Abstract: A data acquisition apparatus includes a light source, a first beam splitter, a predetermined beam splitter, a first light deflector, a second light deflector, a first measuring unit, a second measuring unit, a second beam splitter, and a photodetector. A second measurement optical path is positioned in a first direction and a reference optical path is positioned in a second direction. The predetermined beam splitter is disposed in the second measurement optical path or the reference optical path. A first measurement optical path is positioned between the predetermined beam splitter and the photodetector. The first light deflector and the first measuring unit are disposed in the first measurement optical path, and the second light deflector and the second measuring unit are disposed in the second measurement optical path. The first measurement optical path and the second measurement optical path intersect.

Abstract: An image pickup apparatus includes a signal acquisition unit and a rotation unit. The signal acquisition unit includes an illumination unit including a light source and configured to irradiate a sample with a light beam, a photodetector including a plurality of light-receiving portions two-dimensionally arranged, and a detection optical system configured to guide light having been irradiated from the illumination unit to the sample and passed through the sample, to the photodetector. The rotation unit rotates the sample and the signal acquisition unit relative to each other, about a first axis intersecting an optical axis of the detection optical system in the sample. The illumination unit irradiates the sample with light beams at two or more incident angles in a plane including the optical axis and the first axis.

Abstract: A sample structure measuring device includes a light source, a path splitting portion configured to split light from the light source into light on a measurement path passing through a sample and light on a reference path, an optical path merging portion configured to merge the measurement path and the reference path, a photodetector having pixels and configured to detect incident light from the path merging portion and output phase data of the incident light, and a processor. A first region is a region where the sample is present and a second region is a region where the sample is not present. The processor divides the phase data into the first region and the second region, sets an initial estimated sample structure based on the first region, and optimizes the estimated sample structure using simulated light transmitted through the estimated sample structure and measurement light transmitted through the sample.

Abstract: A sample observation device includes a light source, an illumination optical system, an observation optical system, a detector, a processor, and a drive controller. The illumination optical system includes a condenser lens and an aperture, and the observation optical system includes an objective lens and a light attenuation member. The light attenuation member and the aperture are conjugate. The aperture includes an aperture region, and the light attenuation member includes a light attenuation region. A size of the aperture region, a position of the aperture region, a size of the light attenuation region, and a position of the light attenuation region are set such that a predetermined state is generated. The processor determines light quantity of light received with the detector. The drive controller changes an interval between a sample and the objective lens on the basis of the light quantity such that the light quantity becomes minimum.

Abstract: An image pickup apparatus includes a signal acquisition unit and a rotation unit. The signal acquisition unit includes an illumination unit including a light source and configured to irradiate a sample with a light beam, a photodetector including a plurality of light-receiving portions two-dimensionally arranged, and a detection optical system configured to guide light having been irradiated from the illumination unit to the sample and passed through the sample, to the photodetector. The rotation unit rotates the sample and the signal acquisition unit relative to each other, about a first axis intersecting an optical axis of the detection optical system in the sample. The illumination unit irradiates the sample with light beams at two or more incident angles in a plane including the optical axis and the first axis.

Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.

Abstract: A data acquisition apparatus includes a light source, a first beam splitter, a predetermined beam splitter, a first light deflector, a second light deflector, a first measuring unit, a second measuring unit, a second beam splitter, and a photodetector. A second measurement optical path is positioned in a first direction and a reference optical path is positioned in a second direction. The predetermined beam splitter is disposed in the second measurement optical path or the reference optical path. A first measurement optical path is positioned between the predetermined beam splitter and the photodetector. The first light deflector and the first measuring unit are disposed in the first measurement optical path, and the second light deflector and the second measuring unit are disposed in the second measurement optical path. The first measurement optical path and the second measurement optical path intersect.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A sample observation device includes a light source, an illumination optical system, an observation optical system, a detector, a processor, and a drive controller. The illumination optical system includes a condenser lens and an aperture, and the observation optical system includes an objective lens and a light attenuation member. The light attenuation member and the aperture are conjugate. The aperture includes an aperture region, and the light attenuation member includes a light attenuation region. A size of the aperture region, a position of the aperture region, a size of the light attenuation region, and a position of the light attenuation region are set such that a predetermined state is generated. The processor determines light quantity of light received with the detector. The drive controller changes an interval between a sample and the objective lens on the basis of the light quantity such that the light quantity becomes minimum.

Abstract: A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.

Abstract: A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.