Abstract: A mask for use in a photolithographic process. The mask includes a plate or substrate having first and second opposite surfaces, a first image on the first surface of the substrate and a second image on the second surface of the substrate. When the mask is used in a photolithographic process, energy is reflected by the first image prior to entering the substrate and energy is reflected by the second image after passing through the substrate.

Abstract: A mask for use in a photolithographic process. The mask includes a plate or substrate having first and second opposite surfaces, a first image on the first surface of the substrate and a second image on the second surface of the substrate. When the mask is used in a photolithographic process, energy is reflected by the first image prior to entering the substrate and energy is reflected by the second image after passing through the substrate.

Abstract: A method and system for preventing smoke and fire damage in a clean room within which a tool including an electrically powered element is located. The method includes the step of providing the tool with a system including a fire proof housing, a sensor, an environmental sealing mechanism, an operator panel and a controller. The fire proof housing is secured over the tool and includes a door and at least one port to the tool. The sensor monitors an environmental condition within the housing and generates a sensor signal. The environmental sealing mechanism seals the at least one port and the door to the housing in response to the control signals to render the housing environmentally sealed. The operator panel includes visual indicators responsive to actuation signals. The controller is adapted to receive and process the sensor signals and to execute a shutdown control sequence during which the control signals and the actuation signals are generated.