Patents by Inventor Masao Majima
Masao Majima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10084394Abstract: Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacitance between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode.Type: GrantFiled: December 1, 2015Date of Patent: September 25, 2018Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Makoto Takagi, Masao Majima, Kenichi Nagae
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Publication number: 20170366104Abstract: The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.Type: ApplicationFiled: August 17, 2017Publication date: December 21, 2017Inventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Patent number: 9774276Abstract: The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.Type: GrantFiled: December 5, 2014Date of Patent: September 26, 2017Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Patent number: 9594103Abstract: A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.Type: GrantFiled: June 4, 2014Date of Patent: March 14, 2017Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Patent number: 9321080Abstract: An electromechanical transducer includes a plurality of elements each including a first electrode and a second electrode with a gap therebetween, a voltage applying unit configured to apply an AC voltage to the first electrode, and a sensitivity variation computing unit configured to compute a sensitivity variation for each of the elements using a signal output from the second electrode of the element due to the application of the AC voltage.Type: GrantFiled: June 18, 2010Date of Patent: April 26, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Makoto Takagi, Masao Majima
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Publication number: 20160087551Abstract: Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacitance between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode.Type: ApplicationFiled: December 1, 2015Publication date: March 24, 2016Inventors: Atsushi Kandori, Makoto Takagi, Masao Majima, Kenichi Nagae
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Patent number: 9238250Abstract: Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode.Type: GrantFiled: November 16, 2010Date of Patent: January 19, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Makoto Takagi, Masao Majima, Kenichi Nagae
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Patent number: 9233395Abstract: There is a case in which a generated acoustic wave is decreased owing to the attenuation of light, whereby a desired output is not obtained from an electromechanical transducer device that receives the acoustic wave. The control apparatus for controlling an electromechanical transducer device of the present invention includes: a conversion unit that converts a current output from a first electrode of the electromechanical transducer device to a voltage; a DC voltage applying unit that applies a DC voltage to a second electrode arranged with a gap between itself and the first electrode; and a generation unit that generates a control signal which makes at least one of the DC voltage and a conversion ratio for converting the current to the voltage be changed, on the basis of information about an elapsed time from a point in time at which an inspection object was irradiated with light.Type: GrantFiled: November 11, 2010Date of Patent: January 12, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Masao Majima
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Patent number: 9101958Abstract: Provided is an electromechanical transducer which is capable of correcting or compensating a fluctuation in the transmission/reception characteristics of an elastic wave transmitting/receiving unit due to applied pressure. The electromechanical transducer (102) which transmits/receives elastic waves such as ultrasound includes the elastic wave transmitting/receiving unit (201) for transmitting/receiving elastic waves, a pressure detecting unit (203) for detecting pressure that is applied to the elastic wave transmitting/receiving unit, and a correcting unit (204). Based on pressure information which is detected by the pressure detecting unit, the correcting unit performs at least one of a correction of elastic wave transmitted/received signals relevant to the elastic wave transmitting/receiving unit and a correction of the transmission/reception characteristics of the elastic wave transmitting/receiving unit.Type: GrantFiled: December 3, 2010Date of Patent: August 11, 2015Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Masao Majima
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Publication number: 20150192855Abstract: A patterning process includes preparing a first mold having a first uneven pattern at a patterning surface thereof and a second mold as a peripheral shot mold having a second uneven pattern at a patterning surface thereof. A wafer includes a peripheral area along an entire peripheral edge and a non-peripheral area positioned inside the peripheral area and spaced from the edge. The first mold is used to imprint a non-peripheral pattern group completely within the non-peripheral area. The non-peripheral pattern group includes a plurality of non-peripheral pattern units each corresponding to an individual imprint of the first mold. The second mold is used to imprint a peripheral pattern positioned completely within the peripheral area. The peripheral pattern includes a shape having straight line segments corresponding to and outlining corners of a plurality of the non-peripheral pattern units and having a curved line corresponding to the peripheral edge of the wafer.Type: ApplicationFiled: March 19, 2015Publication date: July 9, 2015Inventors: Junichi Seki, Masao Majima, Nobuhito Suehira
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Patent number: 9072429Abstract: An apparatus is configured to drive a transduction apparatus including a cell with a first electrode and a second electrode disposed so as to oppose each other via a gap. The apparatus includes a timing detection unit and a control unit. The timing detection unit detects a timing of outputting of an electromagnetic wave from an electromagnetic wave source configured to output the electromagnetic wave to irradiate an object to be measured. The control unit drives and controls the transduction apparatus in synchronization with the detected timing such that the capacitive electromechanical transduction apparatus is put in a receiving state only for a period in which an acoustic wave generated in an inside of the object irradiated with the electromagnetic wave is received.Type: GrantFiled: March 17, 2011Date of Patent: July 7, 2015Assignee: CANON KABUSHIKI KAISHAInventors: Atsushi Kandori, Masao Majima
