Patents by Inventor Masatomo KITA

Masatomo KITA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE TRANSFER SYSTEM AND LOAD LOCK MODULE
    Publication number: 20210280441
    Abstract: A substrate transfer system includes an atmospheric substrate transfer module, a vacuum substrate transfer module, and a load lock module disposed on a side surface of the atmospheric substrate transfer module and disposed on an upper surface or a lower surface of the vacuum substrate transfer module. The load lock module includes a container having a first substrate transfer opening and a second substrate transfer opening, a first gate configured to open or close the first substrate transfer opening, a second gate configured to open or close the second substrate transfer opening, and a substrate actuator configured to vertically move a substrate through the second substrate transfer opening between a first position in the container and a second position in the vacuum substrate transfer module.
    Type: Application
    Filed: March 8, 2021
    Publication date: September 9, 2021
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Norihiko AMIKURA, Masahiro DOGOME, Masatomo KITA
  • Particle generation preventing method and vacuum apparatus
    Patent number: 10643825
    Abstract: A particle generation preventing method for preventing particle generation in a vacuum apparatus including an alumite-treated component is provided. The particle generation preventing method includes an evacuation step of evacuating the vacuum apparatus to reduce a pressure within the vacuum apparatus to less than or equal to 1.3×10?1 Pa (1 mTorr), a pressure increasing step of increasing the pressure within the vacuum apparatus to atmospheric pressure after the evacuation step, and a moisture adhesion step of causing moisture to be adhered to the alumite-treated component after the pressure increasing step.
    Type: Grant
    Filed: October 4, 2018
    Date of Patent: May 5, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Takashi Tetsuka, Hiroshi Nagaike, Masatomo Kita, Chihiro Sato, Naoya Suenaga
  • PARTICLE GENERATION PREVENTING METHOD AND VACUUM APPARATUS
    Publication number: 20190108987
    Abstract: A particle generation preventing method for preventing particle generation in a vacuum apparatus including an alumite-treated component is provided. The particle generation preventing method includes an evacuation step of evacuating the vacuum apparatus to reduce a pressure within the vacuum apparatus to less than or equal to 1.3×10?1 Pa (1 mTorr), a pressure increasing step of increasing the pressure within the vacuum apparatus to atmospheric pressure after the evacuation step, and a moisture adhesion step of causing moisture to be adhered to the alumite-treated component after the pressure increasing step.
    Type: Application
    Filed: October 4, 2018
    Publication date: April 11, 2019
    Inventors: Takashi TETSUKA, Hiroshi NAGAIKE, Masatomo KITA, Chihiro SATO, Naoya SUENAGA