Patents by Inventor Mathew L. Miller

Mathew L. Miller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF PLASMA LOAD IMPEDANCE TUNING FOR ENGINEERED TRANSIENTS BY SYNCHRONIZED MODULATION OF A SOURCE POWER OR BIAS POWER RF GERERATOR
    Publication number: 20090294414
    Abstract: A method processing a workpiece in a plasma reactor chamber in which a first one of plural applied RF plasma powers is modulated in accordance with a time-varying modulation control signal corresponding to a desired process transient cycle. The method achieves a reduction in reflected power by modulating a second one of the plural plasma powers in response to the time-varying modulation control signal.
    Type: Application
    Filed: May 29, 2008
    Publication date: December 3, 2009
    Applicant: Applied Materials, Inc.
    Inventors: Steven C. Shannon, Kartik Ramaswamy, Daniel J. Hoffman, Mathew L. Miller, Kenneth S. Collins