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Patent number: 9046793Abstract: A light transmissive mold used for imprinting a pattern onto a material applied on a semiconductor workpiece. The mold includes a first surface having an area of a pattern to be imprinted onto the material, a second surface located opposite from the first surface, and a third surface disposed between the first surface and the second surface, at a position inwardly away from the first surface. The third surface is arranged opposite to an area of the workpiece subjected to dicing. An alignment structure, provided for alignment between the mold and the workpiece, is formed in the third surface.Type: GrantFiled: June 6, 2011Date of Patent: June 2, 2015Assignee: CANON KABUSHIKI KAISHAInventors: Nobuhito Suehira, Junichi Seki, Masao Majima, Atsunori Terasaki, Hideki Ina
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Patent number: 8999218Abstract: A process of producing a member having a pattern. The process includes preparing a first mold having a pattern surface provided with a first uneven pattern at a surface of the first mold, and preparing a second mold having a pattern surface, provided with a second uneven pattern at a surface of the second mold, including a shape portion corresponding to an outer peripheral shape of the pattern surface provided with the first uneven pattern.Type: GrantFiled: April 26, 2006Date of Patent: April 7, 2015Assignee: Canon Kabushiki KaishaInventors: Junichi Seki, Masao Majima, Nobuhito Suehira
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Publication number: 20150091477Abstract: The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.Type: ApplicationFiled: December 5, 2014Publication date: April 2, 2015Inventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Patent number: 8928203Abstract: The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.Type: GrantFiled: June 15, 2010Date of Patent: January 6, 2015Assignee: Canon Kabushiki KaishaInventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Publication number: 20140285219Abstract: A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.Type: ApplicationFiled: June 4, 2014Publication date: September 25, 2014Inventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Patent number: 8770958Abstract: A pattern forming method for forming an imprinted pattern on a coating material disposed on a substrate with a pattern provided to a mold. The method includes preparing a mold provided with a first surface including a pattern area, a second surface located opposite from the first surface, and an alignment mark provided at a position at which the alignment mark is away from the first surface, contacting the pattern area of the mold with the coating material disposed on the substrate, obtaining information about positions of the mold and the substrate by using the alignment mark and a mark provided to the substrate in a state in which the coating material is disposed on the substrate at a portion where the alignment mark and the substrate are opposite to each other, and effecting alignment of the substrate with the mold in an in-plane direction of the pattern area, on the basis of the information in a state in which the pattern area and the coating material contact each other.Type: GrantFiled: July 23, 2010Date of Patent: July 8, 2014Assignee: Canon Kabushiki KaishaInventors: Nobuhito Suehira, Junichi Seki, Masao Majima, Atsunori Terasaki, Hideki Ina
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Patent number: 8754660Abstract: A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.Type: GrantFiled: December 20, 2010Date of Patent: June 17, 2014Assignee: Canon Kabushiki KaishaInventors: Atsushi Kandori, Makoto Takagi, Masao Majima
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Patent number: 8654614Abstract: Provided is a transducer in which electrodes in a movable region are less likely to affect the mechanical characteristics of the movable region and in which nonuniform electrical potential distribution of the surface of the electrodes in the movable region is suppressed. The transducer includes first electrodes and second electrodes opposing the first electrodes with gaps interposed between therebetween. The resistance per unit area of the first electrodes differs in a movable region relative to the second electrodes and an unmovable region relative to the second electrodes. The first electrodes in the movable region and the first electrodes in the unmovable region have different thicknesses.Type: GrantFiled: January 24, 2011Date of Patent: February 18, 2014Assignee: Canon Kabushiki KaishaInventors: Atsushi Kandori, Masao Majima
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Patent number: 8393211Abstract: A sensor includes a detecting oscillator supported in such a manner that the detecting oscillator is allowed to oscillate; first and second electrodes; a detecting electrode facing the first and second electrodes; and signal supplying units configured to supply first and second AC signals respectively to the first and second electrodes. Either the first and second electrodes or the detecting electrode is provided on the detecting oscillator. The first and second AC signals respectively supplied to the first and second electrodes by the signal supplying units cause the detecting oscillator to be maintained at a neutral position for detection without being displaced when no physical quantity is input. When the detecting oscillator is displaced, an input physical quantity is detected on the basis of a signal corresponding to charges induced at the detecting electrode by the first and second AC signals supplied respectively to the first and second electrodes.Type: GrantFiled: April 16, 2008Date of Patent: March 12, 2013Assignee: Canon Kabushiki KaishaInventors: Atsushi Kandori, Masao Majima, Kenichi Nagae