Patents by Inventor Michael A. Stuber

Michael A. Stuber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9673219
    Abstract: A vertical semiconductor device (e.g. a vertical power device, an IGBT device, a vertical bipolar transistor, a UMOS device or a GTO thyristor) is formed with an active semiconductor region, within which a plurality of semiconductor structures have been fabricated to form an active device, and below which at least a portion of a substrate material has been removed to isolate the active device, to expose at least one of the semiconductor structures for bottom side electrical connection and to enhance thermal dissipation. At least one of the semiconductor structures is preferably contacted by an electrode at the bottom side of the active semiconductor region.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: June 6, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Stuart B. Molin, Michael A. Stuber
  • Patent number: 9647209
    Abstract: Various methods and devices that involve phase change material (PCM) switches are disclosed. An exemplary integrated circuit comprises an active layer with a plurality of field effect transistor (FET) channels for a plurality of FETs. The integrated circuit also comprises an interconnect layer comprising a plurality of conductive interconnects. The plurality of conductive interconnects couple the plurality of field effect transistors. The integrated circuit also comprises an insulator layer covering at least a portion of the interconnect layer. The integrated circuit also comprises a channel of a radio-frequency (RF) PCM switch. The channel of the RF PCM switch is formed on the insulator layer.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: May 9, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Sinan Goktepeli, Michael A. Stuber
  • Patent number: 9624096
    Abstract: A semiconductor wafer is formed with a first device layer having active devices. A handle wafer having a trap rich layer is bonded to a top surface of the semiconductor wafer. A second device layer having a MEMS device or acoustic filter device is formed on a bottom surface of the semiconductor wafer. The second device layer is formed either by monolithic fabrication processes or layer-transfer processes.
    Type: Grant
    Filed: August 7, 2014
    Date of Patent: April 18, 2017
    Assignee: QUALCOMM Incorporated
    Inventor: Michael A. Stuber
  • Publication number: 20170101309
    Abstract: A semiconductor wafer is formed with a first device layer having active devices. A handle wafer having a trap rich layer is bonded to a top surface of the semiconductor wafer. A second device layer having a MEMS device or acoustic filter device is formed on a bottom surface of the semiconductor wafer. The second device layer is formed either by monolithic fabrication processes or layer-transfer processes.
    Type: Application
    Filed: December 21, 2016
    Publication date: April 13, 2017
    Inventor: Michael A. Stuber
  • Patent number: 9608619
    Abstract: A method and apparatus are disclosed for use in improving the gate oxide reliability of semiconductor-on-insulator (SOI) metal-oxide-silicon field effect transistor (MOSFET) devices using accumulated charge control (ACC) techniques. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one embodiment, a circuit comprises a MOSFET, operating in an accumulated charge regime, and means for controlling the accumulated charge, operatively coupled to the SOI MOSFET. A first determination is made of the effects of an uncontrolled accumulated charge on time dependent dielectric breakdown (TDDB) of the gate oxide of the SOI MOSFET. A second determination is made of the effects of a controlled accumulated charge on TDDB of the gate oxide of the SOI MOSFET.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: March 28, 2017
    Assignee: Peregrine Semiconductor Corporation
    Inventors: Michael A. Stuber, Christopher N. Brindle, Dylan J. Kelly, Clint L. Kemerling, George P. Imthurn, Robert B. Welstand, Mark L. Burgener, Alexander Dribinsky, Tae Youn Kim
  • Patent number: 9576937
    Abstract: An integrated circuit assembly includes a first substrate and a second substrate, with active layers formed on the first surfaces of each substrate, and with the second surfaces of each substrate coupled together. A method of fabricating an integrated circuit assembly includes forming active layers on the first surfaces of each of two substrates, and coupling the second surfaces of the substrates together.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: February 21, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Michael A. Stuber, Stuart B. Molin
  • Patent number: 9570558
    Abstract: An integrated circuit chip is formed with an active layer and a trap rich layer. The active layer is formed with an active device layer and a metal interconnect layer. The trap rich layer is formed above the active layer. In some embodiments, the active layer is included in a semiconductor wafer, and the trap rich layer is included in a handle wafer.
    Type: Grant
    Filed: September 16, 2015
    Date of Patent: February 14, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Christopher N. Brindle, Michael A. Stuber, Stuart B. Molin
  • Patent number: 9558951
    Abstract: An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-semiconductor-vias. The trap rich layer is formed above the circuit layer. The through-semiconductor-vias are also formed above the circuit layer. In some embodiments, the circuit layer is included in a wafer, and the trap rich layer and through-semiconductor-vias are included in another wafer. The two wafers are bonded together after formation of the trap rich layer and through-semiconductor-vias. Additionally, in some embodiments, yet another wafer may also be bonded to the wafer that includes the trap rich layer and through-semiconductor-vias. Furthermore, in some embodiments, another circuit layer may be formed in the wafer that includes the trap rich layer and through-semiconductor-vias.
