Patents by Inventor Michael Colgan

Michael Colgan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9772183
    Abstract: The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: September 26, 2017
    Assignee: RUDOLPH TECHNOLOGIES INC.
    Inventors: Wojciech Stefanczyk, James Francis Kane, Michael Colgan, James Abondolo
  • Publication number: 20150323320
    Abstract: The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.
    Type: Application
    Filed: June 27, 2013
    Publication date: November 12, 2015
    Inventors: Wojciech STEFANCZYK, James Francis KANE, Michael COLGAN, James ABONDOLO
  • Patent number: 9140601
    Abstract: An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: September 22, 2015
    Assignee: Rudolph Technologies, Inc.
    Inventors: Manjusha Mehendale, Michael Kotelyanskii, Priya Mukundhan, Michael Colgan, Wei Zhou
  • Patent number: 9041931
    Abstract: A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: May 26, 2015
    Assignees: Rudolph Technologies, Inc., Brown University
    Inventors: Michael Colgan, Michael J. Kotelyanskii, Christopher J. Morath, Humphrey J. Maris
  • Patent number: 8725728
    Abstract: A computer-based apparatus for compiling and evaluating character traits, including at least one processor for at least one specially programmed computer arranged to: transmit a plurality of queries regarding a plurality of character traits; receive a first response, from a first user, to the plurality of queries, including a respective first evaluation, by the first user, of the first user with respect to the character traits; generate, using the first response, a self-rating score regarding the character traits; transmit the queries to a second user; receive, from the second user a second response to the plurality of queries, the second response including a respective second evaluation, by the second user, of the first user with respect to said each character trait; generate, using the second response, an outside review score regarding the character traits; and transmit the self-rating score and the outside review score for display by at least one graphical user interface.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: May 13, 2014
    Inventors: William R. King, Michael A. Colgan
  • Publication number: 20140103188
    Abstract: An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.
    Type: Application
    Filed: January 27, 2012
    Publication date: April 17, 2014
    Inventors: Manjusha Mehendale, Michael Kotelyanskii, Priya Mukundhan, Michael Colgan, Wei Zhou
  • Publication number: 20120309116
    Abstract: A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough.
    Type: Application
    Filed: October 8, 2010
    Publication date: December 6, 2012
    Inventors: Michael Colgan, Michael J. Kotelyanskii, Christopher J. Morath, Humphrey J. Maris
  • Publication number: 20080060188
    Abstract: The present invention provides a micro-electromechanical relay that can produce low electrical contact resistance, and is capable of mechanical latching. More specifically, the present invention combines the clamping actions of cantilever beams with a movable shuttle-like spacer to generate high contact forces at the metal-metal contacts of the micro-electromechanical relay, thereby producing a very low electrical contact resistance and a mechanism for mechanical latching. Methods of fabricating the micro-electromechanical relay are also provided in this invention, which offer the advantages of both design and fabrication flexibilities by processing the top and bottom substrates separately prior to joining them together.
    Type: Application
    Filed: November 9, 2007
    Publication date: March 13, 2008
    Inventors: Yuebin Ning, Graham McKinnon, Cameron Howey, Michael Colgan
  • Publication number: 20060145793
    Abstract: The present invention provides a micro-electromechanical relay that can produce low electrical contact resistance, and is capable of mechanical latching. More specifically, the present invention combines the clamping actions of cantilever beams with a movable shuttle-like spacer to generate high contact forces at the metal-metal contacts of the micro-electromechanical relay, thereby producing a very low electrical contact resistance and a mechanism for mechanical latching. Methods of fabricating the micro-electromechanical relay are also provided in this invention, which offer the advantages of both design and fabrication flexibilities by processing the top and bottom substrates separately prior to joining them together.
    Type: Application
    Filed: January 5, 2005
    Publication date: July 6, 2006
    Applicant: Norcada Inc.
    Inventors: Yuebin Ning, Graham McKinnon, Cameron Howey, Michael Colgan