Patents by Inventor Masami Nagayama
Masami Nagayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140112814Abstract: A vacuum pump (10) has a pump casing (54) including pump chambers (50a-50f) held in fluid communication with each other and arrayed in a longitudinal direction thereof, an inlet port (52a) and an outlet port (52b), a rotational shaft (58) rotatably supported at opposite ends thereof and extending in the longitudinal direction of the pump casing (54), and rotors (60a-60f) housed in the pump chambers (50a-50f) and coupled to the rotational shaft (58). The pump casing (54) includes a first thermally conductive member (72) extending parallel to the rotational shafts (58) substantially the full length of the pump casing (54) in the longitudinal direction thereof, and a second thermally conductive member (74) positioned near an end of the first thermally conductive member (72) at the outlet port (52b) and extending in a transverse direction of the pump casing (54).Type: ApplicationFiled: May 29, 2012Publication date: April 24, 2014Applicant: EBARA CORPORATIONInventors: Soichi Kudara, Masami Nagayama
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Publication number: 20140112815Abstract: A vacuum pump (10) includes a pump casing (56) having an inlet port (54a), an outlet port (54b), and pump chambers (50a-50f) defined therein, rotational shafts 60 having opposite ends rotatably supported by bearings (84a, 84b) on the pump casing (56) and extending longitudinally in the pump casing (56), and rotors (62a-62f) housed in the pump chambers (50a-50f) and coupled to the rotational shafts (60) for rotation in unison with the rotational shafts (60). The pump casing (56) has an atmosphere-vented compartment (52) defined therein which is held in fluid communication with the outlet port (54b) of the pump casing (56) and vented to the atmosphere.Type: ApplicationFiled: May 29, 2012Publication date: April 24, 2014Applicant: Ebara CorporationInventors: Soichi Kudara, Yasuhiro Niimura, Masami Nagayama
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Patent number: 7098045Abstract: A processing method is performed for processing a workpiece such as a semiconductor wafer. The processing method utilizes an apparatus comprising a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.Type: GrantFiled: February 10, 2005Date of Patent: August 29, 2006Assignee: Ebara CorporationInventors: Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono, Mutsumi Saito
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Publication number: 20050145171Abstract: A processing method is performed for processing a workpiece such as a semiconductor wafer. The processing method utilizes an apparatus comprising a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.Type: ApplicationFiled: February 10, 2005Publication date: July 7, 2005Inventors: Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono, Mutsumi Saito
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Patent number: 6869890Abstract: A processing apparatus is used for processing a workpiece such as a semiconductor wafer. The processing apparatus comprises a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.Type: GrantFiled: January 3, 2002Date of Patent: March 22, 2005Assignee: Ebara CorporationInventors: Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono, Mutsumi Saito
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Publication number: 20040213686Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: ApplicationFiled: May 24, 2004Publication date: October 28, 2004Applicant: EBARA CORPORATIONInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Patent number: 6761542Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: GrantFiled: July 16, 2002Date of Patent: July 13, 2004Assignee: Ebara CorporationInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Publication number: 20020172599Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: ApplicationFiled: July 16, 2002Publication date: November 21, 2002Applicant: EBARA CORPORATIONInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Patent number: 6447271Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: GrantFiled: December 11, 2000Date of Patent: September 10, 2002Assignee: Ebara CorporationInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Publication number: 20020088399Abstract: A processing apparatus is used for processing a workpiece such as a semiconductor wafer. The processing apparatus comprises a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.Type: ApplicationFiled: January 3, 2002Publication date: July 11, 2002Inventors: Nobuharu Noji, Hiroshi Sobukawa, Masami Nagayama, Koji Ono, Mutsumi Saito
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Publication number: 20010000722Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: ApplicationFiled: December 11, 2000Publication date: May 3, 2001Applicant: EBARA CORPORATIONInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Patent number: 6183218Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: GrantFiled: July 30, 1998Date of Patent: February 6, 2001Assignee: Ebara CorporationInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Patent number: 5816782Abstract: A multistage positive-displacement vacuum pump which is preferably used in the fabrication of semiconductor devices and can be operated from atmospheric pressure. The vacuum pump comprises a pump casing, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and arranged in multiple stages, and an intermediate pressure chamber provided between a preceding stage and a subsequent stage in the pump casing. The shaft portions of the pump rotors located between the preceding and subsequent stages are located in the intermediate pressure chamber.Type: GrantFiled: September 2, 1997Date of Patent: October 6, 1998Assignee: Ebara CorporationInventors: Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Patent number: 5814913Abstract: A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.Type: GrantFiled: April 20, 1995Date of Patent: September 29, 1998Assignee: Ebara CorporationInventors: Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama, Katsuaki Usui, Hiroaki Ogamino
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Patent number: 5779453Abstract: A vacuum pump has a pump casing having a suction side where a suction port is located and a discharge side where a discharge port is located, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and having respective shafts, and a brushless direct-current motor mounted on the pump casing at a suction side of the pump casing. The motor has a pair of motor rotors comprising respective sets of permanent magnets which are mounted respectively on the shafts, a pair of cans surrounding outer circumferential and end surfaces of the motor rotors in sealing relation to the pump assembly, a motor stator mounted on the cans and housed in a water-cooled motor frame.Type: GrantFiled: January 3, 1997Date of Patent: July 14, 1998Assignee: Ebara CorporationInventors: Masami Nagayama, Katsuaki Usui, Kozo Matake, Yoshinori Ojima, Genichi Sato, Yasushi Hisabe