Patents by Inventor Mehrnaz Youssefi

Mehrnaz Youssefi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slotted MEMS force sensor
    Patent number: 10962427
    Abstract: Described herein is a MEMS force sensor with stress concentration design. The stress concentration can be performed by providing slots, whether through or blind, and/or selective thinning of the substrate. The MEMS force sensor is in chip scale package with solder bumps or metal pillars and there are sensing elements formed on the sensor substrate at the stress concentrate area. The stress concentration can be realized through slots, selective thinning and a combination of both.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: March 30, 2021
    Assignee: NextInput, Inc.
    Inventors: Mehrnaz Youssefi, Julius Minglin Tsai
  • SLOTTED MEMS FORCE SENSOR
    Publication number: 20200225100
    Abstract: Described herein is a MEMS force sensor with stress concentration design. The stress concentration can be performed by providing slots, whether through or blind, and/or selective thinning of the substrate. The MEMS force sensor is in chip scale package with solder bumps or metal pillars and there are sensing elements formed on the sensor substrate at the stress concentrate area. The stress concentration can be realized through slots, selective thinning and a combination of both.
    Type: Application
    Filed: January 10, 2020
    Publication date: July 16, 2020
    Inventors: Mehrnaz Youssefi, Julius Minglin Tsai