Patents by Inventor Masayuki Sekimura
Masayuki Sekimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7604353Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film.Type: GrantFiled: December 18, 2007Date of Patent: October 20, 2009Assignees: Kabushiki Kaisha Toshiba, Kabushiki Kaisha TopconInventors: Akihiro Koga, Masayuki Sekimura, Kei Masunishi, Akio Kobayashi, Hiroyuki Kawashima, Hirotake Maruyama
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Patent number: 7482728Abstract: The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.Type: GrantFiled: September 23, 2005Date of Patent: January 27, 2009Assignee: Kabushiki Kaisha ToshibaInventors: Akihiro Koga, Masayuki Sekimura, Toshikatsu Akiba
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Publication number: 20080204661Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes.Type: ApplicationFiled: December 12, 2007Publication date: August 28, 2008Applicants: KABUSHIKI KAISHA TOSHIBA, KABUSHIKI KAISHA TOPCONInventors: Akihiro Koga, Masayuki Sekimura, Kei Masunishi, Akio Kobayashi, Hiroyuki Kawashima, Hirotake Maruyama
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Publication number: 20080180634Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film.Type: ApplicationFiled: December 18, 2007Publication date: July 31, 2008Applicants: KABUSHIKI KAISHA TOPCON, KABUSHIKI KAISHA TOSHIBAInventors: Akihiro Koga, Masayuki Sekimura, Kei Masunishi, Akio Kobayashi, Hiroyuki Kawashima, Hirotake Maruyama
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Publication number: 20060097672Abstract: The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.Type: ApplicationFiled: September 23, 2005Publication date: May 11, 2006Inventors: Akihiro Koga, Masayuki Sekimura, Toshikatsu Akiba
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Publication number: 20060066174Abstract: In an electrostatic actuator, stoppers are provided on a driving electrode substrate. Stoppers are provided so that when a first movable section moves in the direction in which a penetrating portion penetrates a stator frame, a gap is created between driving electrodes and a movable-section driving electrode, with the stoppers lying opposite stoppers. This makes it possible to reduce the possibility of destroying the electrostatic actuator even if the movable section is deformed.Type: ApplicationFiled: September 21, 2005Publication date: March 30, 2006Inventors: Toshikatsu Akiba, Yasuo Shima, Masayuki Sekimura
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Publication number: 20060055282Abstract: The present invention has a movable section guided by a stator so as to be movable in a direction in which a penetrating portion penetrates the stator. A film is provided on an area of the movable section which comes into contact with the stator when the movable section moves in the penetrating direction of the penetrating portion. The provision of the film reduces the coefficient of friction between a support of the movable section and a stator frame or a driving electrode substrate. This allows the movable section to move at high speed. The present invention can provide an electrostatic actuator and an image pickup apparatus in which the movable section can move at high speed.Type: ApplicationFiled: September 13, 2005Publication date: March 16, 2006Inventor: Masayuki Sekimura
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Patent number: 6806661Abstract: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.Type: GrantFiled: July 16, 2003Date of Patent: October 19, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Akihiro Kasahara, Masayuki Sekimura, Akihiro Koga
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Patent number: 6784594Abstract: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.Type: GrantFiled: July 16, 2003Date of Patent: August 31, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Akihiro Kasahara, Masayuki Sekimura, Akihiro Koga
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Publication number: 20040066113Abstract: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.Type: ApplicationFiled: July 16, 2003Publication date: April 8, 2004Inventors: Akihiro Kasahara, Masayuki Sekimura, Akihiro Koga
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Publication number: 20040012300Abstract: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.Type: ApplicationFiled: July 16, 2003Publication date: January 22, 2004Inventors: Akihiro Kasahara, Masayuki Sekimura, Akihiro Koga
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Patent number: 6670738Abstract: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.Type: GrantFiled: March 28, 2001Date of Patent: December 30, 2003Assignee: Kabushiki Kaisha ToshibaInventors: Akihiro Kasahara, Masayuki Sekimura, Akihiro Koga
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Patent number: 6633531Abstract: An optical disk drive having an optical disk that permits transmission of a laser beam, an optical disk holding mechanism configured to rotatably support the optical disk, a first laser beam irradiation mechanism disposed on one side of the optical disk, causing the first laser beam to be vertically incident on one surface of the optical disk, and a first evanescent optical system disposed on the other side of the optical disk. The first evanescent optical system is configured to receive the first laser beam which emanates from the laser beam irradiation mechanism and passes through the optical disk, and radiate the first evanescent wave to the other surface of the optical disk having at least one recording surface.Type: GrantFiled: August 10, 2000Date of Patent: October 14, 2003Assignee: Kabushiki Kaisha ToshibaInventors: Mastoshi Hirono, Masayuki Sekimura, Makoto Asakura, Yoriyuki Ishibashi, Takao Ohmi, Yasuo Motegi, Minoru Yonezawa
