Patents by Inventor Mei Fang Shen

Mei Fang Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Edge fragment correlation determination for optical proximity correction
    Patent number: 8539391
    Abstract: Aspects of the invention relate to techniques for determining edge fragment correlation information. With various implementations of the invention, image intensity slope information for edge fragments in a layout design is determined. The image intensity slope information comprises information describing how image intensity for each of the edge fragments changes with its position. Image amplitude sensitivity information for the edge fragments is also determined. The image amplitude sensitivity information comprises information describing how image amplitude for each of the edge fragments changes with positions of neighboring edge fragments. Based on the image intensity slope information and the image amplitude sensitivity information, edge fragment correlation information for the edge fragments is determined. Using the edge fragment correlation information, the layout design may be processed by using, for example, OPC techniques.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: September 17, 2013
    Assignee: Mentor Graphics Corporation
    Inventors: Junjiang Lei, Le Hong, Mei-Fang Shen, YiNing Pan
  • EDGE FRAGMENT CORRELATION DETERMINATION FOR OPTICAL PROXIMITY CORRECTION
    Publication number: 20130198698
    Abstract: Aspects of the invention relate to techniques for determining edge fragment correlation information. With various implementations of the invention, image intensity slope information for edge fragments in a layout design is determined. The image intensity slope information comprises information describing how image intensity for each of the edge fragments changes with its position. Image amplitude sensitivity information for the edge fragments is also determined. The image amplitude sensitivity information comprises information describing how image amplitude for each of the edge fragments changes with positions of neighboring edge fragments. Based on the image intensity slope information and the image amplitude sensitivity information, edge fragment correlation information for the edge fragments is determined. Using the edge fragment correlation information, the layout design may be processed by using, for example, OPC techniques.
    Type: Application
    Filed: January 31, 2012
    Publication date: August 1, 2013
    Inventors: Junjiang Lei, Le Hong, Mei Fang Shen, Yi Ning Pan