Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

Abstract: An oximeter sensor adapter which allows a sensor without a resistor in parallel with its LEDs to operate with an oximeter expecting such a resistor in parallel. The adapter includes LED drive electronics and appropriate oximeter drive current sensing circuitry for converting the drive signals from the oximeter into appropriate LED drive signals for the sensor. Instead of a resistor being on the sensor in parallel with one or more of the LEDs, the resistor is placed across the leads in front of the LED drive electronics and oximeter drive current sensing circuitry, on the oximeter side of the adapter. By providing LED drive electronics and oximeter drive current sensing circuitry which do not draw significant current at a low voltage, the oximeter is able to measure the resistor independently just as if it were in parallel with the LEDs.

Abstract: The present invention provides a memory chip for use in an oximeter sensor, or an associated adapter or connector circuit. The memory chip allows the storing of sensor expiration data to provide enhanced capabilities for the oximeter sensor. In addition to providing unique data to store in such a memory, the invention describes unique uses of sensor expiration data stored in such a memory.

Abstract: An oximeter sensor adapter which allows a sensor without a resistor in parallel with its LEDs to operate with an oximeter expecting such a resistor in parallel. The adapter has a switching circuit which has inputs connected to the LED drive outputs of the oximeter. The switching circuit has two pairs of outputs, one connected to the LED drive lines of the sensor, and the other connected to a resistor in the adapter itself. The switching circuit is controlled by a sensing circuit which senses when a signal on the input lines drops below a predetermined level, such as 0.5 volts. The sensing circuit, in response to a low voltage (corresponding to an attempt to read a resistor in parallel with the LEDs), will provide a signal to a switching circuit. The switching circuit will switch the resistor onto the input lines so that it can be read. When a higher voltage returns to the input lines, the switching circuit switches back to the LEDs themselves.

Abstract: A pulse oximeter sensor having an emitter(s) and a detector, with a layer having a first portion of the emitter and a second portion of layer over the detector is provided. A barrier is included between the first and second portions of the overlying layer to substantially block radiation of the wavelengths emitted by the emitter(s). Preferably, the barrier reduces the radiation shunted to less than 10% of the radiation detected, and more preferably to less than 1% of the radiation detected.

Abstract: A pulse oximeter sensor having an emitter(s) and a detector, with a layer having a first portion of the emitter and a second portion of layer over the detector is provided. A barrier is included between the first and second portions of the overlying layer to substantially block radiation of the wavelengths emitted by the emitter(s). Preferably, the barrier reduces the radiation shunted to less than 10% of the radiation detected, and more preferably to less than 1% of the radiation detected.

Abstract: The present invention provides a memory chip for use in an oximeter sensor, or an associated adapter or connector circuit. The memory chip allows the storing of patient related data, such as patient trending data or a patient ID, to provide enhanced capabilities for the oximeter sensor. In addition to providing unique data to store in such a memory, the present invention include unique uses of the data stored in such a memory.

Abstract: The present invention provides a memory chip for use in an oximeter sensor, or an associated adapter or connector circuit. The memory chip allows the storing of sensor expiration data to provide enhanced capabilities for the oximeter sensor. In addition to providing unique data to store in such a memory, the invention describes unique uses of sensor expiration data stored in such a memory.

Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

Abstract: The present invention provides a memory chip for use in an oximeter sensor, or an associated adapter or connector circuit. The memory chip allows the storing of different data to provide enhanced capabilities for the oximeter sensor. In addition to providing unique data to store in such a memory, the invention describes unique uses of data stored in such a memory. The data stored in the memory chip may include information relating to use of the oximeter sensor. For example, the memory chip may encode a sensor model identification that can be displayed on a display screen when the sensor is connected to an oximeter monitor. The memory may also encode a range of operating parameters such as light levels over which the sensor can function or a maximum drive current. The operating parameters are read and interpreted by a controller circuit to control the pulse oximetry system.

Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

Abstract: A memory in a sensor is used to store multiple coefficients for a physiological parameter. In one embodiment, not only are the sensor's specific calibration coefficients stored in a memory in the sensor for the formula to determine oxygen saturation, but multiple sets of coefficients are stored. The multiple sets apply to different ranges of saturation values to provide a better fit to occur by breaking the R to SpO2 relationship up into different pieces, each described by a different function. The different functions can also be according to different formulas for determining oxygen saturation.

Abstract: A method for operating an oximeter sensor, and corresponding apparatus, which includes an encoded temperature characteristic of a light emitter in the sensor. The encoded temperature characteristic is read, and is used to modify a drive of the light emitter in the sensor. This enables a light emitter to be operated at its maximum allowable intensity to maximize a signal to noise ratio, without burning a patient, in accordance with the particular characteristics of that light emitter.

Abstract: An encoding element which is backward compatible and will provide a single coded value to older analyzers in response to first signal, but will also provide a second coded value to a new analyzer or monitor. In one embodiment, both coded values are provided over the same first and second leads which are compatible with existing sensors. In another embodiment, a first voltage level produces a first current from the encoding element, while a second voltage level will produce the second coded value. In another embodiment, a first coded value is provided in response to a DC current from older analyzers. A second coded value is provided in response to a AC signal from newer analyzers. Yet another embodiment provides the coded value in the form of a resonant circuit in the AC driven mode. In another embodiment, the first coded value is provided over the same two leads after a period of time, with the second value being provided prior to that period of time passing.

Abstract: A pulse oximeter sensor having an emitter(s) and a detector, with a layer having a first portion of the emitter and a second portion of layer over the detector is provided. A barrier is included between the first and second portions of the overlying layer to substantially block radiation of the wavelengths emitted by the emitter(s). Preferably, the barrier reduces the radiation shunted to less than 10% of the radiation detected, and more preferably to less than 1% of the radiation detected.

Abstract: A pulse oximeter sensor having an emitter(s) and a detector, with a layer having a first portion of the emitter and a second portion of layer over the detector is provided. A barrier is included between the first and second portions of the overlying layer to substantially block radiation of the wavelengths emitted by the emitter(s). Preferably, the barrier reduces the radiation shunted to less than 10% of the radiation detected, and more preferably to less than 1% of the radiation detected. Additionally the shunt barrier is selected from a fibrous material, a woven material, and a compressible foam.

Abstract: An oximeter probe segment with a first fiber optic for carrying light to a patient, and a second fiber optic for carrying return light from the patient. The light is of a wavelength spectrum which can be shifted by travelling through the first and second fiber optics. The probe segment includes an element which is configured to provide a signal corresponding to the shift of the wavelength spectrum through the first and second fiber optics. This signal can either be used to actually measure the shift, or the signal can itself be a coded value corresponding to the shift.

Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

Abstract: The present invention provides an encoding mechanism for a medical sensor which uses a modulated signal to provide the coded data to a remote analyzer. The modulated signal could be, for instance, a pulse width modulated signal or a frequency modulated signal. This signal is amplitude independent and thus provides a significant amount of noise immunity.

Abstract: Substrate inspection apparatus and methods, and illumination apparatus. The inspection apparatus and method includes memory for storing the desired features of the surface of the substrate, focussed illuminator for substantially uniformly illuminating a region of the surface of the substrate to be inspected. Additionally there is a sensor for imaging the region of the substrate illuminated by the illuminator, and a comparator responsive to the memory and sensor for comparing the imaged region of the substrate with the stored desired features of the substrate. The illumination apparatus is designed to provide substantially uniform focussed illumination along a narrow linear region. This apparatus includes first, second and third reflectors elliptically cylindrical in shape, each with its long axis substantially parallel to the long axes of each of the others.