Abstract: Partially expanded graphite flake having a specific volume of no more than about 50 cm3/g, more preferably, about 10-25 cm3/g has excellent sheet forming properties and is readily moldable to form molded products, such as gaskets. The partially expanded graphite flake may be produced by a low temperature process, in which the flakes are first intercalated with an intercalation solution, then subjected to a low temperature exfoliation of below about 500° C. In an alternative process, the flakes are intercalated with no more than about 40 pph of an intercalation solution (less if the particles are not subjected to a subsequent washing step) and then exfoliated at conventional exfoliation temperatures of about 800° C.

Abstract: An article with an chemical vapor deposition (CVD) aluminum nitride coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a substrate made of a nitride of aluminum or boron, and further has one or more graphite elements for resistance heating or electromagnetic chucking or both. A pyrolytic boron nitride layer may be provided between the substrate and the CVD aluminum nitride coating, and may either encompass or exclude the graphite element or elements.

Abstract: A method and system for generating and processing billing and payment information for a service provided by service providers in multiple tiers includes collecting usage information of the service by a customer from one of the tiers of the multiple tiers or a third party. The usage information is integrated with customer profile information of the customer provided by a second tier of the multiple tiers. Billing information is generated based on the usage information, the customer profile information, and rate information for the service. A bill based on the generated billing information is transmitted to the customer either using paper mail or by electronic bill presentment. Payments received are processed and allocated based on the payment information.

Abstract: A pyrolytic boron nitride radiation heating unit including a dielectric base of boron nitride, a heating element of pyrolytic graphite superimposed on the dielectric base, a first outer coating surrounding said heating element composed of pyrolytic boron nitride and a second outer coating surrounding said first outer coating and having an emmissivity above at least about 0.9 at a wave length of 1.55 microns. The second outer coating is preferably selected from the group consisting of silicon carbide and boron carbide.

Abstract: A heated view port for in-situ optical observation of a deposition chamber in a vessel under high vacuum application comprising a plurality of superimposed layers arranged in the shape of an annular band mounted around the view port substantially at the outer periphery thereof. The band includes a first layer of pyrolytic boron nitride, a second layer of pyrolytic graphite covering at least one surface of the pyrolytic boron nitride layer, an outer layer of pyrolytic boron nitride and two electrical contact terminals in contact with the pyrolytic graphite layer in an arrangement forming parallel resistive paths between the contact terminals. The terminal contacts are connected to an external source of electrical power.

Abstract: A pyrolytic boron nitride heating unit composed of a dielectric base of boron nitride and a pyrolytic graphite heating element having contact ends for connection to an external power supply through a contact assembly comprising graphite posts connected to the contact ends with each post having a pyrolytic boron nitride coating and exposed attachment ends spaced a predetermined minimum distance from the contact ends for connection to the power supply. The contact assembly preferably also includes flexible graphite washers for connection between the contact ends and the graphite posts.

Abstract: The present invention relates to a method for forming a uniform protective outer coating of pyrolytic graphite on a graphite chuck which is used for supporting a started filament in the manufacture of carbon free polycrystalline silicon.