Abstract: The present invention relates to a fixed-fixed membrane for a microelectromechanical system (MEMS) microphone. In one embodiment, a MEMS acoustic sensor includes a substrate; a membrane situated parallel to the substrate; and at least one vent formed into the membrane, wherein the at least one vent is a curved opening in the membrane, and wherein the at least one vent is disposed substantially along a length of the membrane.

Abstract: An inertial measurement apparatus has a movable proof mass and at least one electrode with a plurality of fingers that extend at non-right angles relative to an axis of motion of the proof mass. Multiple electrodes may be utilized with the same proof mass, with each of the electrodes having electrode fingers that extend at non-right angles relative to the axis of motion of the proof mass. A single-gap shock stop structure improves vibration immunity of micro-machined in-plane sensors. The angle of the electrode fingers creates a different effective gap to reduce the probability of contact between the proof mass and the electrode during extreme operational conditions.

Abstract: A pedestal projection having reduced cross-sectional area secures a MEMs device to a housing surface in a manner which reduces strain on the MEMS die due to differences in coefficients of thermal expansion while more evenly distributing to the MEMS sensor any external forces mechanically coupled through the housing structure. The pedestal projection may be integrally formed with a surface on either MEMS die or housing member and is axially aligned with the structure which anchors the MEMS sensor to the MEMS die.