Abstract: An exposure apparatus that exposes a substrate is provided. The apparatus includes a stage configured to hold and move the substrate, and a controller configured to control focus driving of the stage based on a measurement value and a correction value obtained for the focus driving of the stage for a shot region on the substrate. The controller is configured to determine the correction value in accordance with an angle of view at a time of exposure.

Abstract: An exposure apparatus that exposes a substrate is provided. The apparatus comprises a stage configured to hold and move the substrate, and a controller configured to control focus driving of the stage based on a measurement value and a correction value obtained for the focus driving of the stage for a shot region on the substrate. The controller is configured to determine the correction value in accordance with an angle of view at a time of exposure.

Abstract: The present invention provides a method of obtaining a position of a second shot region next to a first shot region, out of a plurality of shot regions formed on a substrate, comprising a first detection step of detecting a position of a first mark arranged in the first shot region, a second detection step of detecting a position of a mark more distant from the first mark, out of a second mark and a third mark arranged in the second shot region, and a determination step of determining the position of the second shot region based on a detection result in the first detection step and a detection result in the second detection step.

Abstract: An exposure apparatus of performing an exposure for each shot region on a substrate includes: a stage configured to move while holding the substrate; a measurement device configured to measure a vibration of the stage; and a controller, when the vibration of the stage measured by the measurement device during an exposure period of a shot region of a first substrate falls outside an allowable range, configured to change a control parameter when exposing a shot region of a second substrate to be exposed after the first substrate at the same position as the shot region of the first substrate so as to improve an exposure accuracy.

Abstract: A measuring apparatus measures a position of each of shot regions formed on a substrate. The apparatus includes a detector configured to detect a mark formed with respect to a shot region on the substrate, and a processor configured to obtain a position of each of the shot regions based on an output of the detector. The processor is configured to obtain a coefficient of a regression equation for obtaining a position of each of the shot regions, based on an output of the detector with respect to each of a plurality of sample shot regions on the substrate, and obtain, if the coefficient satisfies a tolerable condition for a discrepancy between the coefficient and a reference value thereof, the position of each of the shot regions using each offset amount that is obtained beforehand to correct the position of each of the shot regions obtained based on the regression equation.

Abstract: The substrate holding device of the present invention includes a holding unit that adsorbs and holds the substrate, a measuring section that measures a physical quantity relating to a adsorption force of the holding unit with the substrate mounted on the holding unit; and a control section that carries out a first determination based on a first condition and a measurement result obtained by the measuring section and a second determination based on a second condition that is different from the first condition and a measurement result obtained by the measuring section to select one of at least three preset operations based on the result of first and second determinations to thereby execute processing depending on the selected operation.

Abstract: A measuring apparatus measures a position of each of shot regions formed on a substrate. The apparatus includes a detector configured to detect a mark formed with respect to a shot region on the substrate, and a processor configured to obtain a position of each of the shot regions based on an output of the detector. The processor is configured to obtain a coefficient of a regression equation for obtaining a position of each of the shot regions, based on an output of the detector with respect to each of a plurality of sample shot regions on the substrate, and obtain, if the coefficient satisfies a tolerable condition for a discrepancy between the coefficient and a reference value thereof, the position of each of the shot regions using each offset amount that is obtained beforehand to correct the position of each of the shot regions obtained based on the regression equation.

Abstract: The present invention provides a method of obtaining a position of a second shot region next to a first shot region, out of a plurality of shot regions formed on a substrate, comprising a first detection step of detecting a position of a first mark arranged in the first shot region, a second detection step of detecting a position of a mark more distant from the first mark, out of a second mark and a third mark arranged in the second shot region, and a determination step of determining the position of the second shot region based on a detection result in the first detection step and a detection result in the second detection step.

Abstract: A failure determination device capable of performing failure determination for a shutter device of a vehicle with accuracy in a short time period. In an engine room of a vehicle, a condenser for a refrigeration cycle for an aircon is provided and at a front grille of the vehicle, a grille shutter device is provided for introducing ambient air for cooling the condenser into the engine room by opening a grille shutter. According to the failure determination device of the shutter device, a pressure of the refrigerant discharged from the condenser is detected as a refrigerant pressure. A failure of the grille shutter device is determined based on the refrigerant pressure, which changes at a large rate according to the opening/closing of the grille shutter, enabling failure determination with accuracy in a short time period.

Abstract: An exposure apparatus of performing an exposure for each shot region on a substrate includes: a stage configured to move while holding the substrate; a measurement device configured to measure a vibration of the stage; and a controller, when the vibration of the stage measured by the measurement device during an exposure period of a shot region of a first substrate falls outside an allowable range, configured to change a control parameter when exposing a shot region of a second substrate to be exposed after the first substrate at the same position as the shot region of the first substrate so as to improve an exposure accuracy.

Abstract: The substrate holding device of the present invention includes a holding unit that adsorbs and holds the substrate, a measuring section that measures a physical quantity relating to a adsorption force of the holding unit with the substrate mounted on the holding unit; and a control section that carries out a first determination based on a first condition and a measurement result obtained by the measuring section and a second determination based on a second condition that is different from the first condition and a measurement result obtained by the measuring section to select one of at least three preset operations based on the result of first and second determinations to thereby execute processing depending on the selected operation.

