Patents by Inventor Masayuki Satake

Masayuki Satake has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11905611
    Abstract: Provided is a maintenance member or the like capable of easily maintaining an electric contact in a substrate holder. It relates to a maintenance member to maintain a substrate holder including an electric contact configured to supply power to a substrate. The maintenance member includes an abrasive body having a shape corresponding to the substrate that is a holding target of the substrate holder, and disposed to come in contact with the electric contact when held by the substrate holder.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: February 20, 2024
    Assignee: EBARA CORPORATION
    Inventor: Masayuki Satake
  • Publication number: 20230326757
    Abstract: The present application relates to a substrate processing method for suppressing cracking and chipping of a laminated substrate manufactured by bonding a plurality of substrates. Further, the present application relates to a substrate processing apparatus capable of performing such a substrate processing method. The present method includes: rotating a laminated substrate manufactured by bonding a first substrate and a second substrate; applying a filler, having thermosetting property, to a gap between a peripheral portion of the first substrate and a peripheral portion of the second substrate; and curing the filler. Applying the filler and curing the filler are continuously performed in a same processing chamber.
    Type: Application
    Filed: June 25, 2021
    Publication date: October 12, 2023
    Inventors: Masayuki SATAKE, Masayuki NAKANISHI, Michiyoshi YAMASHITA
  • Patent number: 11535949
    Abstract: There is provided the substrate holder for holding a substrate comprising a first holding member, a second holding member, a sealing member, a pin, a ring, and a moving mechanism. The sealing member forms a sealed space inside the substrate holder. The pin is fixed to one of the first holding member and the second holding member. The ring is disposed on another of the first holding member and the second holding member. The ring engages with the pin. The moving mechanism circumferentially moves the ring. The pin and the ring are engaged with one another to fix the first holding member and the second holding member to one another. The pin and the ring are disposed inside the sealed space.
    Type: Grant
    Filed: June 25, 2019
    Date of Patent: December 27, 2022
    Assignee: EBARA CORPORATION
    Inventors: Masaya Seki, Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata
  • Publication number: 20220372647
    Abstract: Provided is a substrate holder for plating on a surface of a substrate, provided with an electrical contact that is easy to replace. A substrate holder 1 includes: a first holding member 2; a second holding member 3 that has an opening portion 3a for exposing the surface of a substrate W and holds the substrate W in a sandwiched manner with the first holding member 2; a plurality of engaging shaft portions 36 each having a head portion 36b in an expanded head shape at a tip end portion, provided in a circumferential direction of the second holding member 3; and an electrical contact 32 having a contact portion 32a to be in contact with an edge portion of the substrate W, and having an engagement reception portion 32b in a notch shape to be engaged with the adjacent engaging shaft portion 36 for arrangement along a circumference of the opening portion 3a of the second holding member 3.
    Type: Application
    Filed: July 7, 2020
    Publication date: November 24, 2022
    Inventors: Masaya SEKI, Kiyoshi SUZUKI, Masayuki SATAKE
  • Publication number: 20220325430
    Abstract: Provided is a substrate holder and a substrate treatment apparatus capable of positioning a substrate even in a case in which the substrate receives a frictional force and the like from a support surface.
    Type: Application
    Filed: August 20, 2020
    Publication date: October 13, 2022
    Inventors: Masaya SEKI, Kiyoshi SUZUKI, Masayuki SATAKE
  • Patent number: 11230789
    Abstract: A method capable of removing a liquid from a seal of a substrate holder so as to prevent contact between the liquid and an electrical contact of the substrate holder is provided. The method includes: immersing the substrate in a plating solution, with a seal and an electrical contact of the substrate holder in contact with the substrate; applying a voltage between the substrate and an anode in the presence of the plating solution to plate the substrate; pulling up the plated substrate from the plating solution; separating the seal from the plated substrate; and forming a flow of gas passing through a gap between the plated substrate and the seal, the flow of gas being directed from an inside to an outside of the substrate holder.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: January 25, 2022
    Assignee: EBARA CORPORATION
    Inventors: Masaya Seki, Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata
  • Publication number: 20210262108
    Abstract: Provided is a maintenance member or the like capable of easily maintaining an electric contact in a substrate holder. It relates to a maintenance member to maintain a substrate holder including an electric contact configured to supply power to a substrate. The maintenance member includes an abrasive body having a shape corresponding to the substrate that is a holding target of the substrate holder, and disposed to come in contact with the electric contact when held by the substrate holder.
