Abstract: This light source device includes one light emission unit from which light is emitted, plural light source units, a photo coupler, and a control unit. The plural light source units output outgoing lights with mutually differing wavelengths. The photo coupler connects the light emission unit and plural light source units. The control unit controls the plural light source units via a driver. Each of the plural light source units includes a light emitting element and a wavelength conversion unit. The wavelength conversion unit converts the wavelength of light output from the light emitting element, thus generating the outgoing light.

Abstract: This light source device includes one light emission unit from which light is emitted, plural light source units, a photo coupler, and a control unit. The plural light source units output outgoing lights with mutually differing wavelengths. The photo coupler connects the light emission unit and plural light source units. The control unit controls the plural light source units via a driver. Each of the plural light source units includes a light emitting element and a wavelength conversion unit. The wavelength conversion unit converts the wavelength of light output from the light emitting element, thus generating the outgoing light.

Abstract: A solar simulator having improved measurement precision, including an array of light emitters having point light emitters planarly arranged in a given range, an effective irradiated region spaced apart from a surface having the array thereon, and a portion which absorbs at least a part of light from a direction which passes through a gap between the individual point light emitters. In a preferred aspect, the light absorption portion includes an absorption surface disposed in at least a part of the gaps between the light emitters. In another preferred aspect, a translucent board holds the light emitters and has a translucent portion corresponding to at least a part of the gaps between the light emitters, and an absorption layer at a position for absorbing light from the direction which passes through the translucent portion.

Abstract: A solar simulator in which locational unevenness of irradiance is reduced by using a small and simple optical system, having an array of light emitters 2 with a plurality of point light emitters planarly arranged in a given range 24, an effective irradiated region 4 spaced apart from a surface having the point light emitters 26 arranged thereon, and a reflection mirror 6 disposed to surround the given range 24 of the array. Preferably, a distance L between the point light emitter positioned at the outermost portion of given range 24 of the array of light emitters 2 and a light-reflecting surface of the reflection mirror is half of a pitch a of the array of the point light emitters and, more preferably, the distance L is larger than half of a width b of each point light emitter, and smaller than half of the pitch a.

Abstract: A filtered cathodic arc device includes a plasma generating module which generates plasma using an arc discharge which has a cathode target as a deposition raw material; a deposition processing chamber in which a deposition receiving substrate is placed; a curved magnetic field duct that is placed between the plasma generating module and the deposition processing chamber, and that guides plasma generated by the plasma generating module to the deposition processing chamber with a magnetic field; a wool medium formed of a nonmagnetic metal fiber which covers the interior wall of the magnetic field duct; and a bias power source for the wool medium. The device balances reduction of particulate particles and a high deposition rate.