Abstract: A method of sustaining a plasma, by focusing a first wavelength of electromagnetic radiation into a gas within a volume, where the first wavelength is substantially absorbed by a first species of the gas and delivers energy into a first region of a plasma having a first size and a first temperature. A second wavelength of electromagnetic radiation is focused into the first region of the plasma, where the second wavelength is different than the first wavelength and is substantially absorbed by a second species of the gas and delivers energy into a second region of the plasma region within the first region of the plasma having a second size that is smaller than the first size and a second temperature that is greater than the first temperature.

Abstract: A laser-sustained plasma light source with a bulb for enclosing a relatively cool gas environment, and an electrode disposed at least partially within the gas environment. A power supply applies a potential to the electrode, where the power supply is sufficient to create a corona discharge at the electrode within the gas environment, and the power supply is not sufficient to produce an arc discharge within the gas environment. The corona discharge thereby produces a relatively heated gas environment. A pump laser source focuses a laser beam within the gas environment, where the laser beam is sufficient to ignite a plasma in the relatively heated gas environment, but is not sufficient to ignite a plasma in the relatively cool gas environment.

Abstract: An inspection system for creating images of a substrate. A light source directs an incident light onto the substrate, and a light source timing control controls a pulse timing of the incident light. A stage holds the substrate and moves the substrate under the incident light, so that the substrate reflects the incident light as a reflected light. A stage position sensor reports a position of the stage, and a stage position control controls the position of the stage. A time domain integration sensor receives the reflected light, and a time domain integration sensor timing control controls a line shift of the time domain integration sensor.

Abstract: A method of sustaining a plasma, by focusing a first wavelength of electromagnetic radiation into a gas within a volume, where the first wavelength is substantially absorbed by a first species of the gas and delivers energy into a first region of a plasma having a first size and a first temperature. A second wavelength of electromagnetic radiation is focused into the first region of the plasma, where the second wavelength is different than the first wavelength and is substantially absorbed by a second species of the gas and delivers energy into a second region of the plasma region within the first region of the plasma having a second size that is smaller than the first size and a second temperature that is greater than the first temperature.

Abstract: An inspection system for creating images of a substrate. A light source directs an incident light onto the substrate, and a light source timing control controls a pulse timing of the incident light. A stage holds the substrate and moves the substrate under the incident light, so that the substrate reflects the incident light as a reflected light. A stage position sensor reports a position of the stage, and a stage position control controls the position of the stage. A time domain integration sensor receives the reflected light, and a time domain integration sensor timing control controls a line shift of the time domain integration sensor.

Abstract: An optical system for imaging an array of light sources includes an array of microlenses disposed to intercept light from respective light sources in the array of light sources to reduce the divergence angles of light emanating from the light sources, a first array of lenses (sometimes referred to as minilenses), a second array of lenses (minilenses), and an additional array of microlenses disposed to intercept and focus light from the second array of lenses. Each lens in the first array is sized to intercept light from a respective sub-plurality of the microlenses, and each lens in the second array intercepts and focuses light from a respective lens in the first array. The first and second arrays of minilenses are preferably configured to define a doubly-telecentric imaging system.

Abstract: Optical systems are corrected for a variety of aberrations by a microlens array where an optical property of the individual microlenses varies as a function of position in the array. For example, the microlenses can be configured so that the focal length varies to correct field curvature. Representative environments for the microlens array may be characterized by a pixellated source (array of individual sources) in an object plane or a pixellated detector (array of individual detectors) in an image plane, or both.