Patents by Inventor Matthias S. Ober
Matthias S. Ober has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9527790Abstract: A bis(aryl)acetal has structure (1) wherein Ar1 and Ar2 are each independently an aryl or heteroaryl group. R1 and R2 are each independently hydrogen, or an alkyl, cycloalkyl, aryl, or heteroaryl group, and R1 and R2 can connect directly with each other. Y is a leaving group or a boron-containing functional group bonded to Ar2 via a boron atom. The bis(aryl)acetal is useful as a monomer that can be polymerized to yield a polymer with an acid-sensitive backbone.Type: GrantFiled: August 18, 2015Date of Patent: December 27, 2016Assignee: DOW GLOBAL TECHNOLOGIES LLCInventors: Matthias S. Ober, Patrick Hanley
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Patent number: 9422375Abstract: Provided is a non-cyclopentadienyl-based chromium-ligand complex, preferably a chromium-ligand complex of formula (J): LCr(RA)m(D)k (J), wherein L is a non-Cp monoanionic ligand; Cr (chromium) is in a formal oxidation state of +3 or +2; when Cr formally is Cr+3, either m is 1 and RA is hydrocarbylene (a hydrocarbylene chromium-ligand complex of formula (J)) or m is 2 and each RA independently is hydrocarbyl (a dihydrocarbyl chromium-ligand complex of formula (J)), wherein each hydrocarbyl or hydrocarbylene of RA independently is unsubstituted or substituted by from 1 to 5 RAS; each RAS independently is a neutral aprotic heteroalkyl, neutral aprotic heterocycloalkyl, neutral aprotic heteroaryl, or neutral aprotic aryl; when Cr formally is Cr+2, m is 1 and RA is hydrocarbyl (a hydrocarbyl chromium-ligand complex of formula (J)); k is an integer of 0 or 1; D is absent when k is 0 or D is a neutral ligand when k is 1; wherein the chromium-ligand complex of formula (J) is overall neutral and lacks a cyclopentadienType: GrantFiled: November 3, 2015Date of Patent: August 23, 2016Inventors: Matthew D. Christianson, Timothy S. De Vries, Robert D J Froese, Matthias S. Ober, Jasson T. Patton, Duane R. Romer, Gordon R. Roof, Lixin Sun, Endre Szuromi, Curt N. Theriault, Dean M. Welsh, Timothy T. Wenzel, Paul H. Moran
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Patent number: 9410016Abstract: A polymer includes repeat units having the structure wherein R1, R2, Ar1, Ar2, and Ar3 are defined herein. The polymer can be prepared by Suzuki polycondensation. The acetal and/or ketal functionality in the polymer backbone make the backbone-cleavable in acid. The polymer is useful in applications including lithographic photoresists.Type: GrantFiled: July 16, 2013Date of Patent: August 9, 2016Assignee: DOW GLOBAL TECHNOLOGIES LLCInventors: Matthias S. Ober, Duane R. Romer, John B. Etienne, Pulikkottil J. Thomas
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Patent number: 9296836Abstract: Provided is a non-cyclopentadienyl-based chromium-ligand complex, preferably a chromium-ligand complex of formula (J): LCr(RA)m(D)k (J), wherein L is a non-Cp monoanionic ligand; Cr (chromium) is in a formal oxidation state of +3 or +2; when Cr formally is Cr+3, either m is 1 and RA is hydrocarbylene (a hydrocarbylene chromium-ligand complex of formula (J)) or m is 2 and each RA independently is hydrocarbyl (a dihydrocarbyl chromium-ligand complex of formula (J)), wherein each hydrocarbyl or hydrocarbylene of RA independently is unsubstituted or substituted by from 1 to 5 RAS; each RAS independently is a neutral aprotic heteroalkyl, neutral aprotic heterocycloalkyl, neutral aprotic heteroaryl, or neutral aprotic aryl; when Cr formally is Cr+2, m is 1 and RA is hydrocarbyl (a hydrocarbyl chromium-ligand complex of formula (J)); k is an integer of 0 or 1; D is absent when k is 0 or D is a neutral ligand when k is 1; wherein the chromium-ligand complex of formula (J) is overall neutral and lacks a cyclopentadienType: GrantFiled: May 11, 2012Date of Patent: March 29, 2016Inventors: Matthew D. Christianson, Timothy S. De Vries, Robert D. Froese, Matthias S. Ober, Jasson T. Patton, Duane R. Romer, Gordon R. Roof, Lixin Sun, Endre Szuromi, Curt N. Theriault, Dean M. Welsh, Timothy T. Wenzel, Paul H. Moran
