Abstract: A target object detection apparatus (20) includes an acquisition unit (210), a likelihood information generation unit (220), and a determination unit (230). The acquisition unit (210) acquires an IF signal from an irradiation apparatus (10) at a plurality of timings. The likelihood information generation unit (220) executes, by processing the IF signal, processing of generating, with respect to each of a plurality of IF signals, likelihood information for a region (hereinafter, referred to as a target object region) having a possibility in that an accompaniment, i.e., a target object is present. The likelihood information indicates a distribution of presence probabilities of a target object in at least a height direction in a target object region. Then, the determination unit (230) determines a presence or absence of a target object, by using likelihood information generated for each of a plurality of target object regions.

Abstract: To shorten a waiting time for a belongings inspection, the present invention provides an inspection system 10 including an acquisition unit 11 that acquires material information including at least either one of a piece of personal unique information unique to each of inspection target persons, and a piece of environment information indicating a state value of an environment that changes at each inspection timing, and a determination unit 12 that determines a content of an inspection for the each inspection target person and/or at the each inspection timing, based on the material information.

Abstract: A ceramic membrane device for a photomask is a ring-shaped base plate constituting a circumferential frame and having a flat front surface, an outer side surface and a rear surface, a front CVD coating supported on the front surface of the base plate and defining a flat surface on which a masking pattern is to be formed, and a rear CVD coating formed on the rear surface of the base plate. The front and rear CVD coatings are made of a silicon compound.

Abstract: A susceptor for use in a vertical vapor growth apparatus includes a susceptor body (12) having an upper surface, a plurality of wafer receiving portions (17) formed in the upper surface of the susceptor body (12), and plates (16) fixed in the upper surface of the susceptor body (12) near the wafer setting portions (17). The plates (16) have an upper surface such that, when wafers (5) are mounted in the wafer setting portions (17), the upper surfaces of the plates (16) and the wafers (5) are positioned substantially in the same plane. The plates (16) are made of quartz glass or fused silica.