Patents by Inventor Matthieu MILLEQUANT

Matthieu MILLEQUANT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of reducing shot count in direct writing by a particle or photon beam
    Patent number: 10197909
    Abstract: A method for transferring a fractured pattern decomposed into elementary shapes, onto a substrate by direct writing by a particle or photon beam, comprises a step of identifying at least one elementary shape of the fractured pattern, called removable elementary shape, whose removal induces modifications of the transferred pattern within a preset tolerance envelope; a step of removing the removable shape or shapes from the fractured pattern to obtain a modified fractured pattern; and an exposure step, comprising exposing the substrate to a plurality of shots of a shaped particle or photon beam, each shot corresponding to an elementary shape of the modified fractured pattern. A computer program product for carrying out such a method is provided.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: February 5, 2019
    Inventors: Luc Martin, Thomas Quaglio, Matthieu Millequant, Clyde Browning, Serdar Manakli
  • METHOD OF REDUCING SHOT COUNT IN DIRECT WRITING BY A PARTICLE OR PHOTON BEAM
    Publication number: 20170097571
    Abstract: A method for transferring a fractured pattern decomposed into elementary shapes, onto a substrate by direct writing by a particle or photon beam, comprises a step of identifying at least one elementary shape of the fractured pattern, called removable elementary shape, whose removal induces modifications of the transferred pattern within a preset tolerance envelope; a step of removing the removable shape or shapes from the fractured pattern to obtain a modified fractured pattern; and an exposure step, comprising exposing the substrate to a plurality of shots of a shaped particle or photon beam, each shot corresponding to an elementary shape of the modified fractured pattern. A computer program product for carrying out such a method is provided.
    Type: Application
    Filed: October 5, 2016
    Publication date: April 6, 2017
    Inventors: Luc MARTIN, Thomas QUAGLIO, Matthieu MILLEQUANT, Clyde BROWNING, Serdar MANAKLI