Abstract: A failure determination device capable of performing failure determination for a shutter device of a vehicle with accuracy in a short time period. In an engine room of a vehicle, a condenser for a refrigeration cycle for an aircon is provided and at a front grille of the vehicle, a grille shutter device is provided for introducing ambient air for cooling the condenser into the engine room by opening a grille shutter. According to the failure determination device of the shutter device, a pressure of the refrigerant discharged from the condenser is detected as a refrigerant pressure. A failure of the grille shutter device is determined based on the refrigerant pressure, which changes at a large rate according to the opening/closing of the grille shutter, enabling failure determination with accuracy in a short time period.

Abstract: The substrate holding device of the present invention includes a holding unit that adsorbs and holds the substrate, a measuring section that measures a physical quantity relating to a adsorption force of the holding unit with the substrate mounted on the holding unit; and a control section that carries out a first determination based on a first condition and a measurement result obtained by the measuring section and a second determination based on a second condition that is different from the first condition and a measurement result obtained by the measuring section to select one of at least three preset operations based on the result of first and second determinations to thereby execute processing depending on the selected operation.

Abstract: The substrate holding device of the present invention includes a holding unit that adsorbs and holds the substrate, a measuring section that measures a physical quantity relating to a adsorption force of the holding unit with the substrate mounted on the holding unit; and a control section that carries out a first determination based on a first condition and a measurement result obtained by the measuring section and a second determination based on a second condition that is different from the first condition and a measurement result obtained by the measuring section to select one of at least three preset operations based on the result of first and second determinations to thereby execute processing depending on the selected operation.

Abstract: An exhaust gas purifying apparatus for an internal combustion engine, including a filter provided in an exhaust system of the engine for trapping particulates in exhaust gases, and a pressure difference sensor for detecting a pressure difference between an upstream side pressure of the filter and a downstream side pressure of the filter. A non-frozen state of the pressure difference sensor is determined based on at least one of a first parameter relevant to an exhaust gas temperature of the engine and a second parameter relevant to an atmospheric temperature. An abnormality of the filter is determined based on a result of the non-frozen state determination.

Abstract: An exhaust gas purifying apparatus for an internal combustion engine, including a filter provided in an exhaust system of the engine for trapping particulates in exhaust gases, and a pressure difference sensor for detecting a pressure difference between an upstream side pressure of the filter and a downstream side pressure of the filter. A non-frozen state of the pressure difference sensor is determined based on at least one of a first parameter relevant to an exhaust gas temperature of the engine and a second parameter relevant to an atmospheric temperature. An abnormality of the filter is determined based on a result of the non-frozen state determination.

Abstract: A fuel-air mixture control apparatus for adjusting the mixture of fuel and air that a carburetor provides to an internal combustion engine. A mixing passage provides a fuel-air mixture to one or more combustion chambers of an internal combustion engine. A main fuel supply passage provides fluid communication between a fuel source and the mixing passage through a main fuel nozzle. An idle fuel supply passage provides fluid communication between a fuel source and the mixing passage through an idle fuel nozzle. An idle fuel ratio control valve adjusts the proportion of fuel drawn into the mixing passage through the idle fuel supply passage to the flow rate of air drawn into the mixing passage. The idle fuel supply passage is in fluid communication with the main fuel nozzle. Vacuum pressure induced by flow rates across the main fuel nozzle, which exceed a predetermined flow rate, precludes idle fuel flow into the mixing passage.

Abstract: A fuel-air mixture control apparatus for adjusting the mixture of fuel and air that a carburetor provides to an internal combustion engine. A mixing passage provides a fuel-air mixture to one or more combustion chambers of an internal combustion engine. A main fuel supply passage provides fluid communication between a fuel source and the mixing passage through a main fuel nozzle. An idle fuel supply passage provides fluid communication between a fuel source and the mixing passage through an idle fuel nozzle. An idle fuel ratio control valve adjusts the proportion of fuel drawn into the mixing passage through the idle fuel supply passage to the flow rate of air drawn into the mixing passage. The idle fuel supply passage is in fluid communication with the main fuel nozzle. Vacuum pressure induced by flow rates across the main fuel nozzle, which exceed a predetermined flow rate, precludes idle fuel flow into the mixing passage.

Abstract: A carburetor for a scavenged two-stroke internal combustion engine has an enriched fuel-and-air mixing passage extending through a housing of the carburetor. Engaged to the housing is a body of an air flow modular assembly which carries a primary air flow passage which houses a butterfly-type control valve therein. The throttle valve of the fuel-and-air mixing passage is mechanically linked or cammed to the control valve of the air flow passage so that opening of the throttle valve soon after opens the control valve allowing additional air to enter and provide a leaner fuel-and-air ratio in the combustion chamber of the engine when running under load. The air flow modular assembly has a sealing-and-bearing assembly which eliminates air leakage from the surrounding environment along the shaft of the control valve and into the primary air flow passage. The sealing-and-bearing assembly has a bushing which inserts into a counter bore of a cylindrical bore which receives the rotating shaft of the control valve.

Abstract: A carburetor for a scavenged two-stroke internal combustion engine has an enriched fuel-and-air mixing passage extending through a housing of the carburetor. Engaged to the housing is a body of an air flow modular assembly which carries a primary air flow passage which houses a butterfly-type control valve therein. The throttle valve of the fuel-and-air mixing passage is mechanically linked or cammed to the control valve of the air flow passage so that opening of the throttle valve soon after opens the control valve allowing additional air to enter and provide a leaner fuel-and-air ratio in the combustion chamber of the engine when running under load. The air flow modular assembly has a sealing-and-bearing assembly which eliminates air leakage from the surrounding environment along the shaft of the control valve and into the primary air flow passage. The sealing-and-bearing assembly has a bushing which inserts into a counter bore of a cylindrical bore which receives the rotating shaft of the control valve.