Abstract: A method of managing data obtained by measurements. The method permits EDS (energy dispersive spectroscopy) spectra to be collected in one operation. Energies detected by an EDS detector are converted by a pulse height analyzer into pulses of heights corresponding to the energies. The heights of the pulses in a distribution are assigned to multiple channels. The number of pulses in each channel is counted. A data processing circuit sends data blocks to a CPU. In each data block, a tag indicative of being X-ray energy data and the value of energy are combined. The CPU sequentially stores incoming data blocks into a hard disk.

Abstract: A method of managing data obtained by measurements. The method permits EDS (energy dispersive spectroscopy) spectra to be collected in one operation. Energies detected by an EDS detector are converted by a pulse height analyzer into pulses of heights corresponding to the energies. The heights of the pulses in a distribution are assigned to multiple channels. The number of pulses in each channel is counted. A data processing circuit sends data blocks to a CPU. In each data block, a tag indicative of being X-ray energy data and the value of energy are combined. The CPU sequentially stores incoming data blocks into a hard disk.

Abstract: The present invention relates to a method and system for managing data. The invention is intended to provide a data managing method and data managing system capable of classifying created files and managing them without depending on the operator's ability. The method is for use in an analytical instrument having a function of imaging a specimen and a function of analyzing the specimen. The area of the specimen from which the image has been taken is analyzed totally or partially. The analytical instrument includes an analytical data managing unit for recording the resulting data hierarchically in a corresponding manner to the specimen area.

Abstract: There is disclosed an analytical method capable of performing an analysis in electron microscopy by directing an electron beam at set analysis points wherein a reference image is displayed on a monitor and a user selects plural analysis points within the image. The specimen stage is returned to the approximate position where the reference image was obtained and a new image is obtained. At this time, the newly obtained image does not completely agree in position with the reference image due to accuracy of movement of the stage. The two images are supplied to a deviation amount calculator, which, in turn, compares the images and finds the amount of deviation of the newly obtained image from the reference image.

Abstract: The present invention relates to a method and system for managing data. The invention is intended to provide a data managing method and data managing system capable of classifying created files and managing them without depending on the operator's ability. The method is for use in an analytical instrument having a function of imaging a specimen and a function of analyzing the specimen. The area of the specimen from which the image has been taken is analyzed totally or partially. The analytical instrument includes an analytical data managing unit for recording the resulting data hierarchically in a corresponding manner to the specimen area.

Abstract: There is disclosed an analytical method capable of performing an analysis in electron microscopy by directing an electron beam at set analysis points wherein a reference image is displayed on a monitor and a user selects plural analysis points within the image. The specimen stage is returned to the approximate position where the reference image was obtained and a new image is obtained. At this time, the newly obtained image does not completely agree in position with the reference image due to accuracy of movement of the stage. The two images are supplied to a deviation amount calculator, which, in turn, compares the images and finds the amount of deviation of the newly obtained image from the reference image.

Abstract: A scanning electron microscope capable of imaging a specimen at a magnification lower than the minimum magnification of the microscope. The specimen surface is virtually partitioned into cells. The specimen is so moved that the cells can be individually scanned by the electron beam and hence image data can be taken from each cell. Image data derived from each cell by the scan is stored in locations of an image memory that are addressed corresponding to the positions of the cells.

Abstract: A scanning electron microscope capable of imaging a specimen at a magnification lower than the minimum magnification of the microscope. The specimen surface is virtually partitioned into cells. The specimen is so moved that the cells can be individually scanned by the electron beam and hence image data can be taken from each cell. Image data derived from each cell by the scan is stored in locations of an image memory that are addressed corresponding to the positions of the cells.