Abstract: A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.

Abstract: The conveying unit conveys a long sheet-like subject in its longitudinal direction. The conveying unit includes a stepped roller which has large-diameter portions spaced apart from each other in a direction perpendicular to a direction of conveyance of the sheet-like subject and having a larger diameter than a remainder of the stepped roller being a small-diameter portion of the stepped roller, the large-diameter portions supporting and conveying the sheet-like subject, a closed space forming subunit between the small-diameter portion of the stepped roller and the sheet-like subject and a gas supply subunit for supplying a gas to the closed space. The vacuum deposition device forms a film on a surface of a long substrate by vacuum deposition. The vacuum deposition device includes a vacuum chamber, a conveying device which includes the conveying unit and a film forming unit.

Abstract: The method for producing a functional film includes a step of forming an organic film on a surface of a substrate and a step of forming an inorganic film by vacuum deposition on a surface of the organic film to produce the functional film. Prior to forming the inorganic film, a member contacts the surface of the organic film in a vacuum chamber at portions where the organic film does not exhibit its functions.

Abstract: A film roll comprises an elongated substrate film for film deposition wound into a roll, the substrate film including: at least one elongated product-film portion having a pair of surfaces opposite with each other, with one of the surfaces serving as a surface for film deposition; and at least one cleaning-film portion connected to an end of the product-film portion and having a pair of surfaces opposite with each other, with at least one of the surfaces serving as a cleaning surface having a dust removal function.

Abstract: The method for producing a functional film includes a step of forming an organic film on a surface of a substrate and a step of forming an inorganic film by vacuum deposition on a surface of the organic film to produce the functional film. Prior to forming the inorganic film, a member contacts the surface of the organic film in a vacuum chamber at portions where the organic film does not exhibit its functions.

Abstract: The method of depositing a gas barrier layer includes supplying a gas material including silane gas and ammonia gas as and a discharge gas including nitrogen gas as and depositing a silicon nitride film on a substrate using capacitively coupled chemical vapor deposition to form the gas barrier layer on the substrate. A ratio P/Q of RF power P (W) required to form the silicon nitride film to a total gas flow rate Q (sccm) of the silane gas, the ammonia gas and the nitrogen gas is in a range of from 0.4 to 40. The gas barrier film includes the gas barrier layer deposited by the gas barrier layer deposition method. The organic EL device includes the gas barrier film that serves as a sealing film.

Abstract: A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.

Abstract: The conveying unit conveys a long sheet-like subject in its longitudinal direction. The conveying unit includes a stepped roller which has large-diameter portions spaced apart from each other in a direction perpendicular to a direction of conveyance of the sheet-like subject and having a larger diameter than a remainder of the stepped roller being a small-diameter portion of the stepped roller, the large-diameter portions supporting and conveying the sheet-like subject, a closed space forming subunit between the small-diameter portion of the stepped roller and the sheet-like subject and a gas supply subunit for supplying a gas to the closed space. The vacuum deposition device forms a film on a surface of a long substrate by vacuum deposition. The vacuum deposition device includes a vacuum chamber, a conveying device which includes the conveying unit and a film forming unit.