Abstract: A focus through a projection lens is corrected to prevent the occurrence of a dimensional error in a pattern due to defocusing. At least one automatic focus correction mark is formed over each of chip patterns formed in a reticle used for exposure. Using one of the automatic focus correction marks located in the center portion of an actual device region, automatic correction of the focus of exposure light is performed. In this manner, a variation in the focus of the exposure light through the center portion of the projection lens, which is more likely to reach a high temperature than an end portion of the projection lens, is detected and corrected.

Abstract: A focus through a projection lens is corrected to prevent the occurrence of a dimensional error in a pattern due to defocusing. At least one automatic focus correction mark is formed over each of chip patterns formed in a reticle used for exposure. Using one of the automatic focus correction marks located in the center portion of an actual device region, automatic correction of the focus of exposure light is performed. In this manner, a variation in the focus of the exposure light through the center portion of the projection lens, which is more likely to reach a high temperature than an end portion of the projection lens, is detected and corrected.

Abstract: A method of pressing a blank comprises the steps of pressing the blank between a die assembly having a cavity with a highly viscous substance contained therein and a punch, inserting the punch into the cavity to increase a pressure of the highly viscous substance in the cavity, and pressing the blank against a surface of the punch under the pressure of the highly viscous substance. The pressing method can form pressed product of complex shape highly accurately and free from cracks, wrinkles, or other damages. There is also disclosed a punch and die press suitable for effecting the abovesaid pressing method.