Patents by Inventor Mathew Marcus

Mathew Marcus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Internal gettering by metal alloy clusters
    Patent number: 7763095
    Abstract: The present invention relates to the internal gettering of impurities in semiconductors by metal alloy clusters. In particular, intermetallic clusters are formed within silicon, such clusters containing two or more transition metal species. Such clusters have melting temperatures below that of the host material and are shown to be particularly effective in gettering impurities within the silicon and collecting them into isolated, less harmful locations. Novel compositions for some of the metal alloy clusters are also described.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: July 27, 2010
    Assignee: The Regents of the University of California
    Inventors: Anthony Buonassisi, Matthias Heuer, Andrei A. Istratov, Matthew D. Pickett, Mathew A. Marcus, Eicke R. Weber
  • Internal gettering by metal alloy clusters
    Publication number: 20060289091
    Abstract: The present invention relates to the internal gettering of impurities in semiconductors by metal alloy clusters. In particular, intermetallic clusters are formed within silicon, such clusters containing two or more transition metal species. Such clusters have melting temperatures below that of the host material and are shown to be particularly effective in gettering impurities within the silicon and collecting them into isolated, less harmful locations. Novel compositions for some of the metal alloy clusters are also described.
    Type: Application
    Filed: June 5, 2006
    Publication date: December 28, 2006
    Inventors: Anthony Buonassisi, Matthias Heuer, Andrei Istratov, Matthew Pickett, Mathew Marcus, Eicke Weber