetermined criteria for security measures against eavesdropping activities, and the key is sent over a long distance. The aforementioned operation makes it possible to transmit or distribute a key over a long distance while maintaining the relationship between the transmission signal and noise at a level enough to satisfy the criteria for security measures against eavesdropping activities.

Abstract: A heat treatment system for controlling the temperature in a processing vessel. The system includes a cylindrical processing vessel; a supporting table, raised by a support from the bottom portion of the processing vessel, for mounting thereon an object to be processed; and a processing object heating part provided in the supporting table, for heating the object to be processed. In addition a thermoelectric conversion element capable of selectively heating or cooling is provided in the bottom portion of the processing vessel, a resistive heater is provided in the side wall of the processing vessel, and a temperature control part for controlling the operations of the thermoelectric conversion element and the resistive heater is provided. Thus, it is not only possible to appropriately control the temperature in the processing vessel, but it is also possible to reduce space and energy, by combining the resistive heater with a thermoelectric conversion element.

Abstract: There is provided a heat treatment system which is not only capable of appropriately controlling the temperature in a processing vessel, but also capable of reducing space and energy, by combining a resistive heater with a thermoelectric conversion element. The heat treatment system comprises: a cylindrical processing vessel 4; a supporting table 14, raised by a support from the bottom portion of the processing vessel, for mounting thereon an object W to be processed; and a processing object heating part 16, provided in the supporting table, for heating the object to be processed, wherein a thermoelectric conversion element 38 capable of selectively heating or cooling is provided in the bottom portion of the processing vessel, a resistive heater 50 is provided in the side wall of the processing vessel, and a temperature control part 40 for controlling the operations of the thermoelectric conversion element and the resistive heater is provided.

Abstract: A process system comprises cassette housing chambers 33A and 33B, each of which houses therein a cassette C having housed an object W to be processed, and process chambers 26A through 26D for carrying out a predetermined process for the object W. The cassette housing chambers 30A and 30B are connected to the process chambers 26A through 26D via a transfer chamber 28. In the transfer chamber 28, there are provided a first transfer unit 32 for delivering the object W between the cassette housing chambers 30A and 30B and the transfer chambers 26A through 26D, and a second transfer unit 34 for delivering the object W between the process chambers 20A through 26D and the transfer chamber 28. In the overlapping range 36 of transfer ranges of the first and second transfer units 32 and 34, an aligning unit 38 for aligning the object W is arranged.

Abstract: A method and system for distributing a key is provided which make use of effects of noise caused at the time of transmitting or receiving a signal to send a key. A transmission signal is amplified at a plurality of stages while the relationship between the transmission signal and noise is being maintained at a level enough to satisfy predetermined criteria for security measures against eavesdropping activities, and the key is sent over a long distance. The aforementioned operation makes it possible to transmit or distribute a key over a long distance while maintaining the relationship between the transmission signal and noise at a level enough to satisfy the criteria for security measures against eavesdropping activities.

Abstract: An auxiliary vacuum chamber 12 according to the invention comprises a container 30 having an opening 10, 14 for taking an object to be processed W into and out of the container. A holder 33a is movably placed in the container 30, which can hold the object W taken therein. The holder 33a can also form a hermetically closed space 32a with a portion of the container 30 when moved in the container 30. The container 30 is provided with supplying means 38a for supplying a gas from the outside of the container 30 into the hermetically closed space 32a. The container 30 is also provided with exhaust means 37 for exhausting the gas from the hermetically closed space 32a to the outside of the container 30. According to the invention, the auxiliary vacuum chamber 12 need not have gate-valves for being opened and shut to the other chambers 4 and 16.

Abstract: A picture transmission system capable of establishing arbitrary picture connections with picture inputting units exceeding in number channel resources of a transmission medium for multiplexing and transmitting video information taken through the picture inputting units. A picture sending state storage unit provided corresponding to each of the picture inputting units virtually retains channel resources whose number equals the number of picture outputting units to which the picture inputting units are in connection. For picture connection switching from one picture outputting unit to a different picture inputting unit, the picture sending state storage unit gives its channel resource to the different picture inputting unit. The system is provided with a picture connection managing unit for controlling the picture connections between the picture inputting units and the picture outputting units.

Abstract: A video monitor system comprises a transmitting medium, video cameras, monitors, VTR, monitor terminals, a control portion and a transmitting medium having channels of video signals and a data channel coupling these units. The video monitor receives a request of a desired camera and a desired monitor and supplies the data indicative the request. The control portion receives the data indicative of the request and determines one of channels and operates the desired camera and desired monitor thorough the determined one of channels to display a video signal on the desired monitor. The VTR records one of video signals from a desired video camera through determined one of channels. A priority is judged to control one video camera which are requested to be operated by two monitor control terminals at the same time. A diagnostic function for detecting a defect and a location in the transmitting medium and a sequential operation function are also provided.

Abstract: A detecting apparatus consists of a covariance calculating section for calculating covariances Sij=.intg..intg..intg.(fi*fj)dxdydt (i,j.epsilon.