    Type: Application
    Filed: February 9, 2021
    Publication date: August 26, 2021
    Inventor: Masayuki Satake
  • Publication number: 20210230455
    Abstract: Provided is a method for peeling a PSA sheet adhered on a polarizing plate. The PSA sheet has a PSA layer. The PSA layer includes a layer A forming at least one surface of the PSA layer. Of the polarizing plate, the surface to which the PSA sheet is adhered is corona-treated or plasma-treated. The peeling method includes a water-peel step in which the PSA sheet is peeled from the polarizing plate, in a state where an aqueous liquid exits at the interface between the polarizing plate and the PSA sheet at the front line of peeling the PSA sheet from the polarizing plate, with the aqueous liquid allowed to further enter the interface following the movement of the peel front line.
    Type: Application
    Filed: January 28, 2019
    Publication date: July 29, 2021
    Inventors: Naofumi KOSAKA, Yosuke SHIMIZU, Satoshi HONDA, Taiki SHIMOKURI, Shou TAKARADA, Masayuki SATAKE, Kenichi OKADA, Atsushi TAKASHIMA, Ginji MIZUHARA
  • Publication number: 20210214587
    Abstract: Provided is a PSA sheet having a PSA layer. The PSA layer includes a layer A forming at least one surface thereof. The PSA sheet has an adhesive strength N0 of 2.0 N/10 mm or greater, after one day at room temperature following application of the layer A side to a surface of an alkaline float glass plate as an adherend having a contact angle of 5°-10° with distilled water; has an N1 to N0 reduction rate of 30% or lower, wherein N1 is a water-resistant adhesive strength measured after stored at room temperature for one day, immersed in water for 30 minutes, taken out from the water and then residual water is wiped off; and has an N2 to N0 reduction rate of 40% or higher, wherein N2 is a water-peel strength measured after stored at room temperature for one day, 20 ?L distilled water is dropped onto the adherend and is allowed to enter a PSA layer/adherend interfacial edge. N2 is measured at a tensile speed of 300 mm/min at a peel angle of 180°.
    Type: Application
    Filed: January 28, 2019
    Publication date: July 15, 2021
    Inventors: Naofumi KOSAKA, Yosuke SHIMIZU, Satoshi HONDA, Taiki SHIMOKURI, Shou TAKARADA, Masayuki SATAKE, Kenichi OKADA, Atsushi TAKASHIMA, Ginji MIZUHARA, Masayuki OKAMOTO, Ryoko ASAI
  • Publication number: 20200199769
    Abstract: A method capable of removing a liquid from a seal of a substrate holder so as to prevent contact between the liquid and an electrical contact of the substrate holder is provided. The method includes: immersing the substrate in a plating solution, with a seal and an electrical contact of the substrate holder in contact with the substrate; applying a voltage between the substrate and an anode in the presence of the plating solution to plate the substrate; pulling up the plated substrate from the plating solution; separating the seal from the plated substrate; and forming a flow of gas passing through a gap between the plated substrate and the seal, the flow of gas being directed from an inside to an outside of the substrate holder.
    Type: Application
    Filed: November 15, 2019
    Publication date: June 25, 2020
    Inventors: Masaya Seki, Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata
  • Patent number: 10570320
    Abstract: Provided is an adhesive member to be adhesively fixed through pressure which has both position adjustability and adhesiveness and is capable of producing a sufficient adhesive strength in addition to the position adjustability. The adhesive member comprises a support, a pressure-sensitive adhesive layer provided on one surface of the support, and a plurality of protrusion elements arranged, in spaced-apart relation to each other, on a principal surface of the pressure-sensitive adhesive layer on a side opposite to the support. Each of the protrusion elements is composed of an aggregation of a plurality of cohesive particles, wherein the adhesive member has a frictional force of 0.4 N/cm2 or less, with respect to a stainless steel plate serving as an adherend, as measured when the protrusion elements are in contact with a surface of the adherend, and a shear adhesive strength of 45 N/cm2 or more.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: February 25, 2020
    Assignee: NITTO DENKO CORPORATION
    Inventors: Kensuke Tani, Mizuho Nagata, Kaori Mizobata, Masatsugu Soga, Ryota Masuda, Masayuki Satake, Kenichi Okada, Naofumi Kosaka, Keisuke Shimokita
  • Publication number: 20190390359
    Abstract: To reduce an amount of plating solution attached to a substrate holder. There is provided the substrate holder for holding a substrate comprising a first holding member, a second holding member, a sealing member, a pin, a ring, and a moving mechanism. The sealing member forms a sealed space inside the substrate holder. The pin is fixed to one of the first holding member and the second holding member. The ring is disposed on another of the first holding member and the second holding member. The ring engages with the pin. The moving mechanism circumferentially moves the ring. The pin and the ring are engaged with one another to fix the first holding member and the second holding member to one another. The pin and the ring are disposed inside the sealed space.
