Patents by Inventor Masayuki Nasu
Masayuki Nasu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10400330Abstract: There is provided a tungsten film forming method for forming a tungsten film on a target substrate disposed inside a chamber kept under a depressurized atmosphere and having a base film formed on a surface thereof, using a tungsten chloride gas as a tungsten raw material gas and a reducing gas for reducing the tungsten chloride gas, which includes: performing an SiH4 gas treatment with respect to the target substrate having the base film formed thereon by supplying an SiH4 gas into the chamber; and subsequently, forming the tungsten film by sequentially supplying the tungsten chloride gas and the reducing gas into the chamber while purging an interior of the chamber in the course of sequentially supplying the tungsten chloride gas and the reducing gas.Type: GrantFiled: March 30, 2017Date of Patent: September 3, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Kenji Suzuki, Takanobu Hotta, Tomohisa Maruyama, Masayuki Nasu, Junya Miyahara, Koji Maekawa
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Publication number: 20170283942Abstract: There is provided a tungsten film forming method for forming a tungsten film on a target substrate disposed inside a chamber kept under a depressurized atmosphere and having a base film formed on a surface thereof, using a tungsten chloride gas as a tungsten raw material gas and a reducing gas for reducing the tungsten chloride gas, which includes: performing an SiH4 gas treatment with respect to the target substrate having the base film formed thereon by supplying an SiH4 gas into the chamber; and subsequently, forming the tungsten film by sequentially supplying the tungsten chloride gas and the reducing gas into the chamber while purging an interior of the chamber in the course of sequentially supplying the tungsten chloride gas and the reducing gas.Type: ApplicationFiled: March 30, 2017Publication date: October 5, 2017Inventors: Kenji SUZUKI, Takanobu HOTTA, Tomohisa MARUYAMA, Masayuki NASU, Junya MIYAHARA, Koji MAEKAWA
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Patent number: 9644266Abstract: There is provided a film forming apparatus including gas supply paths, retaining units, valves, a purge gas supply unit and a control unit. The control unit is configured to implements a film forming process for sequentially performing operations of actuating the valves such that reaction gases are retained in the retaining units, the internal pressures of the retaining units are increased and then the reaction gases are supplied from the retaining units into the process chamber, and a purging process for subsequently repeating, a plurality number of times, operations of actuating the valves such that the purge gas is retained in the retaining units, the internal pressures of the retaining units are increased to a pressure higher than the internal pressures of the retaining units which is increased in the film forming process, and then the purge gas is supplied from the retaining units into the process chamber.Type: GrantFiled: March 24, 2014Date of Patent: May 9, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Masayuki Nasu, Masaki Sano, Yu Nunoshige
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Publication number: 20140295083Abstract: There is provided a film forming apparatus including gas supply paths, retaining units, valves, a purge gas supply unit and a control unit. The control unit is configured to implements a film forming process for sequentially performing operations of actuating the valves such that reaction gases are retained in the retaining units, the internal pressures of the retaining units are increased and then the reaction gases are supplied from the retaining units into the process chamber, and a purging process for subsequently repeating, a plurality number of times, operations of actuating the valves such that the purge gas is retained in the retaining units, the internal pressures of the retaining units are increased to a pressure higher than the internal pressures of the retaining units which is increased in the film forming process, and then the purge gas is supplied from the retaining units into the process chamber.Type: ApplicationFiled: March 24, 2014Publication date: October 2, 2014Applicant: TOKYO ELECTRON LIMITEDInventors: Masayuki NASU, Masaki SANO, Yu NUNOSHIGE
