Patents by Inventor Massimiliano Pindo

Massimiliano Pindo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for reducing loading effects on a semiconductor manufacturing component during an etch process
    Patent number: 6703170
    Abstract: A method and apparatus for reducing loading effects on a semiconductor manufacturing component during an etch process is disclosed. The transmittance associated with a photomask is calculated and the etch process for a material formed on a semiconductor manufacturing component is adjusted based on the transmittance calculated for the photomask.
    Type: Grant
    Filed: December 13, 2001
    Date of Patent: March 9, 2004
    Assignee: DuPont Photomasks, Inc.
    Inventor: Massimiliano Pindo