Patents by Inventor Mathias Vaupel

Mathias Vaupel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130084659
    Abstract: In accordance with an embodiment of the present invention, a method of manufacturing a semiconductor device includes providing a wafer having a top surface and an opposite bottom surface. The top surface has a plurality of dicing channels. The wafer has a plurality of dies adjacent the top surface. Each die of the plurality of dies is separated by a dicing channel of the plurality of dicing channels from another die of the plurality of dies. Trenches are formed in the wafer from the top surface. The trenches are oriented along the plurality of dicing channels. After forming the trenches, the plurality of dies is tested to identify first dies to be separated from remaining dies of the plurality of dies. After testing the plurality of dies, the wafer is subjected to a grinding process from the back surface. The grinding process separates the wafer into the plurality of dies.
    Type: Application
    Filed: December 6, 2011
    Publication date: April 4, 2013
    Applicant: Infineon Technologies AG
    Inventors: Stefan Martens, Mathias Vaupel
  • Publication number: 20130084658
    Abstract: In accordance with an embodiment of the present invention, a semiconductor device is manufactured by arranging a plurality of semiconductor devices on a frame with an adhesive foil. The plurality of semiconductor devices is attached to the adhesive foil. The plurality of semiconductor devices is removed from the frame with the adhesive foil using a carbon dioxide snow jet and/or a laser process.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 4, 2013
    Applicant: Infineon Technologies AG
    Inventors: Mathias Vaupel, Sebastian Bernrieder, Adolf Koller, Stefan Martens
  • Patent number: 8334202
    Abstract: A method for fabricating a device includes providing a substrate including at least one contact and applying a dielectric layer over the substrate. The method includes applying a first seed layer over the dielectric layer, applying an inert layer over the seed layer, and structuring the inert layer, the first seed layer, and the dielectric layer to expose at least a portion of the contact. The method includes applying a second seed layer over exposed portions of the structured dielectric layer and the contact such that the second seed layer makes electrical contact with the structured first seed layer. The method includes electroplating a metal on the second seed layer.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: December 18, 2012
    Assignee: Infineon Technologies AG
    Inventors: Jens Pohl, Hans-Joachim Barth, Gottfried Beer, Rainer Steiner, Werner Robl, Mathias Vaupel
  • Patent number: 8330274
    Abstract: One or more embodiments relate to a method of forming a semiconductor structure, comprising: providing a workpiece; forming a barrier layer over the workpiece; forming a seed layer over the barrier layer; forming an inhibitor layer over the seed layer; removing a portion of said inhibitor layer to expose a portion of the seed layer; and selectively depositing a fill layer on the exposed seed layer.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: December 11, 2012
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Gottfried Beer, Joern Plagmann, Jens Pohl, Werner Robl, Rainer Steiner, Mathias Vaupel
  • Publication number: 20120181710
    Abstract: A semiconductor chip includes a first main face and a second main face opposed to the first main face. Side faces connect the first and second main faces. The side faces are at least partially covered with an anti-EBO compound and/or a surface energy reducing compound.
    Type: Application
    Filed: January 13, 2011
    Publication date: July 19, 2012
    Inventor: Mathias Vaupel
  • Publication number: 20120080791
    Abstract: One or more embodiments relate to a method of forming an electronic device, comprising: providing a workpiece; forming a first barrier layer over the workpiece; forming an intermediate conductive layer over the first barrier layer; forming a second barrier layer over the intermediate conductive layer; forming a seed layer over the second barrier layer; removing a portion of the seed layer to leave a remaining portion of the seed layer and to expose a portion of the second barrier layer; and electroplating a fill layer on the remaining portion of the seed layer.
    Type: Application
    Filed: September 30, 2010
    Publication date: April 5, 2012
    Inventors: Hans-Joachim BARTH, Gottfried BEER, Joern PLAGMANN, Jens POHL, Werner ROBL, Rainer STEINER, Mathias VAUPEL
  • Patent number: 8148257
    Abstract: One or more embodiments relate to a method of forming an electronic device, comprising: providing a workpiece; forming a first barrier layer over the workpiece; forming an intermediate conductive layer over the first barrier layer; forming a second barrier layer over the intermediate conductive layer; forming a seed layer over the second barrier layer; removing a portion of the seed layer to leave a remaining portion of the seed layer and to expose a portion of the second barrier layer; and electroplating a fill layer on the remaining portion of the seed layer.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: April 3, 2012
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Gottfried Beer, Joern Plagmann, Jens Pohl, Werner Robl, Rainer Steiner, Mathias Vaupel
  • Publication number: 20120074574
    Abstract: One or more embodiments relate to a method of forming a semiconductor structure, comprising: providing a workpiece; forming a barrier layer over the workpiece; forming a seed layer over the barrier layer; forming an inhibitor layer over the seed layer; removing a portion of said inhibitor layer to expose a portion of the seed layer; and selectively depositing a fill layer on the exposed seed layer.
    Type: Application
    Filed: September 29, 2010
    Publication date: March 29, 2012
    Inventors: Hans-Joachim BARTH, Gottfried BEER, Joern PLAGMANN, Jens POHL, Werner ROBL, Rainer STEINER, Mathias VAUPEL
  • Patent number: 7989930
    Abstract: A semiconductor package includes a leadframe defining a die pad, a chip electrically coupled to the die pad, encapsulation material covering the chip and the die pad, and a plurality of lead ends exposed relative to the encapsulation material and configured for electrical communication with the chip, and a nitrogen-containing hydrocarbon coating disposed over at least the lead ends of the leadframe, where the hydrocarbon coating is free of metal particles.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: August 2, 2011
    Assignee: Infineon Technologies AG
    Inventors: Edmund Riedl, Joachim Mahler, Johannes Lodermeyer, Mathias Vaupel, Steffen Jordan
  • Publication number: 20110101532
    Abstract: A method for fabricating a device includes providing a substrate including at least one contact and applying a dielectric layer over the substrate. The method includes applying a first seed layer over the dielectric layer, applying an inert layer over the seed layer, and structuring the inert layer, the first seed layer, and the dielectric layer to expose at least a portion of the contact. The method includes applying a second seed layer over exposed portions of the structured dielectric layer and the contact such that the second seed layer makes electrical contact with the structured first seed layer. The method includes electroplating a metal on the second seed layer.
    Type: Application
    Filed: November 3, 2009
    Publication date: May 5, 2011
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Jens Pohl, Hans-Joachim Barth, Gottfried Beer, Rainer Steiner, Werner Robl, Mathias Vaupel
  • Publication number: 20090108423
    Abstract: A semiconductor package includes a leadframe defining a die pad, a chip electrically coupled to the die pad, encapsulation material covering the chip and the die pad, and a plurality of lead ends exposed relative to the encapsulation material and configured for electrical communication with the chip, and a nitrogen-containing hydrocarbon coating disposed over at least the lead ends of the leadframe, where the hydrocarbon coating is free of metal particles.
    Type: Application
    Filed: October 25, 2007
    Publication date: April 30, 2009
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Edmund Riedl, Joachim Mahler, Johannes Lodermeyer, Mathias Vaupel, Steffen Jordan