    Type: Application
    Filed: June 25, 2019
    Publication date: December 26, 2019
    Inventors: Masaya Seki, Hideki Takayanagi, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata
  • Patent number: 10266629
    Abstract: An aqueous dispersion-type pressure-sensitive adhesive composition for an optical film includes a emulsion particles of a core-shell structure, wherein the emulsion particles include a (meth)acryl-based copolymer (A) having a glass transition temperature of ?55° C. to 0° C. and a (meth)acryl-based copolymer (B) having a glass transition temperature of 0° C. to 180° C., in a single emulsion particle, one of the copolymers (A) and (B) forms a core layer, and another forms a shell layer, at least one of the copolymers (A) and (B) contains a carboxyl group-containing monomer, a difference of the glass transition temperatures between the copolymers (A) and (B) is 50° C. or more, and a ratio (A)/(B) (by weight) is in the range of 50/50 to 90/10.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: April 23, 2019
    Assignee: NITTO DENKO CORPORATION
    Inventors: Kunihiro Inui, Toshitsugu Hosokawa, Takaaki Ishii, Masayuki Satake, Kenichi Okada, Toshitaka Takahashi, Yousuke Makihata, Taiki Shimokuri, Shusaku Goto, Takeharu Kitagawa, Minoru Miyatake, Tomohiro Mori, Takashi Kamijo
  • Patent number: 10228496
    Abstract: A pressure-sensitive adhesive layer-attached polarizing film of the invention includes: a polarizing film; and a pressure-sensitive adhesive layer provided on the polarizing film, wherein the polarizing film includes a polarizer and a transparent protective film provided on only one side of the polarizer, the pressure-sensitive adhesive layer is provided on a side of the polarizer where the transparent protective film is absent, and the pressure-sensitive adhesive layer is made of a pressure-sensitive adhesive composition containing a (meth)acryl-based polymer (A) and an alkali metal salt (B). The pressure-sensitive adhesive layer-attached polarizing film has a pressure-sensitive adhesive layer with an antistatic function and satisfactory durability and whose optical properties are less likely to be degraded.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: March 12, 2019
    Assignee: NITTO DENKO CORPORATION
    Inventors: Atsushi Yasui, Yuusuke Toyama, Tomoyuki Kimura, Masayuki Satake, Shusaku Goto, Takeharu Kitagawa, Minoru Miyatake, Tomohiro Mori, Takashi Kamijo
  • Publication number: 20190031815
    Abstract: A pressure-sensitive adhesive composition for an optical film of the present invention comprises a (meth)acryl-based polymer(A): and a polyether compound (B) having a polyether skeleton and a reactive silyl group represented by formula (1): —SiRaM3-a at at least one terminal, wherein R represents a monovalent organic group having 1 to 20 carbon atoms and optionally having a substituent; M represents a hydroxyl group or a hydrolyzable group; and <a> represents an integer of 1 to 3, provided that in cases where two or more R groups, R groups is the same or different, and in cases where two or more M groups, M groups is the same or different. The pressure-sensitive adhesive composition for an optical film is capable of forming a pressure-sensitive adhesive layer having reworkability that enables an optical film to be easily peeled off from a liquid crystal panel or the like with no adhesive residue and satisfactory durability that prevents a bonded optical film from peeling or lifting.
    Type: Application
    Filed: October 1, 2018
    Publication date: January 31, 2019
    Applicant: NITTO DENKO CORPORATION
    Inventors: Yuusuke Toyama, Arata Fujihara, Akiko Sugino, Atsushi Yasui, Masayuki Satake, Mizue Nagata, Tomoyuki Kimura
  • Publication number: 20190016923
    Abstract: Provided is an adhesive member to be adhesively fixed through pressure which has both position adjustability and adhesiveness and is capable of producing a sufficient adhesive strength in addition to the position adjustability. The adhesive member comprises a support, a pressure-sensitive adhesive layer provided on one surface of the support, and a plurality of protrusion elements arranged, in spaced-apart relation to each other, on a principal surface of the pressure-sensitive adhesive layer on a side opposite to the support. Each of the protrusion elements is composed of an aggregation of a plurality of cohesive particles, wherein the adhesive member has a frictional force of 0.4 N/cm2 or less, with respect to a stainless steel plate serving as an adherend, as measured when the protrusion elements are in contact with a surface of the adherend, and a shear adhesive strength of 45 N/cm2 or more.
