Abstract: By working a grabbing portion by a charged particle beam of FIB or the like, the grabbing portion in parallel with the beam can be formed, and also dust adhered to the grabbing portion is removed. When a small sample represented by a TEM sample is fabricated by being cut out by etching by a charged particle beam and is carried at inside of an apparatus of irradiating a charged particle beam, the sample is etched in a direction of irradiating the charged particle beam, and therefore, a mechanism pinched by a grabbing face of a grabbing portion can be worked in a direction the same as that in working the sample, and therefore, a change in an attitude can be reduced when the sample and the grabbing face are fabricated by parallel faces.

Abstract: A substrate comprises a substrate main body having a surface on which a measurement object article is to be formed. A reference scale is disposed on the surface of the substrate main body in the vicinity of a region of the surface where the measurement object article is to be formed. The reference scale has adjacent graduations spaced-apart a preselected distance from one another.

Abstract: In a chamber of a charged particle beam apparatus, the sample on the sample substrate is gripped and carried to the sample holder, and there is controlled the attitude of the sample when the sample is fixed on the sample holder. There possesses a marking process applying, in the chamber, a marking to a surface of the sample Wb existing on the sample substrate by a beam, a carriage process gripping the sample by a sample gripping means and carrying it from the sample substrate to the sample holder, and an attitude control process controlling, when fixing the sample to the sample holder, the attitude of the sample while observing the marking applied to the surface of the sample.

Abstract: Objects to be achieved by the invention are to provide a nanobio device in which cultured cells are organized at a high-level in a state near in vivo, and to provide a method of using the nanobio device of imitative anatomy structure. The nanobio device of imitative anatomy structure of the invention is obtained by manufacturing a substrate with a bio-compatible substance and arranging a plurality of types of cells thereon in a desired array. A method of manufacturing a nanobio device in the invention includes a step of manufacturing a substrate for a nanobio device by a micromachine processing technique and a step of arranging a plurality of cultured cells on the substrate in a desired array with laser optical tweezers.

Abstract: A method of approaching a probe to a target position on a sample mounted on a sample stage tilted at a preselected tilt angle about a tilt axis of the sample stage. A distance between the tip of the probe and the target position of the sample is observed with a charged particle beam microscope while approaching the tip of the probe to the target position on the sample. The probe is moved in a direction so that on a display of the charged particle beam microscope, the tip of the probe and the tip of a shadow of the probe on the sample coincide at the target position on the sample.

Abstract: A fixed electrode and a movable electrode to be used to drive each arm are formed at a drive unit. As a voltage is applied between the fixed electrode and the movable electrode, the movable electrode is caused to move by coulomb force, thereby driving the arm 3 in a closing operation. By detecting a change occurring in the electrostatic capacity between the fixed electrode and the movable electrode at this time, a decision can be made as to whether or not the sample has been gripped.

Abstract: In a chamber of a charged particle beam apparatus, the sample on the sample substrate is gripped and carried to the sample holder, and there is controlled the attitude of the sample when the sample is fixed on the sample holder. There possesses a marking process applying, in the chamber, a marking to a surface of the sample Wb existing on the sample substrate by a beam, a carriage process gripping the sample by a sample gripping means and carrying it from the sample substrate to the sample holder, and an attitude control process controlling, when fixing the sample to the sample holder, the attitude of the sample while observing the marking applied to the surface of the sample.

Abstract: A probe mechanism and a sample pick up mechanism of the invention are provided at an observing apparatus or an analyzing apparatus and characterized in including a tip member comprising a needle-like member brought into contact with a sample, including a driving electrostatic actuator and means for monitoring a change in an electrostatic capacitance between electrodes of the electrostatic actuator, and capable of sensing that the probe is brought into contact with a sample by the monitor.

Abstract: By working a grabbing portion by a charged particle beam of FIB or the like, the grabbing portion in parallel with the beam can be formed, and also dust adhered to the grabbing portion is removed. When a small sample represented by a TEM sample is fabricated by being cut out by etching by a charged particle beam and is carried at inside of an apparatus of irradiating a charged particle beam, the sample is etched in a direction of irradiating the charged particle beam, and therefore, a mechanism pinched by a grabbing face of a grabbing portion can be worked in a direction the same as that in working the sample, and therefore, a change in an attitude can be reduced when the sample and the grabbing face are fabricated by parallel faces.

