Patents by Inventor Michael Allen Renta

Michael Allen Renta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUSCEPTOR FOR PLASMA PROCESSING CHAMBER
    Publication number: 20110315081
    Abstract: A susceptor for a plasma process apparatus, the susceptor having a graphite main body with a top surface for supporting at least one substrate, the top surface having a plasma sprayed aluminum oxide coating. A vacuum processing chamber, has a main chamber body, a showerhead provided at the ceiling of the chamber body, a pedestal provided inside the chamber body, and a susceptor coupled to the pedestal, the susceptor is made of a graphite main body having a top surface for supporting at least one substrate, the top surface having a dielectric coating such as, e.g., plasma sprayed aluminum oxide coating.
    Type: Application
    Filed: May 31, 2011
    Publication date: December 29, 2011
    Inventors: Kam S. Law, Daisheng Mao, Robin K. F. Law, Michael Allen Renta
  • SHOWERHEAD ASSEMBLY FOR VACUUM PROCESSING APPARATUS
    Publication number: 20110139372
    Abstract: Vacuum processing chambers having provisions for thermal expansion and contraction. Specific embodiments provide a plasma processing chamber having a showerhead that enables thermal expansion and contraction without imparting structural stress on the chamber body and without breaking any vacuum seal.
    Type: Application
    Filed: December 10, 2010
    Publication date: June 16, 2011
    Inventors: Wendell Thomas BLONIGAN, Michael Allen Renta