Patents by Inventor Matthew M. Besen

Matthew M. Besen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11183356
    Abstract: A rotary anode unit includes a target formed of a first metal material and a target support body formed of a second metal material, formed in a flat plate shape, and having first and second surfaces. A thermal conductivity of the second metal material is higher than a thermal conductivity of the first metal material. A first recessed portion is formed in the first surface at the outer part of the target support body. The target is disposed in the first recessed portion. A second recessed portion configured to define a flow path for allowing a coolant to flow is formed in the second surface at the inner part of the target support body. A thickness of a first region where the first recessed portion is formed is larger than a thickness of a second region where the second recessed portion is formed.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: November 23, 2021
    Assignees: ENERGETIQ TECHNOLOGY, INC., HAMAMATSU PHOTONICS K.K.
    Inventors: Matthew M. Besen, Ryosuke Yabushita
  • Patent number: 11164713
    Abstract: An X-ray generation apparatus includes an electron gun configured to emit an electron beam, a rotary anode unit having a target generating an X-ray by receiving the electron beam and configured to rotate the target, a magnetic lens having a coil configured to generate a magnetic force acting on the electron beam between the electron gun and the target, and a wall portion disposed between the target and the coil so as to face the target. The wall portion is formed with an electron passage hole through which the electron beam passes and a flow path configured to allow a coolant to flow.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: November 2, 2021
    Assignees: ENERGETIQ TECHNOLOGY, INC., HAMAMATSU PHOTONICS K.K.
    Inventors: Matthew M. Besen, Ryosuke Yabushita
  • Publication number: 20210305003
    Abstract: An X-ray generation apparatus includes an electron gun configured to emit an electron beam, a rotary anode unit having a target generating an X-ray by receiving the electron beam and configured to rotate the target, a magnetic lens having a coil configured to generate a magnetic force acting on the electron beam between the electron gun and the target, and a wall portion disposed between the target and the coil so as to face the target. The wall portion is formed with an electron passage hole through which the electron beam passes and a flow path configured to allow a coolant to flow.
    Type: Application
    Filed: March 31, 2020
    Publication date: September 30, 2021
    Applicants: ENERGETIQ TECHNOLOGY, INC., HAMAMATSU PHOTONICS K.K.
    Inventors: Matthew M. BESEN, Ryosuke YABUSHITA
  • Publication number: 20210305004
    Abstract: A rotary anode unit includes a target formed of a first metal material and a target support body formed of a second metal material, formed in a flat plate shape, and having first and second surfaces. A thermal conductivity of the second metal material is higher than a thermal conductivity of the first metal material. A first recessed portion is formed in the first surface at the outer part of the target support body. The target is disposed in the first recessed portion. A second recessed portion configured to define a flow path for allowing a coolant to flow is formed in the second surface at the inner part of the target support body. A thickness of a first region where the first recessed portion is formed is larger than a thickness of a second region where the second recessed portion is formed.
    Type: Application
    Filed: March 31, 2020
    Publication date: September 30, 2021
    Applicants: ENERGETIQ TECHNOLOGY, INC., HAMAMATSU PHOTONICS K.K.
    Inventors: Matthew M. BESEN, Ryosuke YABUSHITA
  • Patent number: 8173986
    Abstract: Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
    Type: Grant
    Filed: July 30, 2010
    Date of Patent: May 8, 2012
    Assignee: Energetiq Technology, Inc.
    Inventors: William M. Holber, Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow
  • Patent number: 8143790
    Abstract: A method for producing light includes introducing an ionizable medium for generating a plasma into a chamber. The method also includes applying at least one pulse of energy to a magnetic core that surrounds a portion of a plasma discharge region within the chamber such that the magnetic core delivers power to the plasma which forms a secondary of a transformer according to Faraday's law of induction. The plasma has a localized high intensity zone.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: March 27, 2012
    Assignee: Energetiq Technology, Inc.
    Inventors: Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow
  • Publication number: 20110127450
    Abstract: Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
    Type: Application
    Filed: July 30, 2010
    Publication date: June 2, 2011
    Applicant: Energetiq Technology, Inc.
    Inventors: William M. Holber, Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow
  • Patent number: 7948185
    Abstract: An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region that forms a secondary circuit of a transformer. The plasma has a localized high intensity zone.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: May 24, 2011
    Assignee: Energetiq Technology Inc.
    Inventors: Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow, Ron Collins
  • Patent number: 7659489
    Abstract: Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
    Type: Grant
    Filed: March 12, 2007
    Date of Patent: February 9, 2010
    Assignee: MKS Instruments, Inc.
