Patents by Inventor Mei-Hui Tsai

Mei-Hui Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11145521
    Abstract: A method for cleaning a semiconductor substrate is provided. The method includes the steps of: applying a first agent onto a top surface of the semiconductor substrate while the semiconductor substrate is rotated at a first rotational frequency; immersing the semiconductor substrate in a second agent while rotating the semiconductor substrate at a second rotational frequency; and rotating the semiconductor substrate at a third rotational frequency while a third agent is introduced onto the top surface of the semiconductor substrate. The first rotational frequency may be greater than the third rotational frequency and the third rotational frequency is greater than the second rotational frequency. In some embodiments, the second rotational frequency is zero and the semiconductor substrate is held stationary during the immersing step.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: October 12, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mei Hui Tsai, Hsiao-Yi Wang, Yen-Min Liao, Po-Sheng Lu
  • Publication number: 20190096707
    Abstract: A method for cleaning a semiconductor substrate is provided. The method includes the steps of: applying a first agent onto a top surface of the semiconductor substrate while the semiconductor substrate is rotated at a first rotational frequency; immersing the semiconductor substrate in a second agent while rotating the semiconductor substrate at a second rotational frequency; and rotating the semiconductor substrate at a third rotational frequency while a third agent is introduced onto the top surface of the semiconductor substrate. The first rotational frequency may be greater than the third rotational frequency and the third rotational frequency is greater than the second rotational frequency. In some embodiments, the second rotational frequency is zero and the semiconductor substrate is held stationary during the immersing step.
    Type: Application
    Filed: September 28, 2017
    Publication date: March 28, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Mei Hui TSAI, Hsiao-Yi WANG, Yen-Min LIAO, Po-Sheng LU
  • Publication number: 20150315387
    Abstract: The present invention provides a polymer and graphene blended electroactive composite coating material and method for preparing the same. The composite coating material is a composite material formed by blending a specific polymer and graphene; where the specific polymer is formed by polymerization of (A) aniline oligomer and (B) amino reactive monomer together with (C) modified graphene and is a kind of polymer selected by the group consisting of the following: epoxy resin, polyimide, polyamide, polyurethane, polylactic acid; (C) modified graphene is uniformly dispersed in the matrix of the specific polymer but not involved in polymerization; and the composite coating material is electroactive.
    Type: Application
    Filed: June 3, 2014
    Publication date: November 5, 2015
    Applicant: CHUNG YUAN CHRISTIAN UNIVERSITY
    Inventors: Jui-Ming Yeh, Kung-Chin Chang, Chien-Hua Hsu, Wei-Fu Ji, Hsin-I Lu, Chi-Hao Chang, Wei-Yi Li, Tsao-Li Chuang, Wei-Ren Liu, Mei-Hui Tsai
  • Publication number: 20150282972
    Abstract: A multifunctional massage joint protector, comprising an elastic piece body, a palm-shaped and a low-frequency massage part. The elastic piece body is used for coating and fixed on a human joint, the palm-shaped coating part coats the periphery of the human joint, and the low-frequency massage part is adjacent to the palm-shaped coating part and arranged on the elastic piece body. The joint protector, on one hand, uses the palm shape of the palm-shaped coating part to locate the human joint, in order to avoid the problem of shifting of the protector due to detachment when the human joint moves, and uses the low-frequency massage part to enhance the effect of the kneading and massaging, and on the other hand, coats the human joint by means of the palm-shaped coating part and the massage possesses a tactile sensation, thereby improving the use value of the protector.
    Type: Application
    Filed: December 19, 2012
    Publication date: October 8, 2015
    Applicant: FUNCARE OF TAIWAN CO., LTD.
    Inventor: Mei-Hui Tsai
  • Patent number: 8992873
    Abstract: The present invention provides a method of producing hollow silica particles. First, an amine-ketimine compound is mixed with water to obtain a hydrophobic core dispersion, and then an organic siloxane compound and/or a coupling reagent is added into the hydrophobic core dispersion to form a core-shell silica dispersion. Then, the core-shell silica precipitate is separated from the core-shell silica dispersion, and then it is further dispersed and washed by a low carbon alcohol solution. Finally, hollow silica particles in accordance with the present invention are produced. In addition, the present invention also provides hollow silica particles produced by the afore-mentioned method without using any additional surfactant.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: March 31, 2015
    Assignee: National Chin-Yi University of Technology
    Inventors: Hsu-Tung Lu, Mei-Hui Tsai, I-Hsiang Tseng, Shih-Liang Huang
  • Publication number: 20130244032
    Abstract: The present invention provides a method of producing hollow silica particles. First, an amine-ketimine compound is mixed with water to obtain a hydrophobic core dispersion, and then an organic siloxane compound and/or a coupling reagent is added into the hydrophobic core dispersion to form a core-shell silica dispersion. Then, the core-shell silica precipitate is separated from the core-shell silica dispersion, and then it is further dispersed and washed by a low carbon alcohol solution. Finally, hollow silica particles in accordance with the present invention are produced. In addition, the present invention also provides hollow silica particles produced by the afore-mentioned method without using any additional surfactant.
    Type: Application
    Filed: March 13, 2012
    Publication date: September 19, 2013
    Applicant: National Chin-Yi University of Technology
    Inventors: Hsu-Tung Lu, Mei-Hui Tsai, I-Hsiang Tseng, Shih-Liang Huang