Patents by Inventor Michael A. Caravaggio

Michael A. Caravaggio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Potted transducer array with matching network in a multiple pass configuration
    Patent number: 6367493
    Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.
    Type: Grant
    Filed: April 10, 2001
    Date of Patent: April 9, 2002
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Malcolm R. Schuler, Robert F. Longenberger, Rodney S. Ridley, Thomas E. Grebs, Jason R. Trost, Raymond J. Webb, Michael A. Caravaggio, Terry L. Fenstermacher
  • Potted transducer array with matching network in a multiple pass configuration
    Publication number: 20020038662
    Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.
    Type: Application
    Filed: December 6, 2001
    Publication date: April 4, 2002
    Applicant: INTERSIL CORPORATION
    Inventors: Malcolm R. Schuler, Robert F. Longenberger, Rodney S. Ridley, Thomas E. Grebs, Jason R. Trost, Raymond J. Webb, Michael A. Caravaggio, Terry L. Fenstermacher
  • Potted transducer array with matching network in a multiple pass configuration
    Patent number: 6314974
    Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.
    Type: Grant
    Filed: June 28, 1999
    Date of Patent: November 13, 2001
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Malcolm R. Schuler, Robert F. Longenberger, Rodney S. Ridley, Thomas E. Grebs, Jason R. Trost, Raymond J. Webb, Michael A. Caravaggio, Terry L. Fenstermacher
  • Potted transducer array with matching network in a multiple pass configuration
    Publication number: 20010015211
    Abstract: The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columnns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.
    Type: Application
    Filed: April 10, 2001
    Publication date: August 23, 2001
    Applicant: INTERSIL CORPORATION
    Inventors: Malcolm R. Schuler, Robert F. Longenberger, Rodney S. Ridley, Thomas E. Grebs, Jason R. Trost, Raymond J. Webb, Michael A. Caravaggio, Terry L. Fenstermacher