    Inventors: William M. Holber, Xing Chen, Andrew B. Cowe, Matthew M. Besen, Ronald W. Collins, Jr., Susan C. Trulli, Shouquian Shao
  • Patent number: 7569791
    Abstract: An electromagnetic radiation source includes a toroidal chamber that contains an ionizable medium. The electromagnetic radiation source also includes a magnetic core that surrounds a portion of the toroidal chamber. The electromagnetic radiation source also includes a pulse power system for providing pulses of energy to the magnetic core for delivering power to a plasma formed in the toroidal chamber to produce electromagnetic radiation that radiates radially through walls of the toroidal chamber.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: August 4, 2009
    Assignee: Energetiq Technology, Inc.
    Inventors: Donald K. Smith, Matthew M. Besen, Raghuram L. V. Petluri
  • Patent number: 7501600
    Abstract: Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
    Type: Grant
    Filed: February 15, 2005
    Date of Patent: March 10, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: William M. Holber, Xing Chen, Andrew B. Cowe, Matthew M. Besen, Ronald W. Collins, Jr., Susan C. Trulli, Shouqian Shao
  • Publication number: 20080183599
    Abstract: An inventory control and communication system provides automated real-time control of stock levels and ordering in a timely manner so that optimal stock levels are maintained. An inventory sensor that includes a storage unit, or bin, for each stock item or inventory object. One or more transducers are associated with each storage unit to produce a mass/weight signal indicative of the weight of the stock items stored in or at the corresponding storage unit. The signals are transmitted to a computer associated with the inventory sensor, which determines the weight and the number of the inventory objects present in the bin and provides this data as part of the inventory data associated with the inventory object. The inventory data is provided to a host computer that maintains information about the inventory sensor location and the corresponding stock item, such as item weight and supplier information.
    Type: Application
    Filed: January 4, 2008
    Publication date: July 31, 2008
    Applicant: VISIBLE INVENTORY, INC.
    Inventors: Gordon W. Hill, John D. Lloyd, Lawrence W. Hill, Matthew M. Besen
  • Patent number: 7307375
    Abstract: An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: December 11, 2007
    Assignee: Energetiq Technology Inc.
    Inventors: Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow
  • Patent number: 7238266
    Abstract: The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
    Type: Grant
    Filed: December 6, 2002
    Date of Patent: July 3, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Donald K. Smith, Matthew M. Besen, William M. Holber, Stephen F. Horne
  • Patent number: 7199384
    Abstract: An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: April 3, 2007
    Assignee: Energetiq Technology Inc.
    Inventors: Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow
  • Patent number: 7183717
    Abstract: An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
    Type: Grant
    Filed: July 9, 2004
    Date of Patent: February 27, 2007
    Assignee: Energetiq Technology Inc.
    Inventors: Donald K. Smith, Stephen F. Horne, Matthew M. Besen, Paul A. Blackborow
  • Patent number: 6872909
    Abstract: Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
    Type: Grant
    Filed: April 16, 2003
    Date of Patent: March 29, 2005
    Assignee: Applied Science and Technology, Inc.
    Inventors: William M. Holber, Xing Chen, Andrew B. Cowe, Matthew M. Besen, Ronald W. Collins, Jr., Susan C. Trulli, Shouqian Shao
  • Publication number: 20040246649
    Abstract: Solenoid devices that include magnetic field sensors and methods for operating the devices are described. A device includes a magnetic field generator that generates a magnetic flux that extends through a magnetic flux circuit member formed at least in part from a ferromagnetic material and defining a gap that is effectively free of any ferromagnetic material. A magnetic flux sensor is disposed to sense a portion of the magnetic flux that extends across the gap. A device can be implemented as a fluid flow control valve.
    Type: Application
    Filed: June 3, 2003
    Publication date: December 9, 2004
    Applicant: MKS Instruments, Inc.
    Inventor: Matthew M. Besen
  • Publication number: 20040217285
    Abstract: An ion storage system is described that includes an ion trap that defines a volume for storing a plurality of ions. A radio frequency (RF) generator is electromagnetically coupled to the volume defined by the ion trap. The RF generator generates an RF electrical field that stores the plurality of ions in the ion trap. A switching device terminates the RF electrical field, which ejects the plurality of ions from the ion trap. An ion detector detects at least a portion of the plurality of ions that are ejected from the ion trap.
    Type: Application
    Filed: May 27, 2004
    Publication date: November 4, 2004
    Inventors: Donald K. Smith, Stephen F. Horne, Matthew M. Besen
  • Publication number: 20040206730
    Abstract: Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
    Type: Application
    Filed: April 16, 2003
    Publication date: October 21, 2004
    Applicant: Applied Science & Technology
    Inventors: William M. Holber, Xing Chen, Andrew B. Cowe, Matthew M. Besen, Ronald W. Collins, Susan C. Trulli, Shouqian Shao