Abstract: The disclosure herein provides a device, a method and a computer-readable storage medium for quantitative phase imaging, and relates to the field of quantitative phase imaging. The specific implementation scheme is: Obtain a multiplexed interferogram of the sample, where the multiplexed interferogram is a sample beam composed of at least two beams with different wavelengths to illuminate the sample and penetrate into the cube beam splitter Combine at least two beams with different wavelengths as the reference beam, and the combined beam is the imaging image sampled by the camera; and perform phase retrieval on the multiplexed interference image to obtain each beam of the sample in the composite sample beam The phase map at the wavelength of Using the embodiments of the disclosure herein, one imaging acquisition and one phase retrieval are to acquire the phase maps of at least two wavelength channels.

Abstract: A quantitative phase microscopy (QPM) system and methods are provided for sample imaging and metrology in both transmissive and reflective modes. The QPM system includes a first illuminating beam propagating along a transmission-mode path and a second illuminating beam propagating along a reflection-mode path, a microscope objective lens disposed in the reflection-mode path, and a common-path interferometer comprising a diffraction grating, a Fourier lens, a pinhole, and a 2f system lens to collimate the reference beam and the imaging beam such that the collimated reference beam and imaging beam interfere with each other to form an interferogram at a final image plane.

Abstract: A quantitative phase microscopy (QPM) system and methods are provided for sample imaging and metrology in both transmissive and reflective modes. The QPM system includes a first illuminating beam propagating along a transmission-mode path and a second illuminating beam propagating along a reflection-mode path, a microscope objective lens disposed in the reflection-mode path, and a common-path interferometer comprising a diffraction grating, a Fourier lens, a pinhole, and a 2f system lens to collimate the reference beam and the imaging beam such that the collimated reference beam and imaging beam interfere with each other to form an interferogram at a final image plane.