    Type: Grant
    Filed: October 1, 2013
    Date of Patent: January 31, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Anton Arriagada, Chris Brindle, Michael A. Stuber
  • Patent number: 9553013
    Abstract: A method is disclosed. The method comprises fabricating a device layer on a top portion of a semiconductor wafer that comprises a substrate. The device layer comprises an active device. The method also comprises forming a trap rich layer at a top portion of a handle wafer. The forming comprises etching the top portion of the handle wafer to form a structure in the top portion of the handle wafer that configures the trap rich layer. The method also comprises bonding a top surface of the handle wafer to a top surface of the semiconductor wafer. The method also comprises removing a bottom substrate portion of the semiconductor wafer.
    Type: Grant
    Filed: February 26, 2015
    Date of Patent: January 24, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Michael A. Stuber, George Imthurn
  • Patent number: 9530796
    Abstract: An integrated circuit assembly comprises an insulating layer, a semiconductor layer, a handle layer, a metal interconnect layer, and transistors. The insulating layer has a first surface, a second surface, and a hole extending from the first surface to the second surface. The semiconductor layer has a first surface and a second surface, the first surface of the semiconductor layer contacting the first surface of the insulating layer. The handle layer is coupled to the second surface of the semiconductor layer. The metal interconnect layer is coupled to the second surface of the insulating layer, the metal interconnect layer being disposed within the hole in the insulating layer. The transistors are located in the semiconductor layer. The hole in the insulating layer extends to at least the first surface of the semiconductor layer. The metal interconnect layer electrically couples a plurality of the transistors to each other.
    Type: Grant
    Filed: May 7, 2014
    Date of Patent: December 27, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Michael A. Stuber, Stuart B. Molin, Chris Brindle
  • Publication number: 20160359002
    Abstract: Embodiments of the present invention provide for the enhancement of transistors in a semiconductor structure using a strain layer. The structure comprises a patterned layer consisting of an excavated region and a pattern region, a strain layer located in the excavated region and on the pattern region, an active layer located above the strain layer, a field effect transistor formed in the active layer, and a handle layer located above the active layer. The field effect transistor comprises a source, a drain, and a channel. The channel lies completely within a lateral extent of the pattern region. The source and the drain each lie only partially within the lateral extent of the pattern region. The strain layer alters a carrier mobility of the channel. In some embodiments, the strain layer is introduced to the back side of a semiconductor-on-insulator structure.
    Type: Application
    Filed: August 19, 2016
    Publication date: December 8, 2016
    Inventors: Paul A. Nygaard, Stuart B. Molin, Michael A. Stuber, Max Aubain
  • Patent number: 9515139
    Abstract: A trap rich layer for an integrated circuit chip is formed by chemical etching and/or laser texturing of a surface of a semiconductor layer. In some embodiments, a trap rich layer is formed by a technique selected from the group of techniques consisting of laser texturing, chemical etch, irradiation, nanocavity formation, porous Si-etch, semi-insulating polysilicon, thermal stress relief and mechanical texturing. Additionally, combinations of two or more of these techniques may be used to form a trap rich layer.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: December 6, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Anton Arriagada, Michael A. Stuber, Stuart B. Molin
  • Patent number: 9496227
    Abstract: In one embodiment, an integrated circuit with a signal-processing region is disclosed. The integrated circuit comprises a silicon-on-insulator die singulated from a silicon-on-insulator wafer. The silicon on insulator die comprises an active layer, an insulator layer, a substrate, and a strengthening layer. The substrate consists of an excavated substrate region, and a support region, the support region is in contact with the insulator layer. The excavated region covers a majority of the signal-processing region of the integrated circuit.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: November 15, 2016
    Assignee: Qualcomm Incorporated
    Inventors: Stuart B. Molin, Paul A. Nygaard, Michael A. Stuber
  • Patent number: 9478507
    Abstract: An integrated circuit assembly is formed with an insulating layer, a semiconductor layer, an active device, first, second, and third electrically conductive interconnect layers, and a plurality of electrically conductive vias. The insulating layer has a first surface and a second surface. The second surface is below the first surface. A substrate layer has been removed from the second surface. The semiconductor layer has a first surface and a second surface. The first surface of the semiconductor layer contacts the first surface of the insulating layer. The active device is formed in a region of the semiconductor layer. The first electrically conductive interconnect layer forms an electrically conductive ring. The second electrically conductive interconnect layer forms a first electrically conductive plate above the electrically conductive ring and the region of the semiconductor layer.