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Publication number: 20160053031Abstract: Provided is a non-cyclopentadienyl-based chromium-ligand complex, preferably a chromium-ligand complex of formula (J): LCr(RA)m(D)k (J), wherein L is a non-Cp monoanionic ligand; Cr (chromium) is in a formal oxidation state of +3 or +2; when Cr formally is Cr+3, either m is 1 and RA is hydrocarbylene (a hydrocarbylene chromium-ligand complex of formula (J)) or m is 2 and each RA independently is hydrocarbyl (a dihydrocarbyl chromium-ligand complex of formula (J)), wherein each hydrocarbyl or hydrocarbylene of RA independently is unsubstituted or substituted by from 1 to 5 RAS; each RAS independently is a neutral aprotic heteroalkyl, neutral aprotic heterocycloalkyl, neutral aprotic heteroaryl, or neutral aprotic aryl; when Cr formally is Cr+2, m is 1 and RA is hydrocarbyl (a hydrocarbyl chromium-ligand complex of formula (J)); k is an integer of 0 or 1; D is absent when k is 0 or D is a neutral ligand when k is 1; wherein the chromium-ligand complex of formula (J) is overall neutral and lacks a cyclopentadienType: ApplicationFiled: November 3, 2015Publication date: February 25, 2016Inventors: Matthew D. Christianson, Timothy S. De Vries, Robert DJ Froese, Matthias S. Ober, Jasson T. Patton, Duane R. Romer, Gordon R. Roof, Lixin Sun, Endre Szuromi, Curt N. Theriault, Dean M. Welsh, Timothy T. Wenzel, Paul H. Moran
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Patent number: 9246108Abstract: The invention provides a composition comprising at least one compound selected from the following Formulas A, B1, B2, B3, B4 or C: or a combination thereof (C). For each formula, the R groups are described herein.Type: GrantFiled: March 14, 2013Date of Patent: January 26, 2016Assignee: Dow Global Technologies LLCInventors: Matthias S. Ober, Robert D. Froese
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Patent number: 9063420Abstract: A photoresist composition includes a polymer with repeat units having the structure wherein each occurrence of R1 and R2 is independently hydrogen, unsubstituted or substituted C1-18 linear or branched alkyl, unsubstituted or substituted C3-18 cycloalkyl, unsubstituted or substituted C6-18 aryl, or unsubstituted or substituted C3-18 heteroaryl; and R1 and R2 are optionally covalently linked to each other to form a ring that includes —R1—C—R2—; each occurrence of Ar1, Ar2, and Ar3 is independently an unsubstituted or substituted C6-18 arylene, or unsubstituted or substituted C3-18 heteroarylene. In addition to the polymer, the photoresist composition includes a photoactive component selected from photoacid generators, photobase generators, photoinitiators, and combinations thereof.Type: GrantFiled: July 16, 2013Date of Patent: June 23, 2015Assignees: ROHM AND HAAS ELECTRONIC MATERIALS LLC, DOW GLOBAL TECHNOLOGIES LLCInventors: Matthias S. Ober, Vipul Jain, John B. Etienne
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Publication number: 20150148502Abstract: Provided is a non-cyclopentadienyl-based chromium-ligand complex, preferably a chromium-ligand complex of formula (J): LCr(RA)m(D)k (J), wherein L is a non-Cp monoanionic ligand; Cr (chromium) is in a formal oxidation state of +3 or +2; when Cr formally is Cr+3, either m is 1 and RA is hydrocarbylene (a hydrocarbylene chromium-ligand complex of formula (J)) or m is 2 and each RA independently is hydrocarbyl (a dihydrocarbyl chromium-ligand complex of formula (J)), wherein each hydrocarbyl or hydrocarbylene of RA independently is unsubstituted or substituted by from 1 to 5 RAS; each RAS independently is a neutral aprotic heteroalkyl, neutral aprotic heterocycloalkyl, neutral aprotic heteroaryl, or neutral aprotic aryl; when Cr formally is Cr+2, m is 1 and RA is hydrocarbyl (a hydrocarbyl chromium-ligand complex of formula (J)); k is an integer of 0 or 1; D is absent when k is 0 or D is a neutral ligand when k is 1; wherein the chromium-ligand complex of formula (J) is overall neutral and lacks a cyclopentadienType: ApplicationFiled: May 11, 2012Publication date: May 28, 2015Applicant: DOW GLOBAL TECHNOLOGIES LLCInventors: Matthew D. Christianson, Timothy S. De Vries, Robert D. Froese, Matthias S. Ober, Jasson T. Patton, Duane R. Romer, Gordon R. Roof, Lixin Sun, Endre Szuromi, Curt N. Theriault, Dean M. Welsh, Timothy T. Wenzel, Paul H. Moran
