Abstract: According to the invention, a Ti film is formed on a substrate and is annealed at the temperatures of 350° C.-400° C. under oxidative environment, so that a TiO2 film having a rutile crystal structure is formed. Since the TiO2 film having a rutile crystal structure has a high dielectric constant, it is useful for a capacitive insulating film for a capacitor.

Abstract: A capacitor insulating film for use as an insulating film sandwiched between two electrodes is made of a crystal containing a hafnium element in a titanium site in place of a part of titanium elements contained in a crystal of a strontium titanate or barium strontium titanate.

Abstract: Disclosed is a dielectric film having a high dielectric constant and an excellent leakage breakdown. The dielectric film includes a TiO2 film containing Zr or Al in a concentration of less than 40% by a ratio of the number of atoms represented by (Zr or Al)/((Zr or Al)+Ti) with an approximately constant concentration profile in the direction of the film thickness. The dielectric film is suitable for a dielectric film of a semiconductor device, particularly a capacitor dielectric film.

Abstract: A capacitor for a semiconductor device having a dielectric film between an upper electrode and a lower electrode is featured in that the dielectric film includes an alternately laminated film of hafnium oxide and titanium oxide at an atomic layer level.

Abstract: According to the invention, a Ti film is formed on a substrate and is annealed at the temperatures of 350° C.-400° C. under oxidative environment, so that a TiO2 film having a rutile crystal structure is formed. Since the TiO2 film having a rutile crystal structure has a high dielectric constant, it is useful for a capacitive insulating film for a capacitor.

Abstract: A semiconductor device including a capacitor which includes a first electrode, a second electrode, and a dielectric layer disposed between the first electrode and the second electrode, the dielectric layer including: a first paraelectric film formed of a material containing a first metal element and at least one kind of second metal element; a second paraelectric film disposed between the first electrode and the first paraelectric film; and a third paraelectric film disposed between the second electrode and the first paraelectric film, wherein the second paraelectric film is formed of a material containing the first metal element but substantially not containing the second metal element, and the third paraelectric film is formed of a material containing the first metal element but substantially not containing the second metal element.

Abstract: A capacitor insulating film for use as an insulating film sandwiched between two electrodes is made of a crystal containing a hafnium element in a titanium site in place of a part of titanium elements contained in a crystal of a strontium titanate or barium strontium titanate.

Abstract: An insulation film includes niobium, oxygen and a metal element, and the insulation film has a band gap width of larger than 4.2 eV, and at least a portion of the insulation film includes an amorphous structure.

Abstract: A capacitor for a semiconductor device having a dielectric film between an upper electrode and a lower electrode is featured in that the dielectric film includes an alternately laminated film of hafnium oxide and titanium oxide at an atomic layer level.

Abstract: The insulator film of the present invention is suited for use as the insulator material of capacitor elements composing DRAM, is used as the insulator layer of a capacitor element provided with an insulator layer that is interposed between an upper electrode and a lower electrode, and is composed of titanium dioxide to which at least one element from among the lanthanoid elements, Hf and Y is added.

Abstract: A semiconductor device including a capacitor which includes a first electrode, a second electrode, and a dielectric layer disposed between the first electrode and the second electrode, the dielectric layer including: a first paraelectric film formed of a material containing a first metal element and at least one kind of second metal element; a second paraelectric film disposed between the first electrode and the first paraelectric film; and a third paraelectric film disposed between the second electrode and the first paraelectric film, wherein the second paraelectric film is formed of a material containing the first metal element but substantially not containing the second metal element, and the third paraelectric film is formed of a material containing the first metal element but substantially not containing the second metal element.