    Type: Grant
    Filed: January 14, 2015
    Date of Patent: October 25, 2016
    Assignee: Qualcomm Incorporated
    Inventor: Michael A. Stuber
  • Patent number: 9466719
    Abstract: Embodiments of the present invention provide for the enhancement of transistors in a semiconductor structure using a strain layer. The structure comprises a patterned layer consisting of an excavated region and a pattern region, a strain layer located in the excavated region and on the pattern region, an active layer located above the strain layer, a field effect transistor formed in the active layer, and a handle layer located above the active layer. The field effect transistor comprises a source, a drain, and a channel. The channel lies completely within a lateral extent of the pattern region. The source and the drain each lie only partially within the lateral extent of the pattern region. The strain layer alters a carrier mobility of the channel. In some embodiments, the strain layer is introduced to the back side of a semiconductor-on-insulator structure.
    Type: Grant
    Filed: November 13, 2014
    Date of Patent: October 11, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Paul A. Nygaard, Stuart B. Molin, Michael A. Stuber, Max Aubain
  • Publication number: 20160284671
    Abstract: An integrated circuit assembly includes an insulating layer having a having a first surface and a second surface. A first active layer contacts the first surface of the insulating layer. A metal bond pad is electrically connected to the first active layer and formed on the second surface of the insulating layer. A substrate having a first surface and a second surface, with a second active layer formed in the first surface, is provided such that the first active layer is coupled to the second surface of the substrate.
    Type: Application
    Filed: June 3, 2016
    Publication date: September 29, 2016
    Inventors: Michael A. Stuber, Stuart B. Molin, Mark Drucker, Peter Fowler
  • Publication number: 20160268504
    Abstract: Various methods and devices that involve phase change material (PCM) switches are disclosed. An exemplary integrated circuit comprises an active layer with a plurality of field effect transistor (FET) channels for a plurality of FETs. The integrated circuit also comprises an interconnect layer comprising a plurality of conductive interconnects. The plurality of conductive interconnects couple the plurality of field effect transistors. The integrated circuit also comprises an insulator layer covering at least a portion of the interconnect layer. The integrated circuit also comprises a channel of a radio-frequency (RF) PCM switch. The channel of the RF PCM switch is formed on the insulator layer.
    Type: Application
    Filed: May 25, 2016
    Publication date: September 15, 2016
    Inventors: Sinan Goktepeli, Michael A. Stuber
  • Publication number: 20160254231
    Abstract: An integrated circuit assembly is formed with an insulating layer, a semiconductor layer, an active device, first, second, and third electrically conductive interconnect layers, and a plurality of electrically conductive vias. The insulating layer has a first surface and a second surface. The second surface is below the first surface. A substrate layer has been removed from the second surface. The semiconductor layer has a first surface and a second surface. The first surface of the semiconductor layer contacts the first surface of the insulating layer. The active device is formed in a region of the semiconductor layer. The first electrically conductive interconnect layer forms an electrically conductive ring. The second electrically conductive interconnect layer forms a first electrically conductive plate above the electrically conductive ring and the region of the semiconductor layer.
    Type: Application
    Filed: May 13, 2016
    Publication date: September 1, 2016
    Inventor: MICHAEL A. STUBER
  • Publication number: 20160233198
    Abstract: An integrated circuit assembly includes a first substrate and a second substrate, with active layers formed on the first surfaces of each substrate, and with the second surfaces of each substrate coupled together. A method of fabricating an integrated circuit assembly includes forming active layers on the first surfaces of each of two substrates, and coupling the second surfaces of the substrates together.
    Type: Application
    Filed: April 15, 2016
    Publication date: August 11, 2016
    Inventors: Michael A. Stuber, Stuart B. Molin
  • Patent number: 9412644
    Abstract: A first wafer is provided that includes an insulating layer, a first active layer, and a handle layer. The insulating layer has a first surface and a second surface. The first active layer contacts the first surface of the insulating layer. The handle layer contacts the second surface of the insulating layer. A second wafer is provided that includes a substrate and a second active layer. The substrate has a first surface and a second surface. The second active layer contacts the first surface of the substrate. The second wafer is bonded to the first wafer by physically connecting the first active layer to the second surface of the substrate. The handle layer is removed. A metal bond pad is formed on the second surface of the insulating layer. The metal bond pad is electrically connected to the first active layer.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: August 9, 2016
    Assignee: Qualcomm Incorporated
    Inventors: Michael A. Stuber, Stuart B. Molin, Mark Drucker, Peter Fowler