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Patent number: 8962779Abstract: In a method of forming a polyacetal or polyketal, a specific acetal- or ketal-containing bis(aryl)acetal is coupled with itself or a comonomer in the presence of a catalyst and a base. The polymerization reaction tolerates hydroxyl and other functional groups on the bis(aryl)acetal. Among other applications, the polyacetals and polyketals are useful components of photoresist compositions.Type: GrantFiled: July 16, 2013Date of Patent: February 24, 2015Assignee: Dow Global Technologies LLCInventor: Matthias S. Ober
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Publication number: 20150031847Abstract: In a method of forming a polyacetal or polyketal, a specific acetal- or ketal-containing bis(aryl)acetal is coupled with itself or a comonomer in the presence of a catalyst and a base. The polymerization reaction tolerates hydroxyl and other functional groups on the bis(aryl)acetal. Among other applications, the polyacetals and polyketals are useful components of photoresist compositions.Type: ApplicationFiled: July 16, 2013Publication date: January 29, 2015Inventor: Matthias S. OBER
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Publication number: 20150025278Abstract: A polymer includes repeat units having the structure wherein R1, R2, Ar1, Ar2, and Ar3 are defined herein. The polymer can be prepared by Suzuki polycondensation. The acetal and/or ketal functionality in the polymer backbone make the backbone-cleavable in acid. The polymer is useful in applications including lithographic photoresists.Type: ApplicationFiled: July 16, 2013Publication date: January 22, 2015Inventors: Matthias S. OBER, Duane R. ROMER, John B. ETIENNE, Pulikkottil J. THOMAS
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Publication number: 20150025262Abstract: A bis(aryl)acetal has the formula wherein Y1 and Y2 are each independently chloro, bromo, iodo, mesylate, tosylate, triflate, or Bx, provided that Y1 and Y2 are not both selected from chloro, bromo, and iodo; each occurrence of Bx is independently a boron-containing functional group bonded to Ar1 or Ar2 via a boron atom; Ar1 and Ar2 are each independently unsubstituted or substituted C6-18 arylene, or unsubstituted or substituted C3-18 heteroarylene; provided that Ar1 and Ar2 are not covalently linked to each other to form a ring structure that includes -Ar1-O—C—O-Ar2-; and R1 and R2 are each independently hydrogen, unsubstituted or substituted C1-18 linear or branched alkyl, unsubstituted or substituted C3-20 cycloalkyl, unsubstituted or substituted C6-18 aryl, or unsubstituted or substituted C3-20 heteroaryl. The bis(aryl)acetal is useful as a monomer for oligoacetal and polyacetal synthesis via Suzuki polycondensation.Type: ApplicationFiled: July 16, 2013Publication date: January 22, 2015Inventors: Matthias S. OBER, Duane R. ROMER, John B. ETIENNE, Pulikkottil J. THOMAS
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Publication number: 20150021289Abstract: A photoresist composition includes a polymer with repeat units having the structure wherein each occurrence of R1 and R2 is independently hydrogen, unsubstituted or substituted C1-18 linear or branched alkyl, unsubstituted or substituted C3-18 cycloalkyl, unsubstituted or substituted C6-18 aryl, or unsubstituted or substituted C3-18 heteroaryl; and R1 and R2 are optionally covalently linked to each other to form a ring that includes —R1—C—R2—; each occurrence of Ar1, Ar2, and Ar3 is independently an unsubstituted or substituted C6-18 arylene, or unsubstituted or substituted C3-18 heteroarylene. In addition to the polymer, the photoresist composition includes a photoactive component selected from photoacid generators, photobase generators, photoinitiators, and combinations thereof.Type: ApplicationFiled: July 16, 2013Publication date: January 22, 2015Inventors: Matthias S. OBER, Vipul JAIN, John B. ETIENNE