Abstract: In a manipulator needle portion defect repairing method, the existence of an abrasion or a fracture in a needle portion for holding a sample at an end of a manipulator disposed in an FIB device is confirmed using a microscope function of the FIB device. The abrasion or the fracture in the needle portion is then repaired by chemical vapor deposition using a focused ion beam of the FIB device.

Abstract: A fixed electrode and a movable electrode used to drive each arm are disposed at a drive unit. As a voltage is applied between the fixed electrode and the movable the electrode, a coulomb force causes the movable the electrode to move, thereby driving the arms along the closing direction. The dimensions of a sample can be measured based upon the electrostatic capacity achieved between the electrodes when the sample becomes gripped by the arms.

Abstract: To provide a small thin piece holder which can reduce damage due to contact with an adhesive and bend or damage generated in detachment, and can stably, detachably hold or carry only one part of a small thin piece, a sheet shaped member having elasticity is provided with a cut into which one part of a small thin piece can be detachably inserted and which can hold it.

Abstract: A fixed electrode and a movable electrode used to drive each arm are disposed at a drive unit. As a voltage is applied between the fixed electrode and the movable the electrode, a coulomb force causes the movable the electrode to move, thereby driving the arms along the closing direction. The dimensions of a sample can be measured based upon the electrostatic capacity achieved between the electrodes when the sample becomes gripped by the arms.

Abstract: There is provided a substrate possessing a substrate main body in whose surface there is formed a measurement object article, and a reference scale having been provided, on the surface of the substrate main body, in the vicinity of a region where the measurement object article is formed so as to extend in at least one direction, wherein the reference scale has plural graduations which have been formed by utilizing a focused ion beam FIB and adjacently disposed for every spacing having been previously determined.

Abstract: objects to be achieved by the invention are to provide a nanobio device in which cultured cells are organized at a high-level in a state near in vivo, and to provide a method of using the nanobio device of imitative anatomy structure. The nanobio device of imitative anatomy structure of the invention is obtained by manufacturing a substrate with a bio-compatible substance and arranging a plurality of types of cells thereon in a desired array. A method of manufacturing a nanobio device in the invention includes a step of manufacturing a substrate for a nanobio device by a micromachine processing technique and a step of arranging a plurality of cultured cells on the substrate in a desired array with laser optical tweezers.

Abstract: A probe is moved to a direction where the tip of the probe and the tip of a shadow of the probe coincide at a target position on a display of the charged particle beam microscope while observing the distance between the tip of the probe and the target position during approaching the tip of the probe to the target position by use of a charged particle beam microscope with the probe tilted.

Abstract: A probe mechanism and a sample pick up mechanism of the invention are provided at an observing apparatus or an analyzing apparatus and characterized in including a tip member comprising a needle-like member brought into contact with a sample, including a driving electrostatic actuator and means for monitoring a change in an electrostatic capacitance between electrodes of the electrostatic actuator, and capable of sensing that the probe is brought into contact with a sample by the monitor

Abstract: A fixed electrode and a movable electrode to be used to drive each arm are formed at a drive unit. As a voltage is applied between the fixed electrode and the movable electrode, the movable electrode is caused to move by coulomb force, thereby driving the arm 3 in a closing operation. By detecting a change occurring in the electrostatic capacity between the fixed electrode and the movable electrode at this time, a decision can be made as to whether or not the sample has been gripped.

Abstract: A structure having arbitrary rotational symmetry is produced by attaching a sample stage (turntable) to a precision rotational shaft that is continuously rotated as high precision, performing FIB deposition inside an FIB chamber while causing continuous rotation of the sample stage, or performing cut-way processing from a side surface or upper surface, like a general purpose lathe, using FIB etching.

Abstract: When abrasion or fracture of a needle portion of a manipulator provided in an FIB device is confirmed in a microscope image, a lost structure of the needle portion is repaired by CVD using an FIB, or when it is confirmed in a microscope image that the needle portion of the manipulator provided in the FIB device is in a bent state, the portion is cut by etching using an FIB to form a normal structure at a tip of the cut portion with the CVD using an FIB to repair the needle portion. The invention is also applied to tweezers having two needles held to be used.