Abstract: A microfluidic pump driven by thermoacoustic effect is mainly composed of a thermoacoustic device, a fluid-storing tank, and at least one microchannel, etc., wherein the thermoacoustic device may convert thermal energy into acoustic energy. Pressure fluctuation and velocity fluctuation with high frequency are generated by the acoustic wave. According to the high amplitude pressure fluctuation, the microfluid with high moving velocity emitted through microchannels. Since there is no movable part arranged in the thermo-acoustic generator. In the meantime, it indirectly drives the working fluid located in the fluid-storing tank by the manner of indirect contact. So the present invention may be applied in the non-conductive fluid so as to greatly extend its field of application. Moreover, the characteristics of the fluid won't be influenced by the heating process as well. The present invention is indeed a microfluid-driving device that has inventiveness and high application value.

Abstract: A microfluidic pump driven by thermoacoustic effect is mainly composed of a thermoacoustic device, a fluid-storing tank, and at least one microchannel, etc., wherein the thermoacoustic device may convert thermal energy into acoustic energy. Pressure fluctuation and velocity fluctuation with high frequency are generated by the acoustic wave. According to the high amplitude pressure fluctuation, the microfluid with high moving velocity emitted through microchannels. Since there is no movable part arranged in the thermo-acoustic generator. In the meantime, it indirectly drives the working fluid located in the fluid-storing tank by the manner of indirect contact. So the present invention may be applied in the non-conductive fluid so as to greatly extend its field of application. Moreover, the characteristics of the fluid won't be influenced by the heating process as well. The present invention is indeed a microfluid-driving device that has inventiveness and high application value.

Abstract: An airflow feedback control method and apparatus for fan filter unit (FFU) is proposed, which is designed for use with a fan filter unit that is widely used in semiconductor fabrication factories for dust-clearing purpose, for controlling the fan filter unit to generate a constant amount of airflow equal to a preset desired amount. The proposed FFU airflow feedback control method and apparatus is characterized by that it utilizes bell inlet as an airflow measuring nozzle and that airflow is used as feedback parameter to control the FFU, rather than utilizing motor speed as feedback parameter by prior art. This feature allows the fan filter unit to continuously generate a fixed amount of airflow equal to the preset desired amount even if there is a pressure change at the site of installation, thus lessening the problems of insufficient air change rate and sideward-going airflows.

Abstract: An airflow feedback control method and apparatus for fan filter unit (FFU) is proposed, which is designed for use with a fan filter unit that is widely used in semiconductor fabrication factories for dust-clearing purpose, for controlling the fan filter unit to generate a constant amount of airflow equal to a preset desired amount. The proposed FFU airflow feedback control method and apparatus is characterized by that it utilizes bell inlet as an airflow measuring nozzle and that airflow is used as feedback parameter to control the FFU, rather than utilizing motor speed as feedback parameter by prior art. This feature allows the fan filter unit to continuously generate a fixed amount of airflow equal to the preset desired amount even if there is a pressure change at the site of installation, thus lessening the problems of insufficient air change rate and sideward-going airflows.