Patents by Inventor Masaru Toyoshima

Masaru Toyoshima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6159283
    Abstract: Apparatus for measuring the mechanical strength of a neck portion of a silicon seed crystal used for growing a silicon crystal by the Czochralski method includes a seed chuck for holding the seed crystal of a test sample and an end of a wire hung from an upper hook. A crystal holder which holds the other end part of the test sample from below is tied to a lower hook with another wire to support the holder. The apparatus includes means for pulling the hook at a given rate, and measuring means for continuously measuring tensile load. Such apparatus and the method thereby provide accurate measurement of mechanical strength of the neck portion of the silicon seed crystal with good precision and reproducibility. A single crystal ingot is grown under conditions affording good balance of productivity and safety.
    Type: Grant
    Filed: March 12, 1999
    Date of Patent: December 12, 2000
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Isamu Harada, Michiaki Oda, Masaru Toyoshima, Toshinari Murai, Eiichi Iino