Patents by Inventor Mathias Plappert

Mathias Plappert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220199464
    Abstract: A semiconductor device and a method of manufacturing a semiconductor are provided. In an embodiment, a metallic layer may be formed over a semiconductor substrate. An anti-reflective layer may be formed over the metallic layer. A passivation layer may be formed over the anti-reflective layer. An opening may be formed in the passivation layer to expose the anti-reflective layer.
    Type: Application
    Filed: December 21, 2020
    Publication date: June 23, 2022
    Inventors: Stephan VOSS, Alexander BREYMESSER, Eva-Maria HOF, Mathias PLAPPERT, Carsten SCHAEFFER
  • Patent number: 11195713
    Abstract: In one aspect, a method of forming a silicon-insulator layer is provided. The method includes arranging a silicon structure in a plasma etch process chamber and applying a plasma to the silicon structure in the plasma etch process chamber at a temperature of the silicon structure equal to or below 100° C. The plasma includes a component and a halogen derivate, thereby forming the silicon-insulator layer. The silicon-insulator layer includes silicon and the component. In another aspect, a semiconductor device is provided having a silicon-insulator layer formed by the method.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: December 7, 2021
    Assignee: Infineon Technologies AG
    Inventors: Joachim Hirschler, Georg Ehrentraut, Christoffer Erbert, Klaus Goeschl, Markus Heinrici, Michael Hutzler, Wolfgang Koell, Stefan Krivec, Ingmar Neumann, Mathias Plappert, Michael Roesner, Olaf Storbeck
  • Publication number: 20190385842
    Abstract: In one aspect, a method of forming a silicon-insulator layer is provided. The method includes arranging a silicon structure in a plasma etch process chamber and applying a plasma to the silicon structure in the plasma etch process chamber at a temperature of the silicon structure equal to or below 100° C. The plasma includes a component and a halogen derivate, thereby forming the silicon-insulator layer. The silicon-insulator layer includes silicon and the component. In another aspect, a semiconductor device is provided having a silicon-insulator layer formed by the method.
    Type: Application
    Filed: May 30, 2019
    Publication date: December 19, 2019
    Inventors: Joachim Hirschler, Georg Ehrentraut, Christoffer Erbert, Klaus Goeschl, Markus Heinrici, Michael Hutzler, Wolfgang Koell, Stefan Krivec, Ingmar Neumann, Mathias Plappert, Michael Roesner, Olaf Storbeck
  • Patent number: 10453806
    Abstract: A method for forming a semiconductor device and semiconductor device is disclosed. In one example, the method includes forming a silicone layer on a semiconductor die. The method further includes plasma treating a silicone surface of the silicone layer. A surfactant is deposited on the plasma-treated silicone surface of the silicone layer to obtain a silicone surface at least partly covered by surfactant. A mold is formed on the silicone surface at least partly covered by surfactant. The surfactant includes surfactant molecules comprising an inorganic skeleton terminated by organic compounds.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: October 22, 2019
    Assignee: Infineon Teohnologies Austria AG
    Inventors: Joachim Hirschler, Christoffer Erbert, Markus Heinrici, Mathias Plappert, Caterina Travan
  • Patent number: 10361096
    Abstract: In various embodiments, a method is provided. The method includes forming a metallization layer above at least one first region of a substrate. After forming the metallization layer at least one second region of the substrate is free of the metallization layer. The method further includes forming a barrier layer above the at least one first region of the substrate and above the at least one second region of the substrate. The barrier layer in the at least one first region of the substrate directly adjoins the metallization layer. The method further includes removing the barrier layer in the at least one first region of the substrate by drive-in of the barrier layer into the metallization layer.
    Type: Grant
    Filed: August 15, 2017
    Date of Patent: July 23, 2019
    Assignee: Infineon Technologies AG
    Inventors: Mathias Plappert, Stefan Krivec, Andreas Riegler, Karin Schrettlinger
  • Patent number: 10199291
    Abstract: A semiconductor arrangement is presented.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: February 5, 2019
    Assignee: Infineon Technologies AG
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Publication number: 20180145038
    Abstract: A method for forming a semiconductor device and semiconductor device is disclosed. In one example, the method includes forming a silicone layer on a semiconductor die. The method further includes plasma treating a silicone surface of the silicone layer. A surfactant is deposited on the plasma-treated silicone surface of the silicone layer to obtain a silicone surface at least partly covered by surfactant. A mold is formed on the silicone surface at least partly covered by surfactant. The surfactant includes surfactant molecules comprising an inorganic skeleton terminated by organic compounds.
    Type: Application
    Filed: November 14, 2017
    Publication date: May 24, 2018
    Applicant: Infineon Technologies Austria AG
    Inventors: Joachim Hirschler, Christoffer Erbert, Markus Heinrici, Mathias Plappert, Caterina Travan
  • Publication number: 20180053663
    Abstract: In various embodiments, a method is provided. The method includes forming a metallization layer above at least one first region of a substrate. After forming the metallization layer at least one second region of the substrate is free of the metallization layer. The method further includes forming a barrier layer above the at least one first region of the substrate and above the at least one second region of the substrate. The barrier layer in the at least one first region of the substrate directly adjoins the metallization layer. The method further includes removing the barrier layer in the at least one first region of the substrate by drive-in of the barrier layer into the metallization layer.
    Type: Application
    Filed: August 15, 2017
    Publication date: February 22, 2018
    Inventors: Mathias Plappert, Stefan Krivec, Andreas Riegler, Karin Schrettlinger
  • Publication number: 20170352602
    Abstract: A semiconductor arrangement is presented.
