Patents by Inventor Michael Jozef Renkens

Michael Jozef Renkens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050168714
    Abstract: The invention pertains to a measurement system for measuring displacement of a moveable object relative to a base in at least a first direction of measurement, the moveable object having at least one reference part that is moveable in a plane of movement relative to the base, the actual movements of the reference part being within an area of said plane of movement that is bounded by a closed contour having a shape. The measurement system comprises a sensor head that operatively communicates with a planar element. The sensor head is mounted onto the base and the planar element being mounted onto the reference part of the moveable object or the other way around, wherein the planar element has a shape that is essentially identical to the shape of the closed contour.
    Type: Application
    Filed: February 3, 2004
    Publication date: August 4, 2005
    Applicant: ASML NETHERLANDS B. V.
    Inventors: Michael Jozef Renkens, Martinus Cornelis Verhagen, Alexander Struycken, Ruben Kok