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Patent number: 8933239Abstract: A bis(aryl)acetal has the formula wherein Y1 and Y2 are each independently chloro, bromo, iodo, mesylate, tosylate, triflate, or Bx, provided that Y1 and Y2 are not both selected from chloro, bromo, and iodo; each occurrence of Bx is independently a boron-containing functional group bonded to Ar1 or Ar2 via a boron atom; Ar1 and Ar2 are each independently unsubstituted or substituted C6-18 arylene, or unsubstituted or substituted C3-18 heteroarylene; provided that Ar1 and Ar2 are not covalently linked to each other to form a ring structure that includes —Ar1—O—C—O—Ar2—; and R1 and R2 are each independently hydrogen, unsubstituted or substituted C1-18 linear or branched alkyl, unsubstituted or substituted C3-20 cycloalkyl, unsubstituted or substituted C6-18 aryl, or unsubstituted or substituted C3-20 heteroaryl. The bis(aryl)acetal is useful as a monomer for oligoacetal and polyacetal synthesis via Suzuki polycondensation.Type: GrantFiled: July 16, 2013Date of Patent: January 13, 2015Assignee: Dow Global Technologies LLCInventors: Matthias S. Ober, Duane R. Romer, John B. Etienne, Pulikkottil J. Thomas
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Patent number: 8771917Abstract: Provided are (meth)acrylate monomers containing acetal moieties, polymers containing a unit formed from such a monomer and photoresist compositions containing such a polymer. The monomers, polymers and photoresist compositions are useful in forming photolithographic patterns. Also provided are substrates coated with the photoresist compositions, methods of forming photolithographic patterns and electronic devices. The compositions, methods and coated substrates find particular applicability in the manufacture of semiconductor devices.Type: GrantFiled: December 31, 2011Date of Patent: July 8, 2014Assignees: Rohm and Haas Electronics Materials LLC, Dow Global Technologies LLCInventors: Matthias S. Ober, Young Cheol Bae, Yi Liu, Seung-Hyun Lee, Jong Keun Park
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Publication number: 20140183413Abstract: The invention provides a composition comprising at least one compound selected from the following Formulas A, B1, B2, B3, B4 or C: or a combination thereof (C). For each formula, the R groups are described herein.Type: ApplicationFiled: March 14, 2013Publication date: July 3, 2014Applicant: Dow Global Technologies LLCInventors: Matthias S. Ober, Robert D. Froese
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Patent number: 8641816Abstract: Provided are new functionalized surfactants and methods of their preparation and use. The surfactants are compounds of formula I: wherein R1, R2, and R3 are as defined herein.Type: GrantFiled: October 21, 2010Date of Patent: February 4, 2014Assignee: Dow Global Technologies LLCInventors: Matthias S. Ober, Edward D. Daugs, Wanglin Yu, Cynthia L. Rand
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Patent number: 8513462Abstract: The invention disclosed in this document is related to field of pesticides and their use in controlling pests. In particular compounds having the following formula are disclosed.Type: GrantFiled: September 10, 2012Date of Patent: August 20, 2013Assignee: Dow AgroSciences LLCInventors: Benjamin M. Nugent, Ann M. Buysse, Jonathan M. Babcock, Matthias S. Ober, Timothy P. Martin
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Patent number: 8445689Abstract: Compounds having the following generic formula are disclosed.Type: GrantFiled: April 11, 2012Date of Patent: May 21, 2013Assignee: Dow AgroSciences, LLC.Inventors: Nneka T. Breaux, Michael R. Loso, Timothy C. Johnson, Jonathan M. Babcock, Benjamin M. Nugent, Timothy P. Martin, Annette Vitale Brown, Ronald Ross, Jr., William C. Lo, Matthias S. Ober
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Publication number: 20130011783Abstract: Provided are (meth)acrylate monomers containing acetal moieties, polymers containing a unit formed from such a monomer and photoresist compositions containing such a polymer. The monomers, polymers and photoresist compositions are useful in forming photolithographic patterns. Also provided are substrates coated with the photoresist compositions, methods of forming photolithographic patterns and electronic devices. The compositions, methods and coated substrates find particular applicability in the manufacture of semiconductor devices.Type: ApplicationFiled: December 31, 2011Publication date: January 10, 2013Applicants: Dow Global Technologies LLC, Rohm and Haas Electronic Materials LLCInventors: Matthias S. Ober, Young Cheol Bae, Yi Liu, Seung-Hyun Lee, Jong Keun Park