    Type: Application
    Filed: August 22, 2017
    Publication date: December 7, 2017
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Patent number: 9793184
    Abstract: A semiconductor arrangement is presented.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: October 17, 2017
    Assignee: Infineon Technologies AG
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Publication number: 20160268177
    Abstract: A semiconductor arrangement is presented.
    Type: Application
    Filed: March 7, 2016
    Publication date: September 15, 2016
    Inventors: Andreas Riegler, Angelika Koprowski, Mathias Plappert, Frank Wolter
  • Patent number: 9355958
    Abstract: A semiconductor device includes a semiconductor substrate having a first side, a second side opposite the first side, an active area, an outer rim, and an edge termination area arranged between the outer rim and the active area. A metallization structure is arranged on the first side of the semiconductor substrate and comprising at least a first metal layer comprised of a first metallic material and a second metal layer comprised of a second metallic material, wherein the first metallic material is electrochemically more stable than the second metallic material. The first metal layer extends laterally further towards the outer rim than the second metal layer.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: May 31, 2016
    Assignee: Infineon Technologies AG
    Inventors: Carsten Schäffer, Oliver Humbel, Mathias Plappert, Angelika Koprowski
  • Patent number: 9209109
    Abstract: An IGBT includes a semiconductor portion with IGBT cells. Each IGBT cell includes a source zone of a first conductivity type, a body zone of a second, complementary conductivity type, and a drift zone of the first conductivity type separated from the source zone by the body zone. An emitter electrode includes a main layer and an interface layer. The interface layer directly adjoins at least one of the body zone and a supplementary zone of the second conductivity type. A contact resistance between the semiconductor portion and the interface layer is higher than between the semiconductor portion and a material of the main layer. For example, the interface layer may reduce diode emitter efficiency and reverse recovery losses in IGBTs.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: December 8, 2015
    Assignee: Infineon Technologies AG
    Inventors: Dorothea Werber, Thomas Gutt, Mathias Plappert, Frank Pfirsch
  • Publication number: 20150262814
    Abstract: A power semiconductor device in accordance with various embodiments may include: a semiconductor body; and a passivation layer disposed over at least a portion of the semiconductor body, wherein the passivation layer includes an organic dielectric material having a water uptake of less than or equal to 0.5 wt % in saturation.
    Type: Application
    Filed: March 13, 2014
    Publication date: September 17, 2015
    Applicant: Infineon Technologies AG
    Inventors: Mathias Plappert, Eric Graetz, Andreas Behrendt, Oliver Humbel, Carsten Schaeffer, Angelika Koprowski
  • Publication number: 20150115449
    Abstract: A semiconductor device includes a semiconductor substrate having a first side, a second side opposite the first side, an active area, an outer rim, and an edge termination area arranged between the outer rim and the active area. A metallization structure is arranged on the first side of the semiconductor substrate and comprising at least a first metal layer comprised of a first metallic material and a second metal layer comprised of a second metallic material, wherein the first metallic material is electrochemically more stable than the second metallic material. The first metal layer extends laterally further towards the outer rim than the second metal layer.
    Type: Application
    Filed: October 31, 2013
    Publication date: April 30, 2015
    Inventors: Carsten Schäffer, Oliver Humbel, Mathias Plappert, Angelika Koprowski
  • Publication number: 20150014743
    Abstract: An IGBT includes a semiconductor portion with IGBT cells. Each IGBT cell includes a source zone of a first conductivity type, a body zone of a second, complementary conductivity type, and a drift zone of the first conductivity type separated from the source zone by the body zone. An emitter electrode includes a main layer and an interface layer. The interface layer directly adjoins at least one of the body zone and a supplementary zone of the second conductivity type. A contact resistance between the semiconductor portion and the interface layer is higher than between the semiconductor portion and a material of the main layer. For example, the interface layer may reduce diode emitter efficiency and reverse recovery losses in IGBTs.
    Type: Application
    Filed: July 15, 2013
    Publication date: January 15, 2015
    Inventors: Dorothea Werber, Thomas Gutt, Mathias Plappert, Frank Pfirsch
  • Patent number: 8883609
    Abstract: According to an embodiment, a method for manufacturing a semiconductor structure includes providing a first monocrystalline semiconductor portion having a first lattice constant in a reference direction and forming a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: November 11, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Mathias Plappert, Hans-Joachim Schulze
  • Publication number: 20140080294
    Abstract: According to an embodiment, a method for manufacturing a semiconductor structure includes providing a first monocrystalline semiconductor portion having a first lattice constant in a reference direction and forming a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion.
    Type: Application
    Filed: November 21, 2013
    Publication date: March 20, 2014
    Applicant: Infineon Technologies Austria AG
    Inventors: Mathias Plappert, Hans-Joachim Schulze
  • Patent number: 8618639
    Abstract: According to an embodiment, a semiconductor structure includes a first monocrystalline semiconductor portion having a first lattice constant in a reference direction; a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion; and a metal layer formed on and in contact with the second monocrystalline semiconductor portion.
    Type: Grant
    Filed: May 16, 2012
    Date of Patent: December 31, 2013
    Assignee: Infineon Technologies Austria AG
    Inventors: Mathias Plappert, Hans-Joachim Schulze
  • Publication number: 20130307031
    Abstract: According to an embodiment, a semiconductor structure includes a first monocrystalline semiconductor portion having a first lattice constant in a reference direction; a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion; and a metal layer formed on and in contact with the second monocrystalline semiconductor portion.
    Type: Application
    Filed: May 16, 2012
    Publication date: November 21, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Mathias Plappert, Hans-Joachim Schulze