Patents by Inventor Mehrdad Mahmud Moslehi

Mehrdad Mahmud Moslehi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer
    Patent number: 5741070
    Abstract: A sensor (100) for measuring semiconductor wafer (10) temperature in semiconductor processing equipment (30), comprising a first laser (104) to provide a first laser beam at a first wavelength and a second laser (106) to provide a second laser beam at a second wavelength. The sensor also includes a laser driver (108) and an oscillator (110) to modulate the wavelength of the first and second laser beams as the laser beams are directed to and reflected from the wafer (10), and a detector module (130) to measure the change in specular reflectance of the wafer (10) resulting from the modulation of the wavelength of the first and second laser beams.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: April 21, 1998
    Assignee: Texas Instruments Incorporated
    Inventor: Mehrdad Mahmud Moslehi