Patents by Inventor Michael Eppler

Michael Eppler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240162007
    Abstract: Embodiments of the present disclosure generally relate to a system used in a semiconductor device manufacturing process. More specifically, embodiments provided herein generally include apparatus and methods for synchronizing and controlling the delivery of an RF bias signal and a pulsed voltage waveform to one or more electrodes within a plasma processing chamber. The apparatus and methods disclosed herein can be useful to at least minimize or eliminate a microloading effect created while processing small dimension features that have differing densities across various regions of a substrate. The plasma processing methods and apparatus described herein are configured to improve the control of various characteristics of the generated plasma and control an ion energy distribution (IED) of the plasma generated ions that interact with a surface of a substrate during plasma processing.
    Type: Application
    Filed: November 10, 2022
    Publication date: May 16, 2024
    Inventors: Deyang LI, Sunil SRINIVASAN, Yi-Chuan CHOU, Shahid RAUF, Kuan-Ting LIU, Jason A. KENNEY, Chung LIU, Olivier P. JOUBERT, Shreeram Jyoti DASH, Aaron EPPLER, Michael Thomas NICHOLS
  • Patent number: 10809108
    Abstract: A sensor is provided for determining at least one parameter of a fluid medium flowing through a measurement channel, in particular an intake air mass flow of an internal combustion engine. The sensor has a sensor housing, in particular a plug-in sensor that is inserted into or is insertable into a flow tube, in which sensor a measurement channel is fashioned, and has at least one sensor chip situated in the measurement channel for determining the parameter of the fluid medium. The sensor housing has an electronics compartment for accommodating an electronics module and has an electronics compartment cover for closing the electronics compartment. The electronics compartment cover has, at least in part, electrically conductive properties. For example, the electronics compartment cover is placed onto the electrical ground of the sensor and, viewed in projection, partly or completely covers the sensor chip.
    Type: Grant
    Filed: October 6, 2015
    Date of Patent: October 20, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Achim Briese, Alexander Markov, Axel-Werner Haag, Edda Sommer, Hans Beyrich, Uwe Konzelmann, Bastian Bodenberger, Frank Steuber, Gerhard Hueftle, Holger Unger, Michael Rittmann, Michael Eppler, Reinhold Herrmann, Thomas Schwartzkopff
  • Patent number: 10006793
    Abstract: A sensor device for detecting a property of a fluid medium flowing in a channel includes: (a) a channel piece through which a fluid medium is able to flow, the channel piece having (i) an inlet; (ii) an outlet; (iii) a channel piece wall including an inner wall, an outer side connecting the inlet and the outlet, and an insertion opening; and (iv) areas having electrical conductivity; (b) at least one sensor having a sensor housing and a sensor element situated in the sensor housing, the sensor housing being insertable through the insertion opening in the channel piece wall into the channel piece. The entire channel piece wall of the channel piece is completely made of electrically conductive plastic, the channel piece wall being at fixed electrical potentials.
    Type: Grant
    Filed: May 13, 2014
    Date of Patent: June 26, 2018
    Assignee: ROBERT BOSCH GMBH
    Inventors: Holger Unger, Edda Sommer, Manuel Blas Sancho De Castro, Ulrich Wagner, Uwe Konzelmann, Michael Eppler
  • Publication number: 20170328753
    Abstract: A sensor is provided for determining at least one parameter of a fluid medium flowing through a measurement channel, in particular an intake air mass flow of an internal combustion engine. The sensor has a sensor housing, in particular a plug-in sensor that is inserted into or is insertable into a flow tube, in which sensor a measurement channel is fashioned, and has at least one sensor chip situated in the measurement channel for determining the parameter of the fluid medium. The sensor housing has an electronics compartment for accommodating an electronics module and has an electronics compartment cover for closing the electronics compartment. The electronics compartment cover has, at least in part, electrically conductive properties. For example, the electronics compartment cover is placed onto the electrical ground of the sensor and, viewed in projection, partly or completely covers the sensor chip.
    Type: Application
    Filed: October 6, 2015
    Publication date: November 16, 2017
    Inventors: Achim Briese, Alexander Markov, Axel-Werner Haag, Edda Sommer, Hans Beyrich, Uwe Konzelmann, Bastian Bodenberger, Frank Steuber, Gerhard Hueftle, Holger Unger, Michael Rittmann, Michael Eppler, Reinhold Herrmann, Thomas Schwartzkopff
  • Publication number: 20160153819
    Abstract: A sensor device for detecting a property of a fluid medium flowing in a channel includes: (a) a channel piece through which a fluid medium is able to flow, the channel piece having (i) an inlet; (ii) an outlet; (iii) a channel piece wall including an inner wall, an outer side connecting the inlet and the outlet, and an insertion opening; and (iv) areas having electrical conductivity; (b) at least one sensor having a sensor housing and a sensor element situated in the sensor housing, the sensor housing being insertable through the insertion opening in the channel piece wall into the channel piece. The entire channel piece wall of the channel piece is completely made of electrically conductive plastic, the channel piece wall being at fixed electrical potentials.
    Type: Application
    Filed: May 13, 2014
    Publication date: June 2, 2016
    Inventors: Holger Unger, Edda Sommer, Manuel Blas Sancho De Castro, Ulrich Wagner, Uwe Konzelmann, Michael Eppler
  • Patent number: 6860663
    Abstract: The printing device comprises a print head unit, a transporting device for the printing material and a structural housing board on which the print head unit and the transporting device are mounted at one end in cantilevered manner and in a predetermined relationship relative to one another. The transporting device comprises a stiff support member which is rigidly connected to the housing board, a mounting member which extends substantially parallel relative to the housing board and is held on the stiff support member, and at least one transport roller for the transportation of the strip of printing material which is mounted at both ends. The stiff support member comprises connecting elements for releasably fixing th mounting member and also guide elements which co-operate with corresponding guide elements of the mounting member for exactly positioning the arrangement with reference to the support member.
    Type: Grant
    Filed: October 23, 2002
    Date of Patent: March 1, 2005
    Assignee: Bizerba GmbH & Co. KG
    Inventors: Jürgen Bernhard, Hans Michael Eppler, Willi Sautter
  • Publication number: 20030053835
    Abstract: In order to enable those parts of the transporting device that come into contact with the strip of printing material in a printing device used for printing on printing material in the form of a roll, especially label and/or receipt rolls, to be easily replaced from the freely accessible insertion side of the strip without requiring subsequent adjustments, it is proposed that the printing device should comprise a print head unit, a transporting device for the printing material and a structural housing board on which the print head unit and the transporting device are mounted at one end in cantilevered manner and in a predetermined relationship relative to one another, wherein the transporting device comprises a stiff support member which is rigidly connected to the housing board, a mounting member which extends substantially parallel relative to the housing board and is held on the stiff support member, and at least one transport roller for the transportation of the strip of printing material which is mounted
    Type: Application
    Filed: October 23, 2002
    Publication date: March 20, 2003
    Applicant: Bizerba GmbH & Co. KG
    Inventors: Jurgen Bernhard, Hans Michael Eppler, Willi Sautter