Patents by Inventor Matthias Krantz

Matthias Krantz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100024865
    Abstract: A continuous coating installation is disclosed. The installation includes a vacuum chamber having a supply opening for supplying a substrate to be coated and a discharge opening for discharging the coated substrate. The installation also includes a physical vapour deposition device for coating a surface of the substrate, and a laser crystallization system for simultaneously illuminating at least one sub-partial area of a currently coated partial area of the surface of the substrate with at least one laser beam. The installation further includes a transport device for transporting the substrate in a feedthrough direction from the supply opening to the discharge opening and for continuously or discontinuously moving the substrate during the coating thereof in the feedthrough direction.
    Type: Application
    Filed: August 11, 2009
    Publication date: February 4, 2010
    Applicants: CARL ZEISS LASER OPTICS GMBH, CARL ZEISS SMT AG
    Inventors: Arvind Shah, Horst Schade, Holger Muenz, Martin Voelcker, Michael Schall, Matthias Krantz