Abstract: A soft X-ray measurement device detects a characteristic X-ray emitted from a sample including a primary element and a secondary element. An X-ray spectrum generated by a spectrum generator includes a waveform of interest which is an intrinsic waveform of the primary element, caused by transition of electrons from a valence band to an inner shell in the primary element. A secondary element analyzer calculates quantitative information of the secondary element through analysis of the waveform of interest.

Abstract: To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G1 to G3, the corresponding energy ranges for G1, G2, and G3 being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles ?1 to ?3 for G1 to G3 measured from the normal line of the diffraction grating are specified to be ?1<?2<?3. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet ?1<?2<?3, the center positions ?1 to ?3 for G1 to G3 are set on the normal line (as ?1<?2<?3). From G1 to G3, one diffraction grating can be selected.

Abstract: To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G1 to G3, the corresponding energy ranges for G1, G2, and G3 being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles ?1 to ?3 for G1 to G3 measured from the normal line of the diffraction grating are specified to be ?1<?2<?3. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet ?1<?2<?3, the center positions ?1 to ?3 for G1 to G3 are set on the normal line (as ?1<?2<?3). From G1 to G3, one diffraction grating can be selected.

Abstract: An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.

Abstract: An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.

Abstract: A method of manufacturing a copper-based catalyst having high activity and superior heat resistance and a catalyst used for steam reforming of methanol has Al alloy particles each having an oxide surface layer containing fine copper oxide particles. The Al alloy particles are produced by leaching Al alloy particles with an aqueous solution. The Al alloy particles are prepared by pulverizing a bulky Al alloy having a quasicrystalline phase, the quasicrystalline phase being represented by the formula Al100-y-zCuyTMz (where y is 10 to 30 atomic percent, z is 5 to 20 atomic percent, and TM indicates at least one of transition metals other than Cu). In the catalyst, the oxide surface layer containing fine copper oxide particles is formed by adjusting leaching conditions so as to form an oxide surface layer, which contains dispersed fine Cu particles and which is composed of an Al oxide and a transition metal oxide, on the surface of each of the Al alloy particles.

Abstract: [Object] To provide a copper-based catalyst having high activity and superior heat resistance and durability and to provide a manufacturing method of the above catalyst which can be performed at a low cost by a process that is improved as simple as possible. [Solving Means] A catalyst used for steam reforming of methanol has Al alloy particles each having an oxide surface layer containing fine copper oxide particles, the Al alloy particles being produced by a process comprising the step of performing leaching treatment for Al alloy particles with an aqueous alkaline solution which are prepared by pulverizing a bulky Al alloy having a quasicrystalline phase or a related crystalline phase thereof, the quasicrystalline phase being represented by the formula: Al100-y-zCuyTMz (where y is in the range of 10 to 30 atomic percent, z is in the range of 5 to 20 atomic percent, and TM indicates at least one of transition metals other than Cu).

Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.

Abstract: An omega energy filter capable of increasing energy dispersion while canceling out second-order aberrations. The energy filter is mirror-symmetric with respect to the center plane C. A beam enters a first nonuniform magnetic field produced by a first magnet, then enters a second nonuniform magnetic field region produced by a second magnet. The trajectory of the beam is curved by the field produced by the second magnet. Finally, the beam enters a third magnetic field region produced by the first magnet. The beam is deflected in this region and reaches an exit slit.

Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.

Abstract: There is disclosed an energy filter capable of reducing the Boersch effect. Also, an electron microscope using this energy filter is disclosed. This energy filter is composed of a first-stage energy filter and a second-stage energy filter arranged along the optical axis of an electron beam. The length L1 of the first-stage filter is selected to be greater than the length L2 of the second-stage filter. An energy-selecting slit is positioned in the electron beam path within the free space between the first- and second-stage filters. Each of these two stages of filters is a Wien filter having mutually perpendicular electric and magnetic fields.

Abstract: An omega energy filter capable of increasing energy dispersion while canceling out second-order aberrations. The energy filter is mirror-symmetric with respect to the center plane C. A beam enters a first nonuniform magnetic field produced by a first magnet, then enters a second nonuniform magnetic field region produced by a second magnet. The trajectory of the beam is curved by the field produced by the second magnet. Finally, the beam enters a third magnetic field region produced by the first magnet. The beam is deflected in this region and reaches an exit slit.

Abstract: There is disclosed an imaging energy filter equipped with a distortion corrector. The energy filter is incorporated in an electron microscope and includes a spectrometer having magnets for producing magnetic fields. In this spectrometer, coils for exciting the magnets and potentiometers having variable resistors are connected in parallel. The variable resistors of the potentiometers are shifted to control the ratio of currents flowing into coils of shunting circuits.