Patents by Inventor Michael Hibbs

Michael Hibbs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • In-situ pellicle monitor
    Publication number: 20050069785
    Abstract: A mask structure and method of quantitatively measuring pellicle degradation in production photomasks by measuring overlay in test structures on the mask. A structure is located in a high transmission region close to a transition region between a low transmission and a high transmission region of the mask such that pellicle degradation impacts the printing of the object. A second structure is located in low transmission region such that the printing of the second structure overlaps the first and provides a measure of pellicle degradation.
    Type: Application
    Filed: November 5, 2004
    Publication date: March 31, 2005
    Applicant: International Business Machines Corporation
    Inventor: Michael Hibbs