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Patent number: 6417107Abstract: Conventional methods of forming a (111)-plane into a 45-degree-surface have employed a silicon wafer which requires a high processing cost, and methods utilizing an inexpensive (100) silicon wafer have not been successful in forming a 45-degree-surface having sufficient flatness. There is provided a method for manufacturing a semiconductor device preparing a substrate made of the (100) silicon wafer including steps of preparing a substrate made of the (100) silicon wafer, forming a pattern along a <100> direction of the (100) silicon, and etching with an anisotropic etchant using the pattern while applying an ultrasonic wave.Type: GrantFiled: June 18, 1999Date of Patent: July 9, 2002Assignee: Kabushiki Kaisha ToshibaInventor: Masayuki Sekimura
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Publication number: 20020048962Abstract: Conventional methods of forming a (111)-plane into a 45-degree-surface have employed a silicon wafer which requires a high processing cost, and methods utilizing an inexpensive (100) silicon wafer have not been successful in forming a 45-degree-surface having sufficient flatness. There is provided a method for manufacturing a semiconductor device preparing a substrate made of the (100) silicon wafer including steps of preparing a substrate made of the (100) silicon wafer, forming a pattern along a <100> direction of the (100) silicon, and etching with an anisotropic etchant using the pattern while applying an ultrasonic wave.Type: ApplicationFiled: June 18, 1999Publication date: April 25, 2002Inventor: MASAYUKI SEKIMURA
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Publication number: 20010028203Abstract: A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.Type: ApplicationFiled: March 28, 2001Publication date: October 11, 2001Inventors: Akihiro Kasahara, Masayuki Sekimura, Akihiro Koga
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Patent number: 6212026Abstract: A data storage apparatus (HDD unit) having a cartridge, attachable to and detachable from a personal computer, incorporating a recording disk, comprises a switch circuit for inhibiting data reading and writing with respect to a magnetic disk and a locking mechanism for detecting that the cartridge is detached from the personal computer and causing data reading and writing inhibiting means to operate in response to the detection.Type: GrantFiled: July 30, 1999Date of Patent: April 3, 2001Assignee: Kabushiki Kaisha ToshibaInventors: Takao Ohmi, Tomoko Taguchi, Shinji Takakura, Takehito Yamada, Masayuki Sekimura
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Patent number: 5956194Abstract: A data storage apparatus (HDD unit) having a cartridge, attachable to and detachable from a personal computer, incorporating a recording disk, comprises a switch circuit for inhibiting data reading and writing with respect to a magnetic disk and a locking mechanism for detecting that the cartridge is detached from the personal computer and causing a data reading and writing inhibiting device to operate in response to the detection.Type: GrantFiled: September 19, 1997Date of Patent: September 21, 1999Assignee: Kabushiki Kaisha ToshibaInventors: Takao Ohmi, Tomoko Taguchi, Shinji Takakura, Takehito Yamada, Masayuki Sekimura
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Patent number: 5740150Abstract: An optical disk drive has a drive unit for driving a disk and an optical head for focusing a laser beam onto the disk. The optical head has a light source for emitting the laser beam, a galvanomirror for correcting a light passage of the emitted laser beam, and a lens for focusing the laser beam from the galvanomirror onto the disk. The galvanomirror has a rocking portion being electrically chargeable, and one surface of the rocking portion having a reflection surface for reflecting the laser beam. The rocking portion is rockably supported by first end portions of supporting portions. Second end portions of the supporting portions are connected to a second plate (fixing portion). The second plate has an opposed portion opposed to the other surface of the rocking portion with a predetermined gap interposed. Electrically chargeable electrodes are provided on the opposed portion of the second plate, for electrostatically driving the rocking portion thereby reflecting the laser beam at a desired angle.Type: GrantFiled: November 22, 1996Date of Patent: April 14, 1998Assignee: Kabushiki Kaisha ToshibaInventors: Kiyotaka Uchimaru, Akihiro Kasahara, Masayuki Sekimura
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Patent number: 5694188Abstract: A liquid crystal display device comprises two substrates opposed to each other, a comb-shaped wall electrode formed to correspond to each pixel of an array defined by vertical and horizontal wires formed on the substrate, the comb-shaped wall electrode having a plurality of elemental electrodes, major surfaces of each of the elemental electrodes being substantially perpendicular to the surfaces of the two substrates, and the major surfaces of adjacent ones of the elemental electrodes constituting counter electrodes to each other, and a liquid crystal filled in a gap of the comb-shaped wall electrode provided between the two substrates.Type: GrantFiled: September 14, 1995Date of Patent: December 2, 1997Assignee: Kabushiki Kaisha ToshibaInventors: Kenji Sano, Kenji Todori, Yutaka Majima, Masayuki Sekimura, Akinori Hongu, Taeko I. Urano, Shigeru Machida, Koji Asakawa