    Type: Application
    Filed: March 7, 2016
    Publication date: January 17, 2019
    Applicant: NITTO DENKO CORPORATION
    Inventors: Kensuke TANI, Mizuho NAGATA, Kaori MIZOBATA, Masatsugu SOGA, Ryota MASUDA, Masayuki SATAKE, Kenichi OKADA, Naofumi KOSAKA, Keisuke SHIMOKITA
  • Publication number: 20180188421
    Abstract: A pressure-sensitive adhesive layer-attached polarizing film of the invention includes: a polarizing film; and a pressure-sensitive adhesive layer provided on the polarizing film, wherein the polarizing film includes a polarizer and a transparent protective film provided on only one side of the polarizer, the pressure-sensitive adhesive layer is provided on a side of the polarizer where the transparent protective film is absent, and the pressure-sensitive adhesive layer is made of a pressure-sensitive adhesive composition containing a (meth)acryl-based polymer (A) and an alkali metal salt (B). The pressure-sensitive adhesive layer-attached polarizing film has a pressure-sensitive adhesive layer with an antistatic function and satisfactory durability and whose optical properties are less likely to be degraded.
    Type: Application
    Filed: February 20, 2018
    Publication date: July 5, 2018
    Applicant: NITTO DENKO CORPORATION
    Inventors: Atsushi Yasui, Yuusuke Toyama, Tomoyuki Kimura, Masayuki Satake, Shusaku Goto, Takeharu Kitagawa, Minoru Miyatake, Tomohiro Mori, Takashi Kamijo
  • Publication number: 20180044556
    Abstract: A pressure-sensitive adhesive composition for an optical film of the present invention includes a (meth)acrylic polymer(A) that comprises, as monomer units, 67 to 96.99% by weight of alkyl (meth)acrylate(a1), 1 to 20% by weight of benzyl (meth)acrylate(a2), 2 to 10% by weight of a carboxyl group-containing monomer(a3) and 0.01 to 3% by weight of a hydroxyl group-containing monomer(a4), has a weight average molecular weight(Mw) of 1,600,000 or more, and satisfy a weight average molecular weight(Mw)/number average molecular weight(Mn) ratio of 1.8 to 10. The pressure-sensitive adhesive composition can satisfy durability that does not cause peeling, separation at the state in which the optical film was attached, and can form a pressure-sensitive adhesive layer capable of improving display non-uniformity caused by a white display leakage at a peripheral portion.
    Type: Application
    Filed: October 10, 2017
    Publication date: February 15, 2018
    Applicant: Nitto Denko Corporation
    Inventors: Atsushi Yasui, Yuusuke Toyama, Mizue Nagata, Tomoyuki Kimura, Masayuki Satake
  • Patent number: 9676970
    Abstract: A pressure-sensitive adhesive composition, comprising: (A) a (meth)acryl-based polymer; and (B) an ionic compound comprising an anion component and a cation component, wherein the anion component is at least one of an anion component represented by the general formula (1): (CnF2n+1SO2)2N?,??(1) wherein n is an integer of 3 to 10, and an anion component represented by the general formula (2): CF2(CmF2mSO2)2N?,??(2) wherein m is an integer of 2 to 10.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: June 13, 2017
    Assignee: NITTO DENKO CORPORATION
    Inventors: Atsushi Yasui, Yuusuke Toyama, Tomoyuki Kimura, Masayuki Satake
  • Patent number: 9587148
    Abstract: A pressure-sensitive adhesive composition, comprising: a (meth)acryl-based polymer (A); and an ionic compound (B) comprising an anion component and a cation component, wherein the (meth)acryl-based polymer (A) is a hydroxyl group-containing (meth)acryl-based polymer (A) containing a monomer unit derived from a hydroxyl group-containing monomer, and the anion component has an organic group and three or more carbon atoms. The anion component is preferably at least one of anion components represented by the following formula (1): (CnF2n+1SO2)2N???(1) wherein n is an integer of 3 to 10; the following formula (2): CF2(CmF2mSO2)2N???(2) wherein m is an integer of 2 to 10; and the following formula (3): ?O3S(CF2)lSO3???(3) wherein l is an integer of 3 to 10.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: March 7, 2017
    Assignee: NITTO DENKO CORPORATION
    Inventors: Atsushi Yasui, Yuusuke Toyama, Tomoyuki Kimura, Masayuki Satake