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Patent number: 7763307Abstract: The components which have suwari-inhibiting action of rice bran extracts is reduced or removed, enabling broader utilization of them for fish paste products. A rice bran extract in which components having specific physiologically active functions are singled out, and these components are reduced or removed. The components are suwari-inhibiting components. The rice bran extract is preferably a water extract. The components are reduced or removed by precipitation or dialysis. The precipitation is calcium precipitation. The suwari-inhibiting components are phytin and/or phytic acid. The rice bran extract can be used as a fish paste additive.Type: GrantFiled: December 10, 2002Date of Patent: July 27, 2010Assignee: Nippon Suisan Kaisha, Ltd.Inventors: Yuji Okita, Masayuki Nasu, Junko Doshida, Ikuo Kimura
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Patent number: 7629183Abstract: A method for fabricating a semiconductor device includes the steps of forming a PbTiOx film having a predominantly (111) orientation on a lower electrode as a nucleation layer by an MOCVD process with a film thickness exceeding 2 nm, and forming a PZT film having a predominantly (111) orientation on the nucleation layer, wherein the step of forming the PbTiOx film is conducted under an oxygen partial pressure of less than 340 Pa.Type: GrantFiled: June 12, 2006Date of Patent: December 8, 2009Assignee: Tokyo Electron LimitedInventors: Kenji Matsumoto, Masayuki Nasu, Tomoyuki Sakoda
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Publication number: 20080248595Abstract: A method for fabricating a semiconductor device includes the steps of forming a PbTiOx film having a predominantly (111) orientation on a lower electrode as a nucleation layer by an MOCVD process with a film thickness exceeding 2 nm, and forming a PZT film having a predominantly (111) orientation on the nucleation layer, wherein the step of forming the PbTiOx film is conducted under an oxygen partial pressure of less than 340 Pa.Type: ApplicationFiled: June 12, 2006Publication date: October 9, 2008Applicant: Tokyo Electron LimitedInventors: Kenji Matsumoto, Masayuki Nasu, Tomoyuki Sakoda
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Publication number: 20080171142Abstract: There is provided a film deposition method of depositing a multielement metal oxide film capable of depositing a multielement metal oxide film having a desired composition and a desired thickness in an improved repeatability. A film deposition method deposits a multielement metal oxide film on a surface of a workpiece by a film depositing process including supplying organometallic source gases generated by atomizing a plurality of organometallic compounds into a processing vessel capable of being evacuated. A dummy film deposition process corresponding to at least three cycles of the film deposition process is carried out by placing a dummy workpiece in the processing vessel and supplying the organometallic source gases into the processing vessel immediately before starting the film deposition process for depositing a multielement metal oxide film on the workpiece. Thus a multielement metal oxide film having a desired composition and a desired thickness can be deposited in an improved repeatability.Type: ApplicationFiled: January 11, 2006Publication date: July 17, 2008Inventors: Kenji Matsumoto, Tomoyuki Sakoda, Masayuki Nasu, Gaku Ikeda
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Publication number: 20060204618Abstract: Fish and shellfish meat whose color tone is well preserved, particularly no Listeria contamination and in which discoloration is effectively prevented, and smoked products prepared from such fish and shellfish meat are provided. Fish meat which is no Listeria contamination and in which discoloration is prevented can be obtained by treating the meat with a cultivation medium used for cultivating lactic acid bacteria. Specifically, the meat is immersed preferably in a sterilized or disinfected cultivation medium used for cultivating a lactic acid bacterium having antibacterial and anti-oxidative effects, or two lactic acid bacteria in combination, one having antibacterial effect and the other anti-oxidative effect. Combinational use of Lactobacillus sake D-1001 (FERM P-11708 or IPOD FERM BP-08544) and Lactococcus lactis IFO 12007 is preferred. The fish meat is preferably derived from salmon, trout or cod, and the inventive method is particularly effective for fish meat containing astaxanthin.Type: ApplicationFiled: November 6, 2003Publication date: September 14, 2006Applicant: NIPPON SUISAN KAISHA LTD.Inventors: Nobuhiko Doumoto, Akiko Takahashi, Masayuki Nasu, Takahiro Oba
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Patent number: 6964790Abstract: A deposition method for supplying process gases into an evacuated processing vessel to deposit a metal tungsten film on the surface of an object to be processed. The processing gases include tungsten hexafluoride gas, hydrogen gas, and a reducing gas which has a richer reducing property than that of the hydrogen gas, the amount of the reducing gas being smaller than that of the hydrogen gas. Thus, it is possible to form a metal tungsten film without increasing stress in the film so much even in a low temperature region of about 400° C. and without decreasing a deposition rate so much.Type: GrantFiled: July 13, 2000Date of Patent: November 15, 2005Assignee: Tokyo Electron LimitedInventors: Masayuki Nasu, Sakae Nakatsuka
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Publication number: 20050106311Abstract: The components which have suwari-inhibiting action of rice bran extracts is reduced or removed, enabling broader utilization of them for fish paste products. A rice bran extract in which components having specific physiologically active functions are singled out, and these components are reduced or removed. The components are suwari-inhibiting components. The rice bran extract is preferably a water extract. The components are reduced or removed by precipitation or dialysis. The precipitation is calcium precipitation. The suwari-inhibiting components are phytin and/or phytic acid. The rice bran extract can be used as a fish paste additive.Type: ApplicationFiled: December 10, 2002Publication date: May 19, 2005Applicant: Nippon Suisan Kaisha, Ltd.Inventors: Yuji Okita, Masayuki Nasu, Junko Doshida, Ikuo Kimura
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Patent number: 6884455Abstract: Fermented fish-meat food is provided which uses fish meat as start materials, has specific taste and flavor imparted upon fermentation with lactic acid bacteria, and has a texture similar to that of animal meat. In a method for producing a processed seafood product, a lactic acid bacteria fermenting at temperature not higher than 10° C. and having salt tolerance and an antibacterial property is used in the step of fermenting fish and shellfish with lactic acid bacteria. The lactic acid bacteria fermenting at temperature not higher than 10° C. and having salt tolerance and an antibacterial property is a lactic acid bacteria belonging to one genus selected from a group consisting of Leuconostoc genus, Lactobacillus genus, Lactococcus genus, and Pediococcus genus. The lactic acid bacteria belonging to Leuconostoc genus is a lactic acid bacteria belonging to Lactobacillus sake and preferably Lactobacillus sake D-1001 (No. 11708 deposition to International Patent Organism Depositary).Type: GrantFiled: August 5, 2002Date of Patent: April 26, 2005Assignee: Nippon Suisan Kaisha, Ltd.Inventors: Nobuhiko Doumoto, Takashi Mori, Masayuki Nasu
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Patent number: 6821546Abstract: This invention provides a process for production of surimi with stable quality from fish infected with the parasite Ichthyophonus hoferi, and a process for production of surimi based products of good quality using the surimi as the raw material. In the process for production of surimi from parasite-infected fish, an additive for inhibiting protease activity and recovering gel-forming capability, and calcium are added in the process of production of surimi from fish infected with Ichthyophonus hoferi, preferably from Alaska pollock. A protease inhibitor, preferably a thiol protease inhibitor, is used as the additive.Type: GrantFiled: May 11, 2000Date of Patent: November 23, 2004Assignee: Nippon Suisan Kaisha, Ltd.Inventors: Ikuo Kimura, Genji Ito, Masayuki Nasu
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Publication number: 20040185164Abstract: Fermented fish-meat food is provided which uses fish meat as start materials, has specific taste and flavor imparted upon fermentation with lactic acid bacteria, and has a texture similar to that of animal meat. In a method for producing a processed seafood product, a lactic acid bacteria fermenting at temperature not higher than 10° C. and having salt tolerance and an antibacterial property is used in the step of fermenting fish and shellfish with lactic acid bacteria. The lactic acid bacteria fermenting at temperature not higher than 10° C. and having salt tolerance and an antibacterial property is a lactic acid bacteria belonging to one genus selected from a group consisting of Leuconostoc genus, Lactobacillus genus, Lactococcus genus, and Pediococcus genus. The lactic acid bacteria belonging to Leuconostoc genus is a lactic acid bacteria belonging to Lactobacillus sake and preferably Lactobacillus sake D-1001 (No. 11708 deposition to International Patent Organism Depositary).Type: ApplicationFiled: February 4, 2004Publication date: September 23, 2004Inventors: Nobuhiko Doumoto, Takashi